IT1093301B - Articolo perfezionato per la preparazione di superfici critiche - Google Patents
Articolo perfezionato per la preparazione di superfici criticheInfo
- Publication number
- IT1093301B IT1093301B IT2112678A IT2112678A IT1093301B IT 1093301 B IT1093301 B IT 1093301B IT 2112678 A IT2112678 A IT 2112678A IT 2112678 A IT2112678 A IT 2112678A IT 1093301 B IT1093301 B IT 1093301B
- Authority
- IT
- Italy
- Prior art keywords
- polymer
- polishing
- metal
- abrasive particles
- esp
- Prior art date
Links
- 238000005498 polishing Methods 0.000 title abstract 6
- 239000002245 particle Substances 0.000 title abstract 4
- 239000000919 ceramic Substances 0.000 title abstract 2
- 239000004744 fabric Substances 0.000 title abstract 2
- 239000002184 metal Substances 0.000 title abstract 2
- 229910052751 metal Inorganic materials 0.000 title abstract 2
- 239000004033 plastic Substances 0.000 title abstract 2
- 229920003023 plastic Polymers 0.000 title abstract 2
- 239000002993 sponge (artificial) Substances 0.000 title abstract 2
- 239000004575 stone Substances 0.000 title abstract 2
- 229920000642 polymer Polymers 0.000 abstract 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 3
- 239000010453 quartz Substances 0.000 abstract 2
- 229910052684 Cerium Inorganic materials 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 229910052804 chromium Inorganic materials 0.000 abstract 1
- 239000011651 chromium Substances 0.000 abstract 1
- 239000008119 colloidal silica Substances 0.000 abstract 1
- 239000013078 crystal Substances 0.000 abstract 1
- 235000013312 flour Nutrition 0.000 abstract 1
- 239000010437 gem Substances 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 229910052742 iron Inorganic materials 0.000 abstract 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 239000011159 matrix material Substances 0.000 abstract 1
- 229910044991 metal oxide Inorganic materials 0.000 abstract 1
- 150000004706 metal oxides Chemical class 0.000 abstract 1
- 239000008262 pumice Substances 0.000 abstract 1
- 229910001404 rare earth metal oxide Inorganic materials 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 229910052718 tin Inorganic materials 0.000 abstract 1
- 239000011135 tin Substances 0.000 abstract 1
- 229910052726 zirconium Inorganic materials 0.000 abstract 1
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IT2112678A IT1093301B (it) | 1978-03-10 | 1978-03-10 | Articolo perfezionato per la preparazione di superfici critiche |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IT2112678A IT1093301B (it) | 1978-03-10 | 1978-03-10 | Articolo perfezionato per la preparazione di superfici critiche |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| IT7821126A0 IT7821126A0 (it) | 1978-03-10 |
| IT1093301B true IT1093301B (it) | 1985-07-19 |
Family
ID=11177109
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IT2112678A IT1093301B (it) | 1978-03-10 | 1978-03-10 | Articolo perfezionato per la preparazione di superfici critiche |
Country Status (1)
| Country | Link |
|---|---|
| IT (1) | IT1093301B (it) |
-
1978
- 1978-03-10 IT IT2112678A patent/IT1093301B/it active
Also Published As
| Publication number | Publication date |
|---|---|
| IT7821126A0 (it) | 1978-03-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CA2101679C (en) | Plastic flexible grinding stone | |
| MY115213A (en) | Process for recovering substrates | |
| CA2245498A1 (en) | Lapping and polishing method and apparatus for planarizing photoresist and metal microstructure layers | |
| CA2022272A1 (en) | Vitrified bonded sol gel sintered aluminous abrasive bodies | |
| DE69917965D1 (de) | Verfahren zum Schleifen von Präzisionskomponenten | |
| JPS6440267A (en) | Manufacture of precisely polished glass | |
| US3499250A (en) | Polishing apparatus | |
| IT1093301B (it) | Articolo perfezionato per la preparazione di superfici critiche | |
| JP2004106100A (ja) | 表面清浄処理装置及びその方法 | |
| CN1577029A (zh) | 大尺寸基板 | |
| JPS57170538A (en) | Polishing method for one side of semiconductor wafer | |
| US2937934A (en) | Plastic film abrasive sheet | |
| JPS62292367A (ja) | ダイヤモンド被覆弾性粒研磨シ−ト | |
| EP0607441A4 (en) | Abrading device and abrading method employing the same. | |
| JP3240446B2 (ja) | ガラス等のクリーニング用具 | |
| US3508533A (en) | Grinding wheel dresser and method | |
| JPS51117390A (en) | Diamond grindstone for polishing glass | |
| JPS5754068A (en) | Ultra high precision adhering method in single surface lapping and polishing of wafer | |
| JPS6471661A (en) | Mirror polishing method for semiconductor wafer | |
| JP2719675B2 (ja) | 塗装面の付着物除去法とこれに用いられる除去具 | |
| JPS54134453A (en) | Polishing method of substrate of liquid crystal display element | |
| JPS5259394A (en) | Method of surfacing mirror polishing dish | |
| JPH08112740A (ja) | 窒化アルミニウムの研磨方法 | |
| JPH0413089Y2 (it) | ||
| JPS54121491A (en) | Polisher for materials having cvrved surface |