IT1213183B - Dispositivo per la protezione di una superficie, durante il trattamento chimico dell'opposta superficie, di elementi lenticolari in genere e di fette di silicio in particolare. - Google Patents

Dispositivo per la protezione di una superficie, durante il trattamento chimico dell'opposta superficie, di elementi lenticolari in genere e di fette di silicio in particolare.

Info

Publication number
IT1213183B
IT1213183B IT8421623A IT2162384A IT1213183B IT 1213183 B IT1213183 B IT 1213183B IT 8421623 A IT8421623 A IT 8421623A IT 2162384 A IT2162384 A IT 2162384A IT 1213183 B IT1213183 B IT 1213183B
Authority
IT
Italy
Prior art keywords
protection
general
during
chemical treatment
lenticular elements
Prior art date
Application number
IT8421623A
Other languages
English (en)
Italian (it)
Other versions
IT8421623A0 (it
Inventor
Martino Mauri
Original Assignee
Ates Componenti Elettron
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ates Componenti Elettron filed Critical Ates Componenti Elettron
Priority to IT8421623A priority Critical patent/IT1213183B/it
Publication of IT8421623A0 publication Critical patent/IT8421623A0/it
Priority to FR858509365A priority patent/FR2566682B1/fr
Priority to DE19853522465 priority patent/DE3522465A1/de
Application granted granted Critical
Publication of IT1213183B publication Critical patent/IT1213183B/it

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/32—Processes for applying liquids or other fluent materials using means for protecting parts of a surface not to be coated, e.g. using stencils, resists
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Weting (AREA)
IT8421623A 1984-06-27 1984-06-27 Dispositivo per la protezione di una superficie, durante il trattamento chimico dell'opposta superficie, di elementi lenticolari in genere e di fette di silicio in particolare. IT1213183B (it)

Priority Applications (3)

Application Number Priority Date Filing Date Title
IT8421623A IT1213183B (it) 1984-06-27 1984-06-27 Dispositivo per la protezione di una superficie, durante il trattamento chimico dell'opposta superficie, di elementi lenticolari in genere e di fette di silicio in particolare.
FR858509365A FR2566682B1 (fr) 1984-06-27 1985-06-20 Dispositif pour proteger une surface d'un element lenticulaire en general, et d'une tranche de silicium en particulier, pendant que l'autre surface de celui-ci est soumise a un traitement chimique
DE19853522465 DE3522465A1 (de) 1984-06-27 1985-06-22 Vorrichtung zum schutz einer oberflaeche waehrend der chemischen behandlung von linsenfoermigen elementen und insbesondere von siliziumscheiben

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT8421623A IT1213183B (it) 1984-06-27 1984-06-27 Dispositivo per la protezione di una superficie, durante il trattamento chimico dell'opposta superficie, di elementi lenticolari in genere e di fette di silicio in particolare.

Publications (2)

Publication Number Publication Date
IT8421623A0 IT8421623A0 (it) 1984-06-27
IT1213183B true IT1213183B (it) 1989-12-14

Family

ID=11184466

Family Applications (1)

Application Number Title Priority Date Filing Date
IT8421623A IT1213183B (it) 1984-06-27 1984-06-27 Dispositivo per la protezione di una superficie, durante il trattamento chimico dell'opposta superficie, di elementi lenticolari in genere e di fette di silicio in particolare.

Country Status (3)

Country Link
DE (1) DE3522465A1 (enrdf_load_stackoverflow)
FR (1) FR2566682B1 (enrdf_load_stackoverflow)
IT (1) IT1213183B (enrdf_load_stackoverflow)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5989943A (en) * 1989-09-07 1999-11-23 Quicklogic Corporation Method for fabrication of programmable interconnect structure
JPH04226027A (ja) * 1990-04-23 1992-08-14 Genus Inc ガス阻止装置を有するウエファ周辺封止装置
US5133284A (en) * 1990-07-16 1992-07-28 National Semiconductor Corp. Gas-based backside protection during substrate processing
US5620525A (en) * 1990-07-16 1997-04-15 Novellus Systems, Inc. Apparatus for supporting a substrate and introducing gas flow doximate to an edge of the substrate
US5843233A (en) * 1990-07-16 1998-12-01 Novellus Systems, Inc. Exclusion guard and gas-based substrate protection for chemical vapor deposition apparatus
US5578532A (en) * 1990-07-16 1996-11-26 Novellus Systems, Inc. Wafer surface protection in a gas deposition process
JP3167317B2 (ja) * 1990-10-18 2001-05-21 株式会社東芝 基板処理装置及び同方法
US5427670A (en) * 1992-12-10 1995-06-27 U.S. Philips Corporation Device for the treatment of substrates at low temperature
EP0611273B1 (de) * 1993-02-08 1998-09-16 SEZ Semiconductor-Equipment Zubehör für die Halbleiterfertigung AG Träger für scheibenförmige Gegenstände
AT1527U1 (de) * 1995-07-12 1997-06-25 Sez Semiconduct Equip Zubehoer Träger für scheibenförmige gegenstände, insbesondere siliziumscheiben
WO1997003456A1 (de) * 1995-07-12 1997-01-30 Sez Semiconductor-Equipment Zubehör Für Die Halbleiterfertigung Gesellschaft Mbh Träger für scheibenförmige gegenstände, insbesondere siliziumscheiben
AT405655B (de) * 1997-03-26 1999-10-25 Sez Semiconduct Equip Zubehoer Verfahren und vorrichtung zum einseitigen bearbeiten scheibenförmiger gegenstände
DE10122845C2 (de) * 2001-05-11 2003-04-03 Infineon Technologies Ag Verfahren zum Trennen einer Verbindung zwischen einem scheibenförmigen Gegenstand und einem Trägerwafer
DE102008062343B4 (de) * 2008-12-15 2013-05-29 Festo Ag & Co. Kg Nach dem Bernoulli-Prinzip arbeitender Sauggreifer
JP5944724B2 (ja) * 2012-04-12 2016-07-05 株式会社ディスコ チャックテーブル

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3036829A1 (de) * 1980-09-30 1982-05-13 Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen Verfahren zum aufnehmen von kristallscheiben

Also Published As

Publication number Publication date
FR2566682A1 (fr) 1986-01-03
FR2566682B1 (fr) 1989-12-15
IT8421623A0 (it) 1984-06-27
DE3522465A1 (de) 1986-01-09
DE3522465C2 (enrdf_load_stackoverflow) 1993-07-15

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Legal Events

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TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19970628