IT1183428B - Valvola microminiaturizzata - Google Patents

Valvola microminiaturizzata

Info

Publication number
IT1183428B
IT1183428B IT1965085A IT1965085A IT1183428B IT 1183428 B IT1183428 B IT 1183428B IT 1965085 A IT1965085 A IT 1965085A IT 1965085 A IT1965085 A IT 1965085A IT 1183428 B IT1183428 B IT 1183428B
Authority
IT
Italy
Prior art keywords
microminiaturized
valve
microminiaturized valve
Prior art date
Application number
IT1965085A
Other languages
English (en)
Other versions
IT8519650A0 (it
Inventor
James Michael O'connor
Original Assignee
Allied Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Allied Corp filed Critical Allied Corp
Publication of IT8519650A0 publication Critical patent/IT8519650A0/it
Application granted granted Critical
Publication of IT1183428B publication Critical patent/IT1183428B/it

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0051—Electric operating means therefor using electrostatic means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/008—Multi-layer fabrications
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0084—Chemistry or biology, e.g. "lab-on-a-chip" technology
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/206—Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
    • Y10T137/218—Means to regulate or vary operation of device
    • Y10T137/2202—By movable element
    • Y10T137/2213—Electrically-actuated element [e.g., electro-mechanical transducer]

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Fluid-Driven Valves (AREA)
  • Micromachines (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
IT1965085A 1984-03-01 1985-02-26 Valvola microminiaturizzata IT1183428B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/585,094 US4581624A (en) 1984-03-01 1984-03-01 Microminiature semiconductor valve

Publications (2)

Publication Number Publication Date
IT8519650A0 IT8519650A0 (it) 1985-02-26
IT1183428B true IT1183428B (it) 1987-10-22

Family

ID=24340022

Family Applications (1)

Application Number Title Priority Date Filing Date
IT1965085A IT1183428B (it) 1984-03-01 1985-02-26 Valvola microminiaturizzata

Country Status (4)

Country Link
US (1) US4581624A (it)
JP (1) JPS60208676A (it)
GB (1) GB2155152B (it)
IT (1) IT1183428B (it)

