FR1518553A - Procédé de purification de composés volatils de germanium et de silicium - Google Patents

Procédé de purification de composés volatils de germanium et de silicium

Info

Publication number
FR1518553A
FR1518553A FR821033A FR821033A FR1518553A FR 1518553 A FR1518553 A FR 1518553A FR 821033 A FR821033 A FR 821033A FR 821033 A FR821033 A FR 821033A FR 1518553 A FR1518553 A FR 1518553A
Authority
FR
France
Prior art keywords
germanium
purification
silicon
volatile compounds
volatile
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR821033A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pechiney SA
Original Assignee
Pechiney SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pechiney SA filed Critical Pechiney SA
Priority to FR821033A priority Critical patent/FR1518553A/fr
Priority to US93347A priority patent/US3216785A/en
Priority to GB8731/61A priority patent/GB975000A/en
Priority to ES0265545A priority patent/ES265545A1/es
Priority to BE601196A priority patent/BE601196A/fr
Application granted granted Critical
Publication of FR1518553A publication Critical patent/FR1518553A/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/04—Hydrides of silicon
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G17/00—Compounds of germanium
    • C01G17/04—Halides of germanium

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
FR821033A 1960-03-11 1960-03-11 Procédé de purification de composés volatils de germanium et de silicium Expired FR1518553A (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR821033A FR1518553A (fr) 1960-03-11 1960-03-11 Procédé de purification de composés volatils de germanium et de silicium
US93347A US3216785A (en) 1960-03-11 1961-03-06 Process for the purification of halogenated volatile compounds of germanium and silicon
GB8731/61A GB975000A (en) 1960-03-11 1961-03-09 A process for the purification of liquid halosilanes or halogermanes
ES0265545A ES265545A1 (es) 1960-03-11 1961-03-10 Procedimiento de purificaciën de compuestos volatiles de germanio y silicio
BE601196A BE601196A (fr) 1960-03-11 1961-03-10 Procédé de purification de composés volatils de germanium et de silicium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR821033A FR1518553A (fr) 1960-03-11 1960-03-11 Procédé de purification de composés volatils de germanium et de silicium

Publications (1)

Publication Number Publication Date
FR1518553A true FR1518553A (fr) 1968-03-29

Family

ID=8726879

Family Applications (1)

Application Number Title Priority Date Filing Date
FR821033A Expired FR1518553A (fr) 1960-03-11 1960-03-11 Procédé de purification de composés volatils de germanium et de silicium

Country Status (5)

Country Link
US (1) US3216785A (fr)
BE (1) BE601196A (fr)
ES (1) ES265545A1 (fr)
FR (1) FR1518553A (fr)
GB (1) GB975000A (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3805282A1 (de) * 1988-02-19 1989-08-31 Wacker Chemitronic Verfahren zur entfernung von n-dotierenden verunreinigungen aus bei der gasphasenabscheidung von silicium anfallenden fluessigen oder gasfoermigen stoffen
ITRM20040570A1 (it) * 2004-11-19 2005-02-19 Memc Electronic Materials Procedimento e impianto di purificazione di triclorosilano e di tetracloruro di silicio.
TWI472486B (zh) * 2006-03-02 2015-02-11 Memc Electronic Materials 用於純化三氯矽烷及四氯化矽之方法和裝置
DE102008004396A1 (de) * 2008-01-14 2009-07-16 Evonik Degussa Gmbh Anlage und Verfahren zur Verminderung des Gehaltes von Elementen, wie Bor, in Halogensilanen
DE102008004397A1 (de) * 2008-01-14 2009-07-16 Evonik Degussa Gmbh Verfahren zur Verminderung des Gehaltes von Elementen, wie Bor, in Halogensilanen sowie Anlage zur Durchführung des Verfahrens
US10011493B2 (en) 2012-04-27 2018-07-03 Corner Star Limited Methods for purifying halosilane-containing streams
CN106744685B (zh) * 2016-11-21 2018-10-23 亚洲硅业（青海）有限公司 电子级多晶硅生产中循环氢气的深度净化方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2821460A (en) * 1955-08-31 1958-01-28 Bell Telephone Labor Inc Method of purifying silicon tetrachloride and germanium tetrachloride

Also Published As

Publication number Publication date
GB975000A (en) 1964-11-11
US3216785A (en) 1965-11-09
ES265545A1 (es) 1961-09-16
BE601196A (fr) 1961-09-11

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