Classifications

• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
  • H10D30/00—Field-effect transistors [FET]
  • H10D30/60—Insulated-gate field-effect transistors [IGFET]
  • H10D30/64—Double-diffused metal-oxide semiconductor [DMOS] FETs
  • H10D30/66—Vertical DMOS [VDMOS] FETs
  • H10D30/668—Vertical DMOS [VDMOS] FETs having trench gate electrodes, e.g. UMOS transistors
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
  • H10D64/00—Electrodes of devices having potential barriers
  • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
  • H10D64/23—Electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. sources, drains, anodes or cathodes
  • H10D64/251—Source or drain electrodes for field-effect devices
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P50/00—Etching of wafers, substrates or parts of devices
  • H10P50/60—Wet etching
  • H10P50/64—Wet etching of semiconductor materials
  • H10P50/642—Chemical etching
  • H10P50/644—Anisotropic liquid etching

Applications Claiming Priority (1)

Publications (2)

Family

ID=6077092

Family Applications (1)

Country Status (6)

Families Citing this family (7)

Family Cites Families (2)

• 1979
  • 1979-07-28 DE DE2930780A patent/DE2930780C2/de not_active Expired
• 1980
  • 1980-06-19 GB GB8020113A patent/GB2055247B/en not_active Expired
  • 1980-06-25 JP JP8529480A patent/JPS5621373A/ja active Pending
  • 1980-07-23 FR FR8016208A patent/FR2462779A1/fr active Granted
  • 1980-07-24 IE IE1543/80A patent/IE50027B1/en unknown
  • 1980-07-28 IT IT23733/80A patent/IT1194673B/it active

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