Families Citing this family (283)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4647013A (en) * 1985-02-21 1987-03-03 Ford Motor Company Silicon valve
US4756508A (en) * 1985-02-21 1988-07-12 Ford Motor Company Silicon valve
DE3635462A1 (de) * 1985-10-21 1987-04-23 Sharp Kk Feldeffekt-drucksensor
DE3618380A1 (de) * 1986-05-31 1987-12-03 Bosch Gmbh Robert Mikroventilanordnung
DE3621332A1 (de) * 1986-06-26 1988-01-14 Fraunhofer Ges Forschung Mikroventil
DE3621331A1 (de) * 1986-06-26 1988-01-14 Fraunhofer Ges Forschung Mikroventil
US4943032A (en) * 1986-09-24 1990-07-24 Stanford University Integrated, microminiature electric to fluidic valve and pressure/flow regulator
US4821997A (en) * 1986-09-24 1989-04-18 The Board Of Trustees Of The Leland Stanford Junior University Integrated, microminiature electric-to-fluidic valve and pressure/flow regulator
US4824073A (en) * 1986-09-24 1989-04-25 Stanford University Integrated, microminiature electric to fluidic valve
US4966646A (en) * 1986-09-24 1990-10-30 Board Of Trustees Of Leland Stanford University Method of making an integrated, microminiature electric-to-fluidic valve
DE3635216A1 (de) * 1986-10-16 1988-04-21 Draegerwerk Ag Elektrisch ansteuerbares ventil
GB2198611B (en) * 1986-12-13 1990-04-04 Spectrol Reliance Ltd Method of forming a sealed diaphragm on a substrate
JPH0729414B2 (ja) * 1987-01-22 1995-04-05 株式会社テック 弁素子及びその製造方法
US4768751A (en) * 1987-10-19 1988-09-06 Ford Motor Company Silicon micromachined non-elastic flow valves
US5033714A (en) * 1988-03-14 1991-07-23 Baxter International Inc. Systems having fixed and variable flow rate control mechanisms
US5176360A (en) * 1988-03-14 1993-01-05 Baxter International Inc. Infusor having fixed and variable flow rate control mechanisms
US5014750A (en) * 1988-03-14 1991-05-14 Baxter International Inc. Systems having fixed and variable flow rate control mechanisms
DE3814150A1 (de) * 1988-04-27 1989-11-09 Draegerwerk Ag Ventilanordnung aus mikrostrukturierten komponenten
US5023700A (en) * 1988-06-17 1991-06-11 Ngk Insulators, Ltd. Minutely patterned structure
US5074629A (en) * 1988-10-26 1991-12-24 Stanford University Integrated variable focal length lens and its applications
US5009251A (en) * 1988-11-15 1991-04-23 Baxter International, Inc. Fluid flow control
FR2639085B1 (fr) * 1988-11-15 1991-04-19 Neuchatel Universite Microvanne electrostatique integree et procede de fabrication d'une telle microvanne
US4869282A (en) * 1988-12-09 1989-09-26 Rosemount Inc. Micromachined valve with polyimide film diaphragm
DE3917396A1 (de) * 1989-05-29 1990-12-06 Buerkert Gmbh Mikroventil
DE3919876A1 (de) * 1989-06-19 1990-12-20 Bosch Gmbh Robert Mikroventil
DE3926647A1 (de) * 1989-08-11 1991-02-14 Bosch Gmbh Robert Verfahren zur herstellung eines mikroventils
JPH0384270A (ja) * 1989-08-25 1991-04-09 Yokogawa Electric Corp マイクロバルブ
US5244537A (en) * 1989-12-27 1993-09-14 Honeywell, Inc. Fabrication of an electronic microvalve apparatus
US5082242A (en) * 1989-12-27 1992-01-21 Ulrich Bonne Electronic microvalve apparatus and fabrication
DE4003619A1 (de) * 1990-02-07 1991-08-14 Bosch Gmbh Robert Mikroventil
US5050838A (en) * 1990-07-31 1991-09-24 Hewlett-Packard Company Control valve utilizing mechanical beam buckling
DE4035852A1 (de) * 1990-11-10 1992-05-14 Bosch Gmbh Robert Mikroventil in mehrschichtenaufbau
DE4041579A1 (de) * 1990-12-22 1992-06-25 Bosch Gmbh Robert Mikroventil
US5400824A (en) * 1991-01-21 1995-03-28 Robert Bosch Gmbh Microvalve
US5058856A (en) * 1991-05-08 1991-10-22 Hewlett-Packard Company Thermally-actuated microminiature valve
EP0518524B1 (en) * 1991-05-30 1996-09-04 Hitachi, Ltd. Valve and semiconductor fabricating equipment using the same
DE4119955C2 (de) * 1991-06-18 2000-05-31 Danfoss As Miniatur-Betätigungselement
US5176358A (en) * 1991-08-08 1993-01-05 Honeywell Inc. Microstructure gas valve control
DE4220226A1 (de) * 1992-06-20 1993-12-23 Bosch Gmbh Robert Magnetostrikiver Wandler
US5441597A (en) * 1992-12-01 1995-08-15 Honeywell Inc. Microstructure gas valve control forming method
US5309943A (en) * 1992-12-07 1994-05-10 Ford Motor Company Micro-valve and method of manufacturing
CA2153990A1 (en) * 1993-01-21 1994-08-04 Julio Mariano Fernandez Microparticle switching devices
US5479042A (en) * 1993-02-01 1995-12-26 Brooktree Corporation Micromachined relay and method of forming the relay
US5333831A (en) * 1993-02-19 1994-08-02 Hewlett-Packard Company High performance micromachined valve orifice and seat
SE508435C2 (sv) * 1993-02-23 1998-10-05 Erik Stemme Förträngningspump av membranpumptyp
