IT1020326B - Sistema ed apparecchiatura per controllare lo spostamento di un mezzo quale un fascio di elettroni - Google Patents

Sistema ed apparecchiatura per controllare lo spostamento di un mezzo quale un fascio di elettroni

Info

Publication number
IT1020326B
IT1020326B IT26771/74A IT2677174A IT1020326B IT 1020326 B IT1020326 B IT 1020326B IT 26771/74 A IT26771/74 A IT 26771/74A IT 2677174 A IT2677174 A IT 2677174A IT 1020326 B IT1020326 B IT 1020326B
Authority
IT
Italy
Prior art keywords
bundle
electrons
vehicle
movement
equipment
Prior art date
Application number
IT26771/74A
Other languages
English (en)
Italian (it)
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Application granted granted Critical
Publication of IT1020326B publication Critical patent/IT1020326B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control
    • H01J37/3023—Programme control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
IT26771/74A 1973-09-19 1974-08-30 Sistema ed apparecchiatura per controllare lo spostamento di un mezzo quale un fascio di elettroni IT1020326B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US398734A US3866013A (en) 1973-09-19 1973-09-19 Method and apparatus for controlling movable means such as an electron beam

Publications (1)

Publication Number Publication Date
IT1020326B true IT1020326B (it) 1977-12-20

Family

ID=23576583

Family Applications (1)

Application Number Title Priority Date Filing Date
IT26771/74A IT1020326B (it) 1973-09-19 1974-08-30 Sistema ed apparecchiatura per controllare lo spostamento di un mezzo quale un fascio di elettroni

Country Status (7)

Country Link
US (1) US3866013A (enrdf_load_stackoverflow)
JP (2) JPS5248061B2 (enrdf_load_stackoverflow)
CA (1) CA1013074A (enrdf_load_stackoverflow)
DE (1) DE2443625C2 (enrdf_load_stackoverflow)
FR (1) FR2244202B1 (enrdf_load_stackoverflow)
GB (1) GB1438737A (enrdf_load_stackoverflow)
IT (1) IT1020326B (enrdf_load_stackoverflow)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2294489A1 (fr) * 1974-12-13 1976-07-09 Thomson Csf Dispositif pour le trace programme de dessins par bombardement de particules
US4056730A (en) * 1976-07-12 1977-11-01 International Business Machines Corporation Apparatus for detecting registration marks on a target such as a semiconductor wafer
US4099062A (en) * 1976-12-27 1978-07-04 International Business Machines Corporation Electron beam lithography process
US4147937A (en) * 1977-11-01 1979-04-03 Fujitsu Limited Electron beam exposure system method and apparatus
JPS5511303A (en) * 1978-07-10 1980-01-26 Chiyou Lsi Gijutsu Kenkyu Kumiai Electron-beam exposure device
JPS5521156A (en) * 1978-08-02 1980-02-15 Fujitsu Ltd Electronic beam exposing system
JPS5778814U (enrdf_load_stackoverflow) * 1980-10-31 1982-05-15
DE102014105452B3 (de) * 2014-04-16 2015-08-27 Von Ardenne Gmbh Anordnung zum Ablenken eines mittels einer Elektronenstrahlkanone erzeugten Elektronenstrahls, Verfahren zum Erzeugen eines Ablenksignals und Verfahren zum Betreiben einer Elektronenstrahlkanone
DE102014105451B3 (de) * 2014-04-16 2015-08-27 Von Ardenne Gmbh Anordnung zum Ablenken eines mittels einer Elektronenstrahlkanone erzeugten Elektronenstrahls, Verfahren zum Erzeugen eines Ablenksignals und Verfahren zum Betreiben einer Elektronenstrahlkanone

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3789185A (en) * 1969-12-15 1974-01-29 Ibm Electron beam deflection control apparatus
US3644700A (en) * 1969-12-15 1972-02-22 Ibm Method and apparatus for controlling an electron beam

Also Published As

Publication number Publication date
JPS5328749B2 (enrdf_load_stackoverflow) 1978-08-16
CA1013074A (en) 1977-06-28
FR2244202A1 (enrdf_load_stackoverflow) 1975-04-11
FR2244202B1 (enrdf_load_stackoverflow) 1976-10-22
JPS5058986A (enrdf_load_stackoverflow) 1975-05-22
DE2443625C2 (de) 1983-10-27
GB1438737A (en) 1976-06-09
US3866013A (en) 1975-02-11
DE2443625A1 (de) 1975-03-20
JPS5248061B2 (enrdf_load_stackoverflow) 1977-12-07
JPS5333584A (en) 1978-03-29

Similar Documents

Publication Publication Date Title
IT1017735B (it) Sistema televisivo
IT1026651B (it) Sistema di deflessione di unfascic di elettroni
IT1026981B (it) Struttura incorporante un sistema circolatoric
IT963373B (it) Sistema per la localizzazione di veicoli
IT1031553B (it) Sistema di deflessione
IT1042139B (it) Sistema idraulico di controllo
GB1439423A (en) Anticollision sonar system
ZA724098B (en) Drift eliminator
IT1022109B (it) Apparecchiatura e sistema per de terminare il livello di inquinamento
IT965944B (it) Sistema olotomografico a raggi
BR7502331A (pt) Sistema de enderecamento flutuante
BR7503425A (pt) Sistema de freios
IT1017324B (it) Sistema per la trasmissione di informazioni
IT1032713B (it) Sistema televisivo via cavo
IT949980B (it) Sitema di controllo di conversione di potenza
IT1020571B (it) Sistema diagnostico a raggi x
IT1030768B (it) Sistema per la trasmissione di immagini
IT1020326B (it) Sistema ed apparecchiatura per controllare lo spostamento di un mezzo quale un fascio di elettroni
IT1044098B (it) Sistema di sicurezza per veicoli
IT1017734B (it) Sistema televisivo
HU172775B (hu) Krivolinejnaja shpil'ka dlja skreplenija kostej
IT960175B (it) Sistema di accensione di tipo stabilizzato
IT979256B (it) Sistema per comandare il movimen to di un veicolo o di un oggetto lungo un percorso
IT947127B (it) Sistema di commutazione di potenza
IT1019762B (it) Sistema per il funzionamento al minimo di carburatori