IT1150034B - Metodo per la formazione di strati di biossido di silicio su un substrato semiconduttore - Google Patents

Metodo per la formazione di strati di biossido di silicio su un substrato semiconduttore

Info

Publication number
IT1150034B
IT1150034B IT8023690A IT2369080A IT1150034B IT 1150034 B IT1150034 B IT 1150034B IT 8023690 A IT8023690 A IT 8023690A IT 2369080 A IT2369080 A IT 2369080A IT 1150034 B IT1150034 B IT 1150034B
Authority
IT
Italy
Prior art keywords
silicon dioxide
forming silicon
semiconductive substrate
dioxide layers
layers
Prior art date
Application number
IT8023690A
Other languages
English (en)
Other versions
IT8023690A0 (it
Inventor
Bernard Michael Kemlage
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of IT8023690A0 publication Critical patent/IT8023690A0/it
Application granted granted Critical
Publication of IT1150034B publication Critical patent/IT1150034B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C23C16/402—Silicon dioxide
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/954—Making oxide-nitride-oxide device

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Formation Of Insulating Films (AREA)
IT8023690A 1979-08-16 1980-07-25 Metodo per la formazione di strati di biossido di silicio su un substrato semiconduttore IT1150034B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/066,964 US4254161A (en) 1979-08-16 1979-08-16 Prevention of low pressure chemical vapor deposition silicon dioxide undercutting and flaking

Publications (2)

Publication Number Publication Date
IT8023690A0 IT8023690A0 (it) 1980-07-25
IT1150034B true IT1150034B (it) 1986-12-10

Family

ID=22072855

Family Applications (1)

Application Number Title Priority Date Filing Date
IT8023690A IT1150034B (it) 1979-08-16 1980-07-25 Metodo per la formazione di strati di biossido di silicio su un substrato semiconduttore

Country Status (4)

Country Link
US (1) US4254161A (it)
JP (1) JPS5627938A (it)
CA (1) CA1166129A (it)
IT (1) IT1150034B (it)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0616560B2 (ja) * 1982-12-17 1994-03-02 セイコー電子工業株式会社 薄膜トランジスタの製造方法
US4544617A (en) * 1983-11-02 1985-10-01 Xerox Corporation Electrophotographic devices containing overcoated amorphous silicon compositions
DE3432233A1 (de) * 1984-09-01 1986-03-13 Basf Farben + Fasern Ag, 2000 Hamburg Kathodisch abscheidbares waessriges elektrotauchlackueberzugsmittel und verfahren zum beschichten eines elektrisch leitenden substrats
US4613556A (en) * 1984-10-18 1986-09-23 Xerox Corporation Heterogeneous electrophotographic imaging members of amorphous silicon and silicon oxide
JPS61236604A (ja) * 1985-04-11 1986-10-21 Toshiba Ceramics Co Ltd β−Ｓｉ↓３Ｎ↓４の合成方法
US4789560A (en) * 1986-01-08 1988-12-06 Advanced Micro Devices, Inc. Diffusion stop method for forming silicon oxide during the fabrication of IC devices
US4851370A (en) * 1987-12-28 1989-07-25 American Telephone And Telegraph Company, At&T Bell Laboratories Fabricating a semiconductor device with low defect density oxide
JPH05102419A (ja) * 1991-10-07 1993-04-23 Sony Corp ダイナミツクｒａｍにおける容量の形成方法
EP0844670B1 (en) * 1996-06-06 2004-01-02 Seiko Epson Corporation Method for manufacturing thin film transistor, liquid crystal display and electronic device both produced by the method
US6063713A (en) * 1997-11-10 2000-05-16 Micron Technology, Inc. Methods for forming silicon nitride layers on silicon-comprising substrates
US6197701B1 (en) * 1998-10-23 2001-03-06 Taiwan Semiconductor Manufacturing Company Lightly nitridation surface for preparing thin-gate oxides
US6686298B1 (en) * 2000-06-22 2004-02-03 Micron Technology, Inc. Methods of forming structures over semiconductor substrates, and methods of forming transistors associated with semiconductor substrates
US6833329B1 (en) * 2000-06-22 2004-12-21 Micron Technology, Inc. Methods of forming oxide regions over semiconductor substrates
US6559052B2 (en) 2000-07-07 2003-05-06 Applied Materials, Inc. Deposition of amorphous silicon films by high density plasma HDP-CVD at low temperatures
US6660657B1 (en) * 2000-08-07 2003-12-09 Micron Technology, Inc. Methods of incorporating nitrogen into silicon-oxide-containing layers
US6562684B1 (en) 2000-08-30 2003-05-13 Micron Technology, Inc. Methods of forming dielectric materials
US6878585B2 (en) 2001-08-29 2005-04-12 Micron Technology, Inc. Methods of forming capacitors
US6723599B2 (en) * 2001-12-03 2004-04-20 Micron Technology, Inc. Methods of forming capacitors and methods of forming capacitor dielectric layers
JP2006005234A (ja) * 2004-06-18 2006-01-05 Seiko Epson Corp 半導体装置の製造方法及び半導体装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3494809A (en) * 1967-06-05 1970-02-10 Honeywell Inc Semiconductor processing
US3607480A (en) * 1968-12-30 1971-09-21 Texas Instruments Inc Process for etching composite layered structures including a layer of fluoride-etchable silicon nitride and a layer of silicon dioxide
US3728784A (en) * 1971-04-15 1973-04-24 Monsanto Co Fabrication of semiconductor devices
US3764423A (en) * 1972-03-15 1973-10-09 Bell Telephone Labor Inc Removal of dielectric ledges on semiconductors
US4002512A (en) * 1974-09-16 1977-01-11 Western Electric Company, Inc. Method of forming silicon dioxide
DE2557079C2 (de) * 1975-12-18 1984-05-24 Ibm Deutschland Gmbh, 7000 Stuttgart Verfahren zum Herstellen einer Maskierungsschicht

Also Published As

Publication number Publication date
US4254161A (en) 1981-03-03
IT8023690A0 (it) 1980-07-25
JPS5627938A (en) 1981-03-18
CA1166129A (en) 1984-04-24

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