EP1129739B1 (en) * 1993-10-04 2008-08-13 Research International, Inc. Micromachined filters
KR970007108B1 (ko) * 1993-11-02 1997-05-02 손병기 2중 확산을 이용한 실리콘 미세구조의 스톱퍼 제조방법
US5529279A (en) * 1994-08-24 1996-06-25 Hewlett-Packard Company Thermal isolation structures for microactuators
DE4445686C2 (de) * 1994-12-21 1999-06-24 Fraunhofer Ges Forschung Mikroventilanordnung, insbesondere für pneumatische Steuerungen
US5755408A (en) * 1995-04-03 1998-05-26 Schmidt; Robert N. Fluid flow control devices
SE9502258D0 (sv) * 1995-06-21 1995-06-21 Pharmacia Biotech Ab Method for the manufacture of a membrane-containing microstructure
US5967163A (en) * 1996-01-30 1999-10-19 Abbott Laboratories Actuator and method
US5961096A (en) * 1996-04-03 1999-10-05 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Ferroelectric fluid flow control valve
US6019437A (en) * 1996-05-29 2000-02-01 Kelsey-Hayes Company Vehicle hydraulic braking systems incorporating micro-machined technology
US6533366B1 (en) 1996-05-29 2003-03-18 Kelsey-Hayes Company Vehicle hydraulic braking systems incorporating micro-machined technology
DE19621796A1 (de) * 1996-05-30 1997-12-04 Nass Magnet Gmbh Ventil
US5785295A (en) * 1996-08-27 1998-07-28 Industrial Technology Research Institute Thermally buckling control microvalve
US5897097A (en) * 1996-09-06 1999-04-27 Xerox Corporation Passively addressable fluid valves having S-shaped blocking films
US6221654B1 (en) 1996-09-25 2001-04-24 California Institute Of Technology Method and apparatus for analysis and sorting of polynucleotides based on size
DE19648730C2 (de) * 1996-11-25 1998-11-19 Fraunhofer Ges Forschung Piezoelektrisch betätigtes Mikroventil
DE19735156C1 (de) * 1996-11-25 1999-04-29 Fraunhofer Ges Forschung Piezoelektrisch betätigtes Mikroventil
US6123316A (en) * 1996-11-27 2000-09-26 Xerox Corporation Conduit system for a valve array
US6612535B1 (en) * 1997-01-24 2003-09-02 California Institute Of Technology MEMS valve
US5780748A (en) * 1997-01-29 1998-07-14 Hewlett-Packard Company Flow device having parallel flow surfaces which move toward and away from one another to adjust the flow channel in proportion to applied force
DE29710006U1 (de) * 1997-06-09 1998-11-05 Bürkert Werke GmbH & Co., 74653 Ingelfingen Miniaturisierte Ventileinrichtung
US6540895B1 (en) 1997-09-23 2003-04-01 California Institute Of Technology Microfabricated cell sorter for chemical and biological materials
US7214298B2 (en) * 1997-09-23 2007-05-08 California Institute Of Technology Microfabricated cell sorter
US6833242B2 (en) 1997-09-23 2004-12-21 California Institute Of Technology Methods for detecting and sorting polynucleotides based on size
DE69828430T2 (de) * 1997-10-21 2005-12-15 Omron Corp. Elektrostatisches mikrorelais
CN1129727C (zh) * 1997-12-12 2003-12-03 Smc株式会社 压电阀
JP3543604B2 (ja) * 1998-03-04 2004-07-14 株式会社日立製作所 送液装置および自動分析装置
US6780591B2 (en) 1998-05-01 2004-08-24 Arizona Board Of Regents Method of determining the nucleotide sequence of oligonucleotides and DNA molecules
US7875440B2 (en) 1998-05-01 2011-01-25 Arizona Board Of Regents Method of determining the nucleotide sequence of oligonucleotides and DNA molecules
EP1076767B1 (de) * 1998-05-08 2002-02-06 Infineon Technologies AG Mikroventil
US7011378B2 (en) 1998-09-03 2006-03-14 Ge Novasensor, Inc. Proportional micromechanical valve
ATE393319T1 (de) 1998-09-03 2008-05-15 Ge Novasensor Inc Proportionale, mikromechanische vorrichtung
US6523560B1 (en) 1998-09-03 2003-02-25 General Electric Corporation Microvalve with pressure equalization
US6540203B1 (en) 1999-03-22 2003-04-01 Kelsey-Hayes Company Pilot operated microvalve device
US7214540B2 (en) 1999-04-06 2007-05-08 Uab Research Foundation Method for screening crystallization conditions in solution crystal growth
US6929030B2 (en) 1999-06-28 2005-08-16 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US7501245B2 (en) 1999-06-28 2009-03-10 Helicos Biosciences Corp. Methods and apparatuses for analyzing polynucleotide sequences
US7052545B2 (en) 2001-04-06 2006-05-30 California Institute Of Technology High throughput screening of crystallization of materials
DE60031540T2 (de) 1999-06-28 2007-05-16 California Institute Of Technology, Pasadena Mikromechanische pump- und ventilsysteme
US6899137B2 (en) 1999-06-28 2005-05-31 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US8709153B2 (en) 1999-06-28 2014-04-29 California Institute Of Technology Microfludic protein crystallography techniques
US7306672B2 (en) 2001-04-06 2007-12-11 California Institute Of Technology Microfluidic free interface diffusion techniques
US6818395B1 (en) 1999-06-28 2004-11-16 California Institute Of Technology Methods and apparatus for analyzing polynucleotide sequences
