CA1013074A - Method and apparatus for controlling movable means such as an electron beam - Google Patents

Method and apparatus for controlling movable means such as an electron beam

Info

Publication number
CA1013074A
CA1013074A CA207,581A CA207581A CA1013074A CA 1013074 A CA1013074 A CA 1013074A CA 207581 A CA207581 A CA 207581A CA 1013074 A CA1013074 A CA 1013074A
Authority
CA
Canada
Prior art keywords
electron beam
movable means
controlling movable
controlling
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA207,581A
Other versions
CA207581S (en
Inventor
Philip M. Ryan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of CA1013074A publication Critical patent/CA1013074A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control
    • H01J37/3023—Programme control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
CA207,581A 1973-09-19 1974-08-22 Method and apparatus for controlling movable means such as an electron beam Expired CA1013074A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US398734A US3866013A (en) 1973-09-19 1973-09-19 Method and apparatus for controlling movable means such as an electron beam

Publications (1)

Publication Number Publication Date
CA1013074A true CA1013074A (en) 1977-06-28

Family

ID=23576583

Family Applications (1)

Application Number Title Priority Date Filing Date
CA207,581A Expired CA1013074A (en) 1973-09-19 1974-08-22 Method and apparatus for controlling movable means such as an electron beam

Country Status (7)

Country Link
US (1) US3866013A (en)
JP (2) JPS5248061B2 (en)
CA (1) CA1013074A (en)
DE (1) DE2443625C2 (en)
FR (1) FR2244202B1 (en)
GB (1) GB1438737A (en)
IT (1) IT1020326B (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2294489A1 (en) * 1974-12-13 1976-07-09 Thomson Csf DEVICE FOR THE PROGRAM TRACE OF DRAWINGS BY PARTICLE BOMBARDING
US4056730A (en) * 1976-07-12 1977-11-01 International Business Machines Corporation Apparatus for detecting registration marks on a target such as a semiconductor wafer
US4099062A (en) * 1976-12-27 1978-07-04 International Business Machines Corporation Electron beam lithography process
US4147937A (en) * 1977-11-01 1979-04-03 Fujitsu Limited Electron beam exposure system method and apparatus
JPS5511303A (en) * 1978-07-10 1980-01-26 Chiyou Lsi Gijutsu Kenkyu Kumiai Electron-beam exposure device
JPS5521156A (en) * 1978-08-02 1980-02-15 Fujitsu Ltd Electronic beam exposing system
JPS5778814U (en) * 1980-10-31 1982-05-15
DE102014105451B3 (en) * 2014-04-16 2015-08-27 Von Ardenne Gmbh Arrangement for deflecting an electron beam generated by means of an electron beam gun, method for generating a deflection signal and method for operating an electron beam gun
DE102014105452B3 (en) * 2014-04-16 2015-08-27 Von Ardenne Gmbh Arrangement for deflecting an electron beam generated by means of an electron beam gun, method for generating a deflection signal and method for operating an electron beam gun

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3789185A (en) * 1969-12-15 1974-01-29 Ibm Electron beam deflection control apparatus
US3644700A (en) * 1969-12-15 1972-02-22 Ibm Method and apparatus for controlling an electron beam

Also Published As

Publication number Publication date
JPS5058986A (en) 1975-05-22
JPS5248061B2 (en) 1977-12-07
JPS5328749B2 (en) 1978-08-16
JPS5333584A (en) 1978-03-29
FR2244202B1 (en) 1976-10-22
FR2244202A1 (en) 1975-04-11
GB1438737A (en) 1976-06-09
DE2443625C2 (en) 1983-10-27
IT1020326B (en) 1977-12-20
DE2443625A1 (en) 1975-03-20
US3866013A (en) 1975-02-11

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