IT1156313B - Procedimento di raffinazione del tetrafluoruro di silicio gassoso - Google Patents

Procedimento di raffinazione del tetrafluoruro di silicio gassoso

Info

Publication number
IT1156313B
IT1156313B IT22534/82A IT2253482A IT1156313B IT 1156313 B IT1156313 B IT 1156313B IT 22534/82 A IT22534/82 A IT 22534/82A IT 2253482 A IT2253482 A IT 2253482A IT 1156313 B IT1156313 B IT 1156313B
Authority
IT
Italy
Prior art keywords
gasous
refining process
silicon tetrafluoride
tetrafluoride
silicon
Prior art date
Application number
IT22534/82A
Other languages
English (en)
Other versions
IT8222534A0 (it
Inventor
Kitsugi Naomichi
Fujinaga Teruo
Otsuka Toyozo
Original Assignee
Central Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Central Glass Co Ltd filed Critical Central Glass Co Ltd
Publication of IT8222534A0 publication Critical patent/IT8222534A0/it
Application granted granted Critical
Publication of IT1156313B publication Critical patent/IT1156313B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/10778—Purification

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Treating Waste Gases (AREA)
IT22534/82A 1981-08-06 1982-07-22 Procedimento di raffinazione del tetrafluoruro di silicio gassoso IT1156313B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56122457A JPS604127B2 (ja) 1981-08-06 1981-08-06 四弗化珪素ガスの精製法

Publications (2)

Publication Number Publication Date
IT8222534A0 IT8222534A0 (it) 1982-07-22
IT1156313B true IT1156313B (it) 1987-02-04

Family

ID=14836321

Family Applications (1)

Application Number Title Priority Date Filing Date
IT22534/82A IT1156313B (it) 1981-08-06 1982-07-22 Procedimento di raffinazione del tetrafluoruro di silicio gassoso

Country Status (6)

Country Link
US (1) US4457901A (it)
JP (1) JPS604127B2 (it)
DE (1) DE3228535C2 (it)
FR (1) FR2510982A1 (it)
GB (1) GB2103198B (it)
IT (1) IT1156313B (it)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62137938U (it) * 1986-02-24 1987-08-31
IT1196983B (it) * 1986-07-23 1988-11-25 Enichem Agricoltura Spa Procedimento per la produzione di tetrafluoruro di silicio
US5346682A (en) * 1992-11-27 1994-09-13 Mitsui Toatsu Chemicals, Inc. Process for the preparation of partially-substituted fluorosilane
WO1999052817A1 (en) 1998-04-09 1999-10-21 Uhp Materials, Inc. Preparation and purification of diborane
US6790419B1 (en) 1999-06-11 2004-09-14 Honeywell Intellectual Properties Inc. Purification of gaseous inorganic halide
JP3909385B2 (ja) * 2001-07-12 2007-04-25 昭和電工株式会社 テトラフルオロシランの製造方法およびその用途
US7666379B2 (en) * 2001-07-16 2010-02-23 Voltaix, Inc. Process and apparatus for removing Bronsted acid impurities in binary halides
TW200512159A (en) * 2003-09-25 2005-04-01 Showa Denko Kk Method for producing tetrafluorosilane
JP4576312B2 (ja) * 2005-10-03 2010-11-04 東北電力株式会社 四フッ化ケイ素の製造方法、及びそれに用いる製造装置
CN102962903B (zh) * 2012-11-21 2015-02-25 罗振华 硅锭线锯切割工艺中硅颗粒的回收方法
TWI684287B (zh) 2017-07-27 2020-02-01 南韓商Ｌｇ化學股份有限公司 基板及包含此基板的光學裝置
CN114988920B (zh) * 2022-04-20 2023-01-13 贵州新东浩化工材料科技有限公司 一种分级利用磷矿石中氟、硅资源的方法
US11891344B2 (en) 2022-04-20 2024-02-06 Chtem Limited Methods for graded utilization of fluorine and silicon resources in phosphate ores

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2844441A (en) * 1954-11-26 1958-07-22 Du Pont Process of purifying liquid silicon halide
FR1136051A (fr) * 1955-03-30 1957-05-07 Columbian Carbon Procédé de production du tétrafluorure de silicium
GB779804A (en) * 1955-03-30 1957-07-24 Columbian Carbon Improvements in method for generating silicon tetrafluoride
US2999736A (en) * 1959-01-07 1961-09-12 Houdry Process Corp High purity silicon
GB2079262B (en) * 1980-07-02 1984-03-28 Central Glass Co Ltd Process of preparing silicon tetrafluoride by using hydrogen fluoride gas

Also Published As

Publication number Publication date
FR2510982A1 (fr) 1983-02-11
JPS5826022A (ja) 1983-02-16
GB2103198B (en) 1985-07-24
IT8222534A0 (it) 1982-07-22
US4457901A (en) 1984-07-03
GB2103198A (en) 1983-02-16
DE3228535C2 (de) 1986-02-06
JPS604127B2 (ja) 1985-02-01
FR2510982B1 (it) 1984-01-13
DE3228535A1 (de) 1983-02-24

Similar Documents

Publication Publication Date Title
IT1112298B (it) Processo per formare regioni isolate di silicio
IT1124778B (it) Processo e composizione per la pulitura di wafer di silicio
IT1156313B (it) Procedimento di raffinazione del tetrafluoruro di silicio gassoso
BR7907218A (pt) Processo de purificacao de silicio
IT1150897B (it) Procedimento per la fabbricazione di vulcanizzati
IT1193203B (it) Procedimento per la produzione di silicio policristallino
NO175299C (no) Fremgangsmåte for kontinuerlig raffinering av silisium
IT1117174B (it) Procedimento per la produzione di silicio e ferrosilicio
IT8267795A0 (it) Composizione per trattamento del glaucoma
IT1162723B (it) Processo per l'attacco controllato di silicio
IT8247936A0 (it) Trattamento di residui di carbonilazione
DE3175561D1 (en) Quartz tube for thermal processing of semiconductor substrates
IT8267796A0 (it) Composizione per trattamento del glaucoma
IT8267794A0 (it) Composizione per trattamento del glaucoma
IT1163105B (it) Procedimento per trattare silicio allo scopo di produrre clorosilani
RO88458A (ro) Procedeu si instalatie pentru fabricarea comentului
GB2098798B (en) Method of making silicon semiconductor devices
FR1246889A (fr) Procédé d'obtention de lingots de silicium très pur
IT1141264B (it) Processo per la purificazione di glicosaminoglicani
RO85310A7 (ro) Procedeu de microincapsulare
IT1151414B (it) Processo per la produzione di beta-idrossiaminoacidi
BE613066A (fr) Procédé de préparation et de purification de l'octochlorodihydroxydiphényle
IT1113320B (it) Metodo perfezionamto per la preparazione del carburo di silicio
FR2606129B1 (fr) Tube en quartz ameliore pour le traitement thermique des tranches semiconductrices
CA634180A (en) Method of removing dissolved water from 96% silica glass