US7244402B2 (en) 2001-04-06 2007-07-17 California Institute Of Technology Microfluidic protein crystallography
US7217321B2 (en) 2001-04-06 2007-05-15 California Institute Of Technology Microfluidic protein crystallography techniques
US8550119B2 (en) 1999-06-28 2013-10-08 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US7459022B2 (en) 2001-04-06 2008-12-02 California Institute Of Technology Microfluidic protein crystallography
US7144616B1 (en) 1999-06-28 2006-12-05 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US8052792B2 (en) 2001-04-06 2011-11-08 California Institute Of Technology Microfluidic protein crystallography techniques
US7195670B2 (en) 2000-06-27 2007-03-27 California Institute Of Technology High throughput screening of crystallization of materials
AUPQ130399A0 (en) * 1999-06-30 1999-07-22 Silverbrook Research Pty Ltd A method and apparatus (IJ47V9)
AUPQ130899A0 (en) * 1999-06-30 1999-07-22 Silverbrook Research Pty Ltd A method and apparatus (IJ47V12)
US6229683B1 (en) 1999-06-30 2001-05-08 Mcnc High voltage micromachined electrostatic switch
US6057520A (en) * 1999-06-30 2000-05-02 Mcnc Arc resistant high voltage micromachined electrostatic switch
AUPQ131099A0 (en) * 1999-06-30 1999-07-22 Silverbrook Research Pty Ltd A method and apparatus (IJ47V8)
US6262463B1 (en) * 1999-07-08 2001-07-17 Integrated Micromachines, Inc. Micromachined acceleration activated mechanical switch and electromagnetic sensor
US6359374B1 (en) 1999-11-23 2002-03-19 Mcnc Miniature electrical relays using a piezoelectric thin film as an actuating element
US6373682B1 (en) 1999-12-15 2002-04-16 Mcnc Electrostatically controlled variable capacitor
AU2001240040A1 (en) * 2000-03-03 2001-09-17 California Institute Of Technology Combinatorial array for nucleic acid analysis
US6694998B1 (en) 2000-03-22 2004-02-24 Kelsey-Hayes Company Micromachined structure usable in pressure regulating microvalve and proportional microvalve
US6845962B1 (en) * 2000-03-22 2005-01-25 Kelsey-Hayes Company Thermally actuated microvalve device
US20050118073A1 (en) 2003-11-26 2005-06-02 Fluidigm Corporation Devices and methods for holding microfluidic devices
US7867763B2 (en) 2004-01-25 2011-01-11 Fluidigm Corporation Integrated chip carriers with thermocycler interfaces and methods of using the same
US6570750B1 (en) 2000-04-19 2003-05-27 The United States Of America As Represented By The Secretary Of The Air Force Shunted multiple throw MEMS RF switch
US6373007B1 (en) 2000-04-19 2002-04-16 The United States Of America As Represented By The Secretary Of The Air Force Series and shunt mems RF switch
US7420659B1 (en) * 2000-06-02 2008-09-02 Honeywell Interantional Inc. Flow control system of a cartridge
US6837476B2 (en) * 2002-06-19 2005-01-04 Honeywell International Inc. Electrostatically actuated valve
US7351376B1 (en) 2000-06-05 2008-04-01 California Institute Of Technology Integrated active flux microfluidic devices and methods
US6494433B2 (en) 2000-06-06 2002-12-17 The Regents Of The University Of Michigan Thermally activated polymer device
US6494804B1 (en) 2000-06-20 2002-12-17 Kelsey-Hayes Company Microvalve for electronically controlled transmission
US6829753B2 (en) * 2000-06-27 2004-12-07 Fluidigm Corporation Microfluidic design automation method and system
US6505811B1 (en) 2000-06-27 2003-01-14 Kelsey-Hayes Company High-pressure fluid control valve assembly having a microvalve device attached to fluid distributing substrate
US6581640B1 (en) 2000-08-16 2003-06-24 Kelsey-Hayes Company Laminated manifold for microvalve
US6485273B1 (en) 2000-09-01 2002-11-26 Mcnc Distributed MEMS electrostatic pumping devices
US6590267B1 (en) 2000-09-14 2003-07-08 Mcnc Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
EP1334347A1 (en) 2000-09-15 2003-08-13 California Institute Of Technology Microfabricated crossflow devices and methods
WO2002029106A2 (en) 2000-10-03 2002-04-11 California Institute Of Technology Microfluidic devices and methods of use
US7097809B2 (en) 2000-10-03 2006-08-29 California Institute Of Technology Combinatorial synthesis system
US7678547B2 (en) 2000-10-03 2010-03-16 California Institute Of Technology Velocity independent analyte characterization
AU1189702A (en) * 2000-10-13 2002-04-22 Fluidigm Corp Microfluidic device based sample injection system for analytical devices
WO2002033268A2 (en) * 2000-10-18 2002-04-25 Research Foundation Of State University Of New York Microvalve
US6377438B1 (en) 2000-10-23 2002-04-23 Mcnc Hybrid microelectromechanical system tunable capacitor and associated fabrication methods
