IN2014KN02373A - - Google Patents
Info
- Publication number
- IN2014KN02373A IN2014KN02373A IN2373KON2014A IN2014KN02373A IN 2014KN02373 A IN2014KN02373 A IN 2014KN02373A IN 2373KON2014 A IN2373KON2014 A IN 2373KON2014A IN 2014KN02373 A IN2014KN02373 A IN 2014KN02373A
- Authority
- IN
- India
- Prior art keywords
- halosilane
- containing process
- arsenic
- distillation
- purifying
- Prior art date
Links
- 238000000034 method Methods 0.000 abstract 3
- 229910052785 arsenic Inorganic materials 0.000 abstract 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 abstract 1
- 238000004821 distillation Methods 0.000 abstract 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/10778—Purification
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
- B01D3/14—Fractional distillation or use of a fractionation or rectification column
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Silicon Compounds (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201261639641P | 2012-04-27 | 2012-04-27 | |
US13/836,018 US10011493B2 (en) | 2012-04-27 | 2013-03-15 | Methods for purifying halosilane-containing streams |
PCT/US2013/036972 WO2013162969A1 (en) | 2012-04-27 | 2013-04-17 | Methods for purifying halosilane-containing streams |
Publications (1)
Publication Number | Publication Date |
---|---|
IN2014KN02373A true IN2014KN02373A (enrdf_load_stackoverflow) | 2015-05-01 |
Family
ID=49476378
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IN2373KON2014 IN2014KN02373A (enrdf_load_stackoverflow) | 2012-04-27 | 2013-04-17 |
Country Status (8)
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL235008A (enrdf_load_stackoverflow) * | 1958-01-11 | |||
US3069239A (en) | 1958-10-28 | 1962-12-18 | Westinghouse Electric Corp | Purification of halogenated silicon compounds |
US3188318A (en) | 1958-12-30 | 1965-06-08 | Hercules Powder Co Ltd | Process for producing phthalocyanines |
FR1518553A (fr) | 1960-03-11 | 1968-03-29 | Pechiney Prod Chimiques Sa | Procédé de purification de composés volatils de germanium et de silicium |
US3067229A (en) * | 1960-08-02 | 1962-12-04 | Union Carbide Corp | Phosphorus containing organosilicon compounds |
US3156630A (en) * | 1960-12-19 | 1964-11-10 | Nat Distillers Chem Corp | Purification of titanium tetrachloride by distillation in the presence of an oil and the use of an inert gas purge |
BE632835A (enrdf_load_stackoverflow) | 1962-06-04 | |||
DE1792651A1 (de) | 1968-09-28 | 1971-11-25 | Dynamit Nobel Ag | Verfahren zur Reinigung von Chlorsilanen |
US4099936A (en) | 1976-12-16 | 1978-07-11 | Union Carbide Corporation | Process for the purification of silane |
CA1162028A (en) * | 1979-08-01 | 1984-02-14 | Larry M. Coleman | Ultrahigh purity silane and silicon production |
US4340574A (en) | 1980-08-28 | 1982-07-20 | Union Carbide Corporation | Process for the production of ultrahigh purity silane with recycle from separation columns |
US4374110A (en) * | 1981-06-15 | 1983-02-15 | Motorola, Inc. | Purification of silicon source materials |
US4481178A (en) | 1982-11-08 | 1984-11-06 | General Electric Company | Purification of chlorosilanes |
US5232602A (en) | 1992-07-01 | 1993-08-03 | Hemlock Semiconductor Corporation | Phosphorous removal from tetrachlorosilane |
DE10061682A1 (de) | 2000-12-11 | 2002-07-04 | Solarworld Ag | Verfahren zur Herstellung von Reinstsilicium |
ITRM20040570A1 (it) * | 2004-11-19 | 2005-02-19 | Memc Electronic Materials | Procedimento e impianto di purificazione di triclorosilano e di tetracloruro di silicio. |
DE102007014107A1 (de) * | 2007-03-21 | 2008-09-25 | Evonik Degussa Gmbh | Aufarbeitung borhaltiger Chlorsilanströme |
DE102008002537A1 (de) * | 2008-06-19 | 2009-12-24 | Evonik Degussa Gmbh | Verfahren zur Entfernung von Bor enthaltenden Verunreinigungen aus Halogensilanen sowie Anlage zur Durchführung des Verfahrens |
-
2013
- 2013-03-15 US US13/836,018 patent/US10011493B2/en active Active
- 2013-04-17 IN IN2373KON2014 patent/IN2014KN02373A/en unknown
- 2013-04-17 MY MYPI2014703145A patent/MY182211A/en unknown
- 2013-04-17 WO PCT/US2013/036972 patent/WO2013162969A1/en active Application Filing
- 2013-04-17 DE DE112013002206.0T patent/DE112013002206B4/de active Active
- 2013-04-17 KR KR1020147032868A patent/KR102099486B1/ko active Active
- 2013-04-17 CN CN201380033101.2A patent/CN104822430A/zh active Pending
- 2013-04-26 TW TW102114946A patent/TWI637908B/zh active
Also Published As
Publication number | Publication date |
---|---|
KR20150020283A (ko) | 2015-02-25 |
KR102099486B1 (ko) | 2020-04-10 |
CN104822430A (zh) | 2015-08-05 |
US10011493B2 (en) | 2018-07-03 |
WO2013162969A1 (en) | 2013-10-31 |
US20130284585A1 (en) | 2013-10-31 |
TW201348133A (zh) | 2013-12-01 |
DE112013002206B4 (de) | 2023-01-12 |
MY182211A (en) | 2021-01-18 |
DE112013002206T5 (de) | 2015-01-08 |
TWI637908B (zh) | 2018-10-11 |
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