FR2566682B1 - Dispositif pour proteger une surface d'un element lenticulaire en general, et d'une tranche de silicium en particulier, pendant que l'autre surface de celui-ci est soumise a un traitement chimique - Google Patents
Dispositif pour proteger une surface d'un element lenticulaire en general, et d'une tranche de silicium en particulier, pendant que l'autre surface de celui-ci est soumise a un traitement chimiqueInfo
- Publication number
- FR2566682B1 FR2566682B1 FR858509365A FR8509365A FR2566682B1 FR 2566682 B1 FR2566682 B1 FR 2566682B1 FR 858509365 A FR858509365 A FR 858509365A FR 8509365 A FR8509365 A FR 8509365A FR 2566682 B1 FR2566682 B1 FR 2566682B1
- Authority
- FR
- France
- Prior art keywords
- protecting
- subject
- general
- silicon wafer
- chemical treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title 1
- 229910052710 silicon Inorganic materials 0.000 title 1
- 239000010703 silicon Substances 0.000 title 1
- 239000000126 substance Substances 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/32—Processes for applying liquids or other fluent materials using means for protecting parts of a surface not to be coated, e.g. using stencils, resists
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Weting (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT8421623A IT1213183B (it) | 1984-06-27 | 1984-06-27 | Dispositivo per la protezione di una superficie, durante il trattamento chimico dell'opposta superficie, di elementi lenticolari in genere e di fette di silicio in particolare. |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2566682A1 FR2566682A1 (fr) | 1986-01-03 |
FR2566682B1 true FR2566682B1 (fr) | 1989-12-15 |
Family
ID=11184466
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR858509365A Expired FR2566682B1 (fr) | 1984-06-27 | 1985-06-20 | Dispositif pour proteger une surface d'un element lenticulaire en general, et d'une tranche de silicium en particulier, pendant que l'autre surface de celui-ci est soumise a un traitement chimique |
Country Status (3)
Country | Link |
---|---|
DE (1) | DE3522465A1 (fr) |
FR (1) | FR2566682B1 (fr) |
IT (1) | IT1213183B (fr) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5989943A (en) * | 1989-09-07 | 1999-11-23 | Quicklogic Corporation | Method for fabrication of programmable interconnect structure |
DE69108285T2 (de) * | 1990-04-23 | 1995-12-14 | Genus Inc | Peripherieabdichtung für Halbleiterplättchen durch Gasinjektion. |
US5843233A (en) * | 1990-07-16 | 1998-12-01 | Novellus Systems, Inc. | Exclusion guard and gas-based substrate protection for chemical vapor deposition apparatus |
US5620525A (en) * | 1990-07-16 | 1997-04-15 | Novellus Systems, Inc. | Apparatus for supporting a substrate and introducing gas flow doximate to an edge of the substrate |
US5578532A (en) * | 1990-07-16 | 1996-11-26 | Novellus Systems, Inc. | Wafer surface protection in a gas deposition process |
US5133284A (en) * | 1990-07-16 | 1992-07-28 | National Semiconductor Corp. | Gas-based backside protection during substrate processing |
JP3167317B2 (ja) * | 1990-10-18 | 2001-05-21 | 株式会社東芝 | 基板処理装置及び同方法 |
US5427670A (en) * | 1992-12-10 | 1995-06-27 | U.S. Philips Corporation | Device for the treatment of substrates at low temperature |
ATE171306T1 (de) * | 1993-02-08 | 1998-10-15 | Sez Semiconduct Equip Zubehoer | Träger für scheibenförmige gegenstände |
WO1997003456A1 (fr) * | 1995-07-12 | 1997-01-30 | Sez Semiconductor-Equipment Zubehör Für Die Halbleiterfertigung Gesellschaft Mbh | Support pour objets en forme de pastille, en particulier des pastilles de silicium |
AT1527U1 (de) * | 1995-07-12 | 1997-06-25 | Sez Semiconduct Equip Zubehoer | Träger für scheibenförmige gegenstände, insbesondere siliziumscheiben |
AT405655B (de) * | 1997-03-26 | 1999-10-25 | Sez Semiconduct Equip Zubehoer | Verfahren und vorrichtung zum einseitigen bearbeiten scheibenförmiger gegenstände |