WO2002065005A1 (en) 2000-11-06 2002-08-22 California Institute Of Technology Electrostatic valves for microfluidic devices
US6951632B2 (en) 2000-11-16 2005-10-04 Fluidigm Corporation Microfluidic devices for introducing and dispensing fluids from microfluidic systems
US7378280B2 (en) 2000-11-16 2008-05-27 California Institute Of Technology Apparatus and methods for conducting assays and high throughput screening
FR2817604B1 (fr) * 2000-12-01 2004-04-23 Biomerieux Sa Vannes activees par des polymeres electro-actifs ou par des materiaux a memoire de forme, dispositif contenant de telles vannes et procede de mise en oeuvre
US6626417B2 (en) * 2001-02-23 2003-09-30 Becton, Dickinson And Company Microfluidic valve and microactuator for a microvalve
US20050196785A1 (en) * 2001-03-05 2005-09-08 California Institute Of Technology Combinational array for nucleic acid analysis
WO2002073673A1 (en) * 2001-03-13 2002-09-19 Rochester Institute Of Technology A micro-electro-mechanical switch and a method of using and making thereof
US7670429B2 (en) 2001-04-05 2010-03-02 The California Institute Of Technology High throughput screening of crystallization of materials
AU2002307152A1 (en) * 2001-04-06 2002-10-21 California Institute Of Technology Nucleic acid amplification utilizing microfluidic devices
DE60239328D1 (de) 2001-04-06 2011-04-14 Fluidigm Corp Polymeroberflächenmodifikation
US6752922B2 (en) 2001-04-06 2004-06-22 Fluidigm Corporation Microfluidic chromatography
TW561223B (en) * 2001-04-24 2003-11-11 Matsushita Electric Works Ltd Pump and its producing method
AU2002303933A1 (en) * 2001-05-31 2002-12-09 Rochester Institute Of Technology Fluidic valves, agitators, and pumps and methods thereof
WO2002097422A1 (en) * 2001-05-31 2002-12-05 Electron-Bio, Inc. A micro valve apparatus using micro bead and method for controlling the same
JP2003062798A (ja) * 2001-08-21 2003-03-05 Advantest Corp アクチュエータ及びスイッチ
US7075162B2 (en) 2001-08-30 2006-07-11 Fluidigm Corporation Electrostatic/electrostrictive actuation of elastomer structures using compliant electrodes
US7192629B2 (en) 2001-10-11 2007-03-20 California Institute Of Technology Devices utilizing self-assembled gel and method of manufacture
ES2229829B1 (es) * 2001-10-23 2006-07-01 Universidad De Sevilla Valvula microfluidica para alta presion.
US8440093B1 (en) 2001-10-26 2013-05-14 Fuidigm Corporation Methods and devices for electronic and magnetic sensing of the contents of microfluidic flow channels
US7211923B2 (en) 2001-10-26 2007-05-01 Nth Tech Corporation Rotational motion based, electrostatic power source and methods thereof
US7378775B2 (en) * 2001-10-26 2008-05-27 Nth Tech Corporation Motion based, electrostatic power source and methods thereof
ES2403560T3 (es) * 2001-11-30 2013-05-20 Fluidigm Corporation Dispositivo microfluídico y procedimientos de utilización del mismo
US7691333B2 (en) 2001-11-30 2010-04-06 Fluidigm Corporation Microfluidic device and methods of using same
US20030168057A1 (en) * 2001-12-14 2003-09-11 Inhale Therapeutic Systems, Inc. Electronically controllable aerosol delivery
US7025324B1 (en) 2002-01-04 2006-04-11 Massachusetts Institute Of Technology Gating apparatus and method of manufacture
AU2003224817B2 (en) 2002-04-01 2008-11-06 Fluidigm Corporation Microfluidic particle-analysis systems
US7312085B2 (en) 2002-04-01 2007-12-25 Fluidigm Corporation Microfluidic particle-analysis systems
US9943847B2 (en) 2002-04-17 2018-04-17 Cytonome/St, Llc Microfluidic system including a bubble valve for regulating fluid flow through a microchannel
US6976590B2 (en) 2002-06-24 2005-12-20 Cytonome, Inc. Method and apparatus for sorting particles
US6808075B2 (en) 2002-04-17 2004-10-26 Cytonome, Inc. Method and apparatus for sorting particles
US6877528B2 (en) 2002-04-17 2005-04-12 Cytonome, Inc. Microfluidic system including a bubble valve for regulating fluid flow through a microchannel
AU2003277853A1 (en) * 2002-06-24 2004-01-06 Fluidigm Corporation Recirculating fluidic network and methods for using the same
US6786708B2 (en) * 2002-07-18 2004-09-07 The Regents Of The University Of Michigan Laminated devices and methods of making same
US8220494B2 (en) 2002-09-25 2012-07-17 California Institute Of Technology Microfluidic large scale integration
EP2213615A3 (en) 2002-09-25 2012-02-29 California Institute of Technology Microfluidic Large Scale Integration
WO2004040001A2 (en) 2002-10-02 2004-05-13 California Institute Of Technology Microfluidic nucleic acid analysis
US6736370B1 (en) * 2002-12-20 2004-05-18 Applied Materials, Inc. Diaphragm valve with dynamic metal seat and coned disk springs
