IT1163765B - Bobina di riscaldamento a induzione, realizzata nella forma di una bobina piatta, per la fusione a zona progressiva senza crogiulo - Google Patents

Bobina di riscaldamento a induzione, realizzata nella forma di una bobina piatta, per la fusione a zona progressiva senza crogiulo

Info

Publication number
IT1163765B
IT1163765B IT22028/83A IT2202883A IT1163765B IT 1163765 B IT1163765 B IT 1163765B IT 22028/83 A IT22028/83 A IT 22028/83A IT 2202883 A IT2202883 A IT 2202883A IT 1163765 B IT1163765 B IT 1163765B
Authority
IT
Italy
Prior art keywords
crucial
melting
induction heating
coil
progressive zone
Prior art date
Application number
IT22028/83A
Other languages
English (en)
Other versions
IT8322028A0 (it
Inventor
Wolfgang Keller
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of IT8322028A0 publication Critical patent/IT8322028A0/it
Application granted granted Critical
Publication of IT1163765B publication Critical patent/IT1163765B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating
    • H05B6/22—Furnaces without an endless core
    • H05B6/30—Arrangements for remelting or zone melting

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Induction Heating (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
IT22028/83A 1982-07-16 1983-07-13 Bobina di riscaldamento a induzione, realizzata nella forma di una bobina piatta, per la fusione a zona progressiva senza crogiulo IT1163765B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19823226713 DE3226713A1 (de) 1982-07-16 1982-07-16 Als flachspule ausgebildete induktionsheizspule zum tiegelfreien zonenschmelzen

Publications (2)

Publication Number Publication Date
IT8322028A0 IT8322028A0 (it) 1983-07-13
IT1163765B true IT1163765B (it) 1987-04-08

Family

ID=6168622

Family Applications (1)

Application Number Title Priority Date Filing Date
IT22028/83A IT1163765B (it) 1982-07-16 1983-07-13 Bobina di riscaldamento a induzione, realizzata nella forma di una bobina piatta, per la fusione a zona progressiva senza crogiulo

Country Status (4)

Country Link
US (1) US4538279A (it)
JP (1) JPS5921596A (it)
DE (1) DE3226713A1 (it)
IT (1) IT1163765B (it)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3625669A1 (de) * 1986-07-29 1988-02-04 Siemens Ag Induktionsheizer zum tiegelfreien zonenschmelzen
EP0292920B1 (en) * 1987-05-25 1992-07-29 Shin-Etsu Handotai Company Limited Rf induction heating apparatus
JP2759604B2 (ja) * 1993-10-21 1998-05-28 信越半導体株式会社 誘導加熱コイル
JP2754163B2 (ja) * 1994-05-31 1998-05-20 信越半導体株式会社 高周波誘導加熱コイル
JP3127981B2 (ja) * 1995-01-31 2001-01-29 信越半導体株式会社 高周波誘導加熱装置
JP4318768B2 (ja) * 1997-07-23 2009-08-26 株式会社半導体エネルギー研究所 半導体装置の作製方法
US6555801B1 (en) 2002-01-23 2003-04-29 Melrose, Inc. Induction heating coil, device and method of use
DE102008013326B4 (de) * 2008-03-10 2013-03-28 Siltronic Ag Induktionsheizspule und Verfahren zum Schmelzen von Granulat aus Halbleitermaterial
WO2010007678A1 (ja) * 2008-07-17 2010-01-21 電気興業株式会社 高周波誘導加熱コイル用ガイドチップの構造
DE102009051010B4 (de) * 2009-10-28 2012-02-23 Siltronic Ag Vorrichtung zur Herstellung eines Einkristalls aus Silizium durch Umschmelzen von Granulat
JP5505362B2 (ja) * 2011-04-21 2014-05-28 信越半導体株式会社 複巻誘導加熱コイル及びこれを有する単結晶製造装置並びにこれを用いた単結晶製造方法
TW202315140A (zh) 2021-06-07 2023-04-01 日商Ｆｌｏｓｆｉａ股份有限公司 半導體裝置
TW202306179A (zh) 2021-06-07 2023-02-01 日商Ｆｌｏｓｆｉａ股份有限公司 半導體裝置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2870309A (en) * 1957-06-11 1959-01-20 Emil R Capita Zone purification device
DE1260439B (de) * 1964-02-08 1968-02-08 Siemens Ag Vorrichtung zum tiegelfreien Zonenschmelzen
DE1913881A1 (de) * 1969-03-19 1970-10-22 Siemens Ag Vorrichtung zum tiegelfreien Zonenschmelzen
DE2357688C2 (de) * 1973-11-19 1982-11-18 Siemens AG, 1000 Berlin und 8000 München Induktionsheizspule zum tiegelfreien Zonenschmelzen
DE2737342A1 (de) * 1977-08-18 1979-03-01 Siemens Ag Induktionsheizspule zum tiegelfreien zonenschmelzen von halbleiterkristallstaeben
US4184135A (en) * 1978-04-10 1980-01-15 Monsanto Company Breakapart single turn RF induction apparatus
JPS564516A (en) * 1979-06-13 1981-01-17 Makoto Okumura Method of packing food containing liquid
JPS5611674A (en) * 1979-07-04 1981-02-05 Marantz Japan Inc Automatic playing unit for piano
DE3143146A1 (de) * 1981-10-30 1983-05-11 Siemens AG, 1000 Berlin und 8000 München Als flachspule ausgebildete induktionsheizspule zum tiegelfreien zonenschmelzen

Also Published As

Publication number Publication date
DE3226713C2 (it) 1989-03-16
JPS5921596A (ja) 1984-02-03
DE3226713A1 (de) 1984-01-19
US4538279A (en) 1985-08-27
JPS6344718B2 (it) 1988-09-06
IT8322028A0 (it) 1983-07-13

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