DE10122845C2 (de) * | 2001-05-11 | 2003-04-03 | Infineon Technologies Ag | Verfahren zum Trennen einer Verbindung zwischen einem scheibenförmigen Gegenstand und einem Trägerwafer |
DE102008062343B4 (de) * | 2008-12-15 | 2013-05-29 | Festo Ag & Co. Kg | Nach dem Bernoulli-Prinzip arbeitender Sauggreifer |
JP5944724B2 (ja) * | 2012-04-12 | 2016-07-05 | 株式会社ディスコ | チャックテーブル |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3036829A1 (de) * | 1980-09-30 | 1982-05-13 | Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen | Verfahren zum aufnehmen von kristallscheiben |
-
1984
- 1984-06-27 IT IT8421623A patent/IT1213183B/it active
-
1985
- 1985-06-20 FR FR858509365A patent/FR2566682B1/fr not_active Expired
- 1985-06-22 DE DE19853522465 patent/DE3522465A1/de active Granted
Also Published As
Publication number | Publication date |
---|---|
IT1213183B (it) | 1989-12-14 |
DE3522465C2 (fr) | 1993-07-15 |
FR2566682A1 (fr) | 1986-01-03 |
DE3522465A1 (de) | 1986-01-09 |
IT8421623A0 (it) | 1984-06-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
FR2566682B1 (fr) | Dispositif pour proteger une surface d'un element lenticulaire en general, et d'une tranche de silicium en particulier, pendant que l'autre surface de celui-ci est soumise a un traitement chimique | |
GB2110876B (en) | Formation of submicron features in semiconductor devices | |
IT1236657B (it) | Apparecchiatura per impedire l'annebbiamento di un wafer di semi-conduttore | |
DE3280418T2 (de) | Amorpher halbleiter und photovoltaische vorrichtung aus amorphem silizium. | |
GB8811876D0 (en) | Monolithically integrated semiconductor device having bidirectional conducting capability & method of fabrication | |
EP0239958A3 (en) | Thin film semiconductor device and method of manufacturing the same | |
IT8248535A0 (it) | Procedimento per la purificazione di materiali a base di silicio, in particolare triclorosilano e suoi miscugli con tetracloruro di silicio, per la produzione di dispositivi a semiconduttore | |
DE2967464D1 (en) | Etching solution for the etching of silicon oxides on a substrate and etching process using that solution | |
IT9048246A0 (it) | Procedimento per la lucidatura chimica meccanica bilaterale di fette di semiconduttori, nonche' dispositivo per la sua esecuzione, e fette di semiconduttori ottenibili con questo. | |
EP0229362A3 (en) | Semiconductor device and method of fabrication | |
FR2607421B1 (fr) | Dispositif d'exploration et/ou de traitement d'une surface lisse courbe | |
EP0273635A3 (en) | Process for the manufacture of alkylhalosilanes and of silicon therefor | |
IT8421688A0 (it) | Procedimento e dispositivo per diffondere una o una pluralita' di impurita' in un corpo di semiconduttore. | |
EP0272860A3 (en) | Process for the manufacture of alkylhalosilanes and of silicon therefor | |
JPS5552379A (en) | Silicon etching liquid | |
DE3277483D1 (en) | Semiconductor device comprising polycrystalline silicon and method of producing the same | |
GB2108481B (en) | Improvements in or relating to the processing of silicon wafers | |
ZA873465B (en) | Deep trench etching of single crystal silicon | |
FR2564076B1 (fr) | Dispositif pour le transfert d'objets plats dont l'une des grandes surfaces est dirigee vers le bas | |
FR2629008B1 (fr) | Procede et dispositif de clivage d'une plaquette de silicium | |
FR2594057B3 (fr) | Dispositif d'encochage | |
FR2624839B1 (fr) | Appareil pour le transfert horizontal de plaquettes de silicium notamment | |
FR2574775B1 (fr) | Procede d'obtention de nitrure de silicium et de carbure de silicium | |
FR2602156B1 (fr) | Dispositif pour projeter un fluide de traitement sur une bande de matiere defilant longitudinalement | |
GB8717473D0 (en) | Fabrication method of semiconductor device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
D6 | Patent endorsed licences of rights |