JP4650832B2 (ja) * 2002-12-20 2011-03-16 アプライド マテリアルズ インコーポレイテッド 半導体処理装置に使用するための拡散接合されたガス分配アッセンブリを製造する方法
US7090471B2 (en) * 2003-01-15 2006-08-15 California Institute Of Technology Integrated electrostatic peristaltic pump method and apparatus
US7476363B2 (en) 2003-04-03 2009-01-13 Fluidigm Corporation Microfluidic devices and methods of using same
US7604965B2 (en) * 2003-04-03 2009-10-20 Fluidigm Corporation Thermal reaction device and method for using the same
US7666361B2 (en) * 2003-04-03 2010-02-23 Fluidigm Corporation Microfluidic devices and methods of using same
US20050145496A1 (en) * 2003-04-03 2005-07-07 Federico Goodsaid Thermal reaction device and method for using the same
US8828663B2 (en) * 2005-03-18 2014-09-09 Fluidigm Corporation Thermal reaction device and method for using the same
EP1685282A2 (en) 2003-04-17 2006-08-02 Fluidigm Corporation Crystal growth devices and systems, and methods for using same
WO2004103563A2 (en) 2003-05-20 2004-12-02 Fluidigm Corporation Method and system for microfluidic device and imaging thereof
FR2856046B1 (fr) * 2003-06-16 2005-07-29 Biomerieux Sa Microvanne fluidique a ouverture par commande electrique
JP2007506943A (ja) 2003-07-28 2007-03-22 フルイディグム コーポレイション マイクロ流体装置用の画像処理方法およびシステム
US7413712B2 (en) * 2003-08-11 2008-08-19 California Institute Of Technology Microfluidic rotary flow reactor matrix
US7287328B2 (en) * 2003-08-29 2007-10-30 Rochester Institute Of Technology Methods for distributed electrode injection
US7217582B2 (en) 2003-08-29 2007-05-15 Rochester Institute Of Technology Method for non-damaging charge injection and a system thereof
US7169560B2 (en) 2003-11-12 2007-01-30 Helicos Biosciences Corporation Short cycle methods for sequencing polynucleotides
JP2007512489A (ja) * 2003-11-24 2007-05-17 アルーマナ、マイクロウ、エルエルシー 可変容量形コンプレッサの制御に適したマイクロバルブ・デバイス
US20070251586A1 (en) * 2003-11-24 2007-11-01 Fuller Edward N Electro-pneumatic control valve with microvalve pilot
US8011388B2 (en) * 2003-11-24 2011-09-06 Microstaq, INC Thermally actuated microvalve with multiple fluid ports
WO2005084211A2 (en) * 2004-02-27 2005-09-15 Alumina Micro Llc Hybrid micro/macro plate valve
US7407799B2 (en) 2004-01-16 2008-08-05 California Institute Of Technology Microfluidic chemostat
AU2005208879B2 (en) 2004-01-25 2010-06-03 Fluidigm Corporation Crystal forming devices and systems and methods for making and using the same
US7981604B2 (en) 2004-02-19 2011-07-19 California Institute Of Technology Methods and kits for analyzing polynucleotide sequences
US8581308B2 (en) * 2004-02-19 2013-11-12 Rochester Institute Of Technology High temperature embedded charge devices and methods thereof
WO2005091820A2 (en) * 2004-03-05 2005-10-06 Alumina Micro Llc Selective bonding for forming a microvalve
CA2571829A1 (en) * 2004-07-23 2006-02-02 Afa Controls, Llc Methods of operating microvalve assemblies and related structures and related devices
US7156365B2 (en) * 2004-07-27 2007-01-02 Kelsey-Hayes Company Method of controlling microvalve actuator
TWI256374B (en) * 2004-10-12 2006-06-11 Ind Tech Res Inst PDMS valve-less micro pump structure and method for producing the same
US7832429B2 (en) 2004-10-13 2010-11-16 Rheonix, Inc. Microfluidic pump and valve structures and fabrication methods
WO2006049989A1 (en) * 2004-10-29 2006-05-11 Eveready Battery Company, Inc. Fluid regulating microvalve assembly for fluid consuming cells
US9260693B2 (en) 2004-12-03 2016-02-16 Cytonome/St, Llc Actuation of parallel microfluidic arrays
US20060134510A1 (en) * 2004-12-21 2006-06-22 Cleopatra Cabuz Air cell air flow control system and method
US7222639B2 (en) * 2004-12-29 2007-05-29 Honeywell International Inc. Electrostatically actuated gas valve
US7328882B2 (en) * 2005-01-06 2008-02-12 Honeywell International Inc. Microfluidic modulating valve
KR20070092328A (ko) * 2005-01-14 2007-09-12 알루미나 마이크로 엘엘씨 가변용량형 압축기를 제어하기 위한 시스템 및 방법
US7540469B1 (en) * 2005-01-25 2009-06-02 Sandia Corporation Microelectromechanical flow control apparatus
US7445017B2 (en) * 2005-01-28 2008-11-04 Honeywell International Inc. Mesovalve modulator
US7320338B2 (en) * 2005-06-03 2008-01-22 Honeywell International Inc. Microvalve package assembly
US7517201B2 (en) * 2005-07-14 2009-04-14 Honeywell International Inc. Asymmetric dual diaphragm pump
US7666593B2 (en) 2005-08-26 2010-02-23 Helicos Biosciences Corporation Single molecule sequencing of captured nucleic acids
US20070051415A1 (en) * 2005-09-07 2007-03-08 Honeywell International Inc. Microvalve switching array
US20070074731A1 (en) * 2005-10-05 2007-04-05 Nth Tech Corporation Bio-implantable energy harvester systems and methods thereof
EP1775001A1 (en) * 2005-10-13 2007-04-18 Xendo Holding B.V. Device for chromatographic separations
US7913928B2 (en) 2005-11-04 2011-03-29 Alliant Techsystems Inc. Adaptive structures, systems incorporating same and related methods
WO2007056267A2 (en) * 2005-11-04 2007-05-18 The Trustees Of Columbia University In The City Of New York Thermally actuated valves, photovoltaic cells and arrays comprising same, and methods for producing same
US8920645B2 (en) * 2005-12-07 2014-12-30 Tarpon Biosystems Inc. Disposable chromatography valves and system
US7624755B2 (en) * 2005-12-09 2009-12-01 Honeywell International Inc. Gas valve with overtravel
US7815868B1 (en) 2006-02-28 2010-10-19 Fluidigm Corporation Microfluidic reaction apparatus for high throughput screening
US7505110B2 (en) * 2006-03-14 2009-03-17 International Business Machines Corporation Micro-electro-mechanical valves and pumps
US7523762B2 (en) * 2006-03-22 2009-04-28 Honeywell International Inc. Modulating gas valves and systems
US8007704B2 (en) * 2006-07-20 2011-08-30 Honeywell International Inc. Insert molded actuator components
US20080069732A1 (en) * 2006-09-20 2008-03-20 Robert Yi Diagnostic test system
US20080099082A1 (en) * 2006-10-27 2008-05-01 Honeywell International Inc. Gas valve shutoff seal
EP2084104A1 (en) * 2006-11-03 2009-08-05 McGill University Electrical microvalve and method of manufacturing thereof
US7644731B2 (en) * 2006-11-30 2010-01-12 Honeywell International Inc. Gas valve with resilient seat
CN101617155B (zh) 2006-12-15 2012-03-21 麦克罗斯塔克公司 微阀装置
CN101675280B (zh) 2007-03-30 2013-05-15 盾安美斯泰克公司(美国) 先导式微型滑阀
WO2008121365A1 (en) 2007-03-31 2008-10-09 Microstaq, Inc. Pilot operated spool valve
US7798388B2 (en) * 2007-05-31 2010-09-21 Applied Materials, Inc. Method of diffusion bonding a fluid flow apparatus
US20080296354A1 (en) * 2007-05-31 2008-12-04 Mark Crockett Stainless steel or stainless steel alloy for diffusion bonding
US20090050299A1 (en) * 2007-08-21 2009-02-26 Tektronix, Inc. Cooling facility for an electronic component
US20100324504A1 (en) * 2008-02-09 2010-12-23 Eric Chappel Passive flow regulator for infusion of medicaments
CN102164846B (zh) * 2008-08-09 2016-03-30 盾安美斯泰克公司(美国) 改进的微型阀装置
US8113482B2 (en) * 2008-08-12 2012-02-14 DunAn Microstaq Microvalve device with improved fluid routing
CN102308131B (zh) 2008-12-06 2014-01-08 盾安美斯泰克有限公司 流体流动控制组件
WO2010117874A2 (en) 2009-04-05 2010-10-14 Microstaq, Inc. Method and structure for optimizing heat exchanger performance
DE102009002631B4 (de) * 2009-04-24 2015-08-20 Michael Förg Piezoelektrischer Antrieb und Mikroventil mit einem solchen
WO2010137578A1 (ja) * 2009-05-25 2010-12-02 株式会社村田製作所 バルブ、流体装置及び流体供給装置
CN102575782B (zh) 2009-08-17 2014-04-09 盾安美斯泰克股份有限公司 微型机械装置和控制方法
US20110097490A1 (en) * 2009-10-27 2011-04-28 Kerr Roger S Fluid distribution manifold including compliant plates
US10065403B2 (en) 2009-11-23 2018-09-04 Cyvek, Inc. Microfluidic assay assemblies and methods of manufacture
US9500645B2 (en) 2009-11-23 2016-11-22 Cyvek, Inc. Micro-tube particles for microfluidic assays and methods of manufacture
US9855735B2 (en) 2009-11-23 2018-01-02 Cyvek, Inc. Portable microfluidic assay devices and methods of manufacture and use
US10022696B2 (en) 2009-11-23 2018-07-17 Cyvek, Inc. Microfluidic assay systems employing micro-particles and methods of manufacture
US9700889B2 (en) 2009-11-23 2017-07-11 Cyvek, Inc. Methods and systems for manufacture of microarray assay systems, conducting microfluidic assays, and monitoring and scanning to obtain microfluidic assay results
US9759718B2 (en) 2009-11-23 2017-09-12 Cyvek, Inc. PDMS membrane-confined nucleic acid and antibody/antigen-functionalized microlength tube capture elements, and systems employing them, and methods of their use
EP2504701B1 (en) 2009-11-23 2017-09-13 Cyvek, Inc. Method and apparatus for performing assays
CN102812538B (zh) 2010-01-28 2015-05-13 盾安美斯泰克股份有限公司 用以促进接合的重调节半导体表面的方法
US9006844B2 (en) 2010-01-28 2015-04-14 Dunan Microstaq, Inc. Process and structure for high temperature selective fusion bonding
US9267618B2 (en) 2010-05-18 2016-02-23 Samsung Electronics Co., Ltd. Microvalve device and method of manufacturing the same
EP2388500B1 (en) * 2010-05-18 2018-04-25 Samsung Electronics Co., Ltd. Microvalve device and method of manufacturing the same
US8996141B1 (en) 2010-08-26 2015-03-31 Dunan Microstaq, Inc. Adaptive predictive functional controller
CN106552682B (zh) 2011-03-22 2020-06-19 西维克公司 微流体装置以及制造方法和用途
US9846440B2 (en) 2011-12-15 2017-12-19 Honeywell International Inc. Valve controller configured to estimate fuel comsumption
US9835265B2 (en) 2011-12-15 2017-12-05 Honeywell International Inc. Valve with actuator diagnostics
US9557059B2 (en) 2011-12-15 2017-01-31 Honeywell International Inc Gas valve with communication link
US9995486B2 (en) 2011-12-15 2018-06-12 Honeywell International Inc. Gas valve with high/low gas pressure detection
US8947242B2 (en) 2011-12-15 2015-02-03 Honeywell International Inc. Gas valve with valve leakage test
US8899264B2 (en) 2011-12-15 2014-12-02 Honeywell International Inc. Gas valve with electronic proof of closure system
US8839815B2 (en) 2011-12-15 2014-09-23 Honeywell International Inc. Gas valve with electronic cycle counter
US8905063B2 (en) 2011-12-15 2014-12-09 Honeywell International Inc. Gas valve with fuel rate monitor
US9074770B2 (en) 2011-12-15 2015-07-07 Honeywell International Inc. Gas valve with electronic valve proving system
US9851103B2 (en) 2011-12-15 2017-12-26 Honeywell International Inc. Gas valve with overpressure diagnostics
US8925793B2 (en) 2012-01-05 2015-01-06 Dunan Microstaq, Inc. Method for making a solder joint
KR102070469B1 (ko) 2012-03-08 2020-01-28 싸이벡, 아이엔씨 미세유체 분석 어셈블리 및 제조방법
US9140613B2 (en) 2012-03-16 2015-09-22 Zhejiang Dunan Hetian Metal Co., Ltd. Superheat sensor
US10422531B2 (en) 2012-09-15 2019-09-24 Honeywell International Inc. System and approach for controlling a combustion chamber
US9234661B2 (en) 2012-09-15 2016-01-12 Honeywell International Inc. Burner control system
US10816550B2 (en) 2012-10-15 2020-10-27 Nanocellect Biomedical, Inc. Systems, apparatus, and methods for sorting particles
CN104329484B (zh) * 2013-06-24 2018-11-30 浙江盾安禾田金属有限公司 具有增强的抗污性的微型阀
EP2868970B1 (en) 2013-10-29 2020-04-22 Honeywell Technologies Sarl Regulating device
US9188375B2 (en) 2013-12-04 2015-11-17 Zhejiang Dunan Hetian Metal Co., Ltd. Control element and check valve assembly
US10024439B2 (en) 2013-12-16 2018-07-17 Honeywell International Inc. Valve over-travel mechanism
US9841122B2 (en) 2014-09-09 2017-12-12 Honeywell International Inc. Gas valve with electronic valve proving system
US9645584B2 (en) 2014-09-17 2017-05-09 Honeywell International Inc. Gas valve with electronic health monitoring
NL2014801B1 (en) * 2015-05-13 2017-01-27 Berkin Bv Fluid flow device, comprising a valve unit, as well as method of manufacturing the same.
US10094490B2 (en) 2015-06-16 2018-10-09 Dunan Microstaq, Inc. Microvalve having contamination resistant features
US9914116B2 (en) * 2015-09-10 2018-03-13 Panasonic Intellectual Property Management Co., Ltd. Microelement
US10228367B2 (en) 2015-12-01 2019-03-12 ProteinSimple Segmented multi-use automated assay cartridge
US10503181B2 (en) 2016-01-13 2019-12-10 Honeywell International Inc. Pressure regulator
DE102016217435B4 (de) * 2016-09-13 2018-08-02 Albert-Ludwigs-Universität Freiburg Fluidpumpe und Verfahren zum Betreiben einer Fluidpumpe
US11305278B2 (en) * 2016-10-07 2022-04-19 Boehringer Ingelheim Vetmedica Gmbh Cartridge for testing a biological sample
DE102016219658C5 (de) 2016-10-11 2020-07-23 Conti Temic Microelectronic Gmbh Ventilvorrichtung für ein Fahrzeug, sowie Sitzanlage für ein Fahrzeug
US10564062B2 (en) 2016-10-19 2020-02-18 Honeywell International Inc. Human-machine interface for gas valve
WO2018175411A1 (en) 2017-03-20 2018-09-27 Nanocellect Biomedical, Inc. Systems, apparatuses, and methods for cell sorting and flow cytometry
US11428345B2 (en) 2017-07-11 2022-08-30 Microfab Service Gmbh Micro check valve and system with multiple micro check valves and method for the production thereof
US11073281B2 (en) 2017-12-29 2021-07-27 Honeywell International Inc. Closed-loop programming and control of a combustion appliance
US10697815B2 (en) 2018-06-09 2020-06-30 Honeywell International Inc. System and methods for mitigating condensation in a sensor module
EP3745009B1 (de) * 2019-05-29 2023-07-05 Georg Fischer Rohrleitungssysteme AG Inbetriebnahme eines membranventils
KR20220039780A (ko) * 2019-07-26 2022-03-29 램 리써치 코포레이션 반도체 프로세싱 장비를 위한 비엘라스토머 (non-elastomeric), 비폴리머 (non-polymeric), 비금속 멤브레인 밸브들
US11879567B2 (en) * 2021-09-10 2024-01-23 New Scale Technologies, Inc. Microvalve using near-field-acoustic levitation and methods thereof

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3936029A (en) * 1974-04-25 1976-02-03 Brandt Robert O Pneumatic amplifier having a gain adjustment mechanism incorporated therein
US4203128A (en) * 1976-11-08 1980-05-13 Wisconsin Alumni Research Foundation Electrostatically deformable thin silicon membranes
GB1588669A (en) * 1978-05-30 1981-04-29 Standard Telephones Cables Ltd Silicon transducer

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