IN2014DN07732A - - Google Patents
Download PDFInfo
- Publication number
- IN2014DN07732A IN2014DN07732A IN7732DEN2014A IN2014DN07732A IN 2014DN07732 A IN2014DN07732 A IN 2014DN07732A IN 7732DEN2014 A IN7732DEN2014 A IN 7732DEN2014A IN 2014DN07732 A IN2014DN07732 A IN 2014DN07732A
- Authority
- IN
- India
- Prior art keywords
- graphene sheets
- activated gas
- holes
- helium
- altered
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/182—Graphene
- C01B32/194—After-treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2204/00—Structure or properties of graphene
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/842—Manufacture, treatment, or detection of nanostructure for carbon nanotubes or fullerenes
- Y10S977/847—Surface modifications, e.g. functionalization, coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/888—Shaping or removal of materials, e.g. etching
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Composite Materials (AREA)
- Carbon And Carbon Compounds (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201261613938P | 2012-03-21 | 2012-03-21 | |
PCT/US2013/030344 WO2013142133A1 (en) | 2012-03-21 | 2013-03-12 | Methods for perforating graphene using an activated gas stream and perforated graphene produced therefrom |
Publications (1)
Publication Number | Publication Date |
---|---|
IN2014DN07732A true IN2014DN07732A (de) | 2015-05-15 |
Family
ID=48040413
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IN7732DEN2014 IN2014DN07732A (de) | 2012-03-21 | 2013-03-12 |
Country Status (11)
Country | Link |
---|---|
US (1) | US9567224B2 (de) |
EP (1) | EP2828196A1 (de) |
JP (1) | JP6246785B2 (de) |
KR (1) | KR20140146131A (de) |
CN (1) | CN104245577A (de) |
AU (1) | AU2013235643B2 (de) |
CA (1) | CA2865634A1 (de) |
IL (1) | IL234684A0 (de) |
IN (1) | IN2014DN07732A (de) |
SG (1) | SG11201405346RA (de) |
WO (1) | WO2013142133A1 (de) |
Families Citing this family (43)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9475709B2 (en) | 2010-08-25 | 2016-10-25 | Lockheed Martin Corporation | Perforated graphene deionization or desalination |
US9193587B2 (en) | 2011-07-13 | 2015-11-24 | Lockheed Martin Corporation | System and method for water purification and desalination |
US9028663B2 (en) * | 2012-03-21 | 2015-05-12 | Lockheed Martin Corporation | Molecular separation device |
US9463421B2 (en) | 2012-03-29 | 2016-10-11 | Lockheed Martin Corporation | Planar filtration and selective isolation and recovery device |
US9095823B2 (en) | 2012-03-29 | 2015-08-04 | Lockheed Martin Corporation | Tunable layered membrane configuration for filtration and selective isolation and recovery devices |
US10653824B2 (en) | 2012-05-25 | 2020-05-19 | Lockheed Martin Corporation | Two-dimensional materials and uses thereof |
US9610546B2 (en) | 2014-03-12 | 2017-04-04 | Lockheed Martin Corporation | Separation membranes formed from perforated graphene and methods for use thereof |
US10696554B2 (en) * | 2015-08-06 | 2020-06-30 | Lockheed Martin Corporation | Nanoparticle modification and perforation of graphene |
US9834809B2 (en) | 2014-02-28 | 2017-12-05 | Lockheed Martin Corporation | Syringe for obtaining nano-sized materials for selective assays and related methods of use |
US9744617B2 (en) | 2014-01-31 | 2017-08-29 | Lockheed Martin Corporation | Methods for perforating multi-layer graphene through ion bombardment |
US20170036911A1 (en) * | 2015-08-05 | 2017-02-09 | Lockheed Martin Corporation | Perforated sheets of graphene-based material |
US20170296982A1 (en) * | 2016-04-14 | 2017-10-19 | Lockheed Martin Corporation | Healing of thin graphenic-based membranes via charged particle irradiation |
US9067811B1 (en) * | 2012-05-25 | 2015-06-30 | Lockheed Martin Corporation | System, method, and control for graphenoid desalination |
US10376845B2 (en) | 2016-04-14 | 2019-08-13 | Lockheed Martin Corporation | Membranes with tunable selectivity |
TWI493549B (zh) * | 2013-03-05 | 2015-07-21 | Nat Univ Tsing Hua | 電阻式隨機存取記憶體 |
TW201504140A (zh) | 2013-03-12 | 2015-02-01 | Lockheed Corp | 形成具有均勻孔尺寸之多孔石墨烯之方法 |
WO2014159043A1 (en) | 2013-03-13 | 2014-10-02 | Lockheed Martin Corporation | Nanoporous membranes and methods for making the same |
US9480952B2 (en) | 2013-03-14 | 2016-11-01 | Lockheed Martin Corporation | Methods for chemical reaction perforation of atomically thin materials |
US9572918B2 (en) | 2013-06-21 | 2017-02-21 | Lockheed Martin Corporation | Graphene-based filter for isolating a substance from blood |
CN105940479A (zh) | 2014-01-31 | 2016-09-14 | 洛克希德马丁公司 | 使用宽离子场穿孔二维材料 |
CA2938305A1 (en) | 2014-01-31 | 2015-08-06 | Lockheed Martin Corporation | Processes for forming composite structures with a two-dimensional material using a porous, non-sacrificial supporting layer |
AU2015229331A1 (en) | 2014-03-12 | 2016-10-27 | Lockheed Martin Corporation | Separation membranes formed from perforated graphene |
US20150258525A1 (en) * | 2014-03-12 | 2015-09-17 | Lockheed Martin Corporation | Graphene-based molecular sieves and methods for production thereof |
CN109908768B (zh) * | 2014-06-30 | 2021-11-19 | 国立大学法人信州大学 | 碳纳米材料的穿孔方法以及过滤器成形体的制造方法 |
SG11201701654UA (en) | 2014-09-02 | 2017-04-27 | Lockheed Corp | Hemodialysis and hemofiltration membranes based upon a two-dimensional membrane material and methods employing same |
US10266677B2 (en) | 2015-01-05 | 2019-04-23 | The Boeing Company | Graphene-augmented composite materials |
US9421739B2 (en) * | 2015-01-05 | 2016-08-23 | The Boeing Company | Graphene aerospace composites |
CN104925794B (zh) * | 2015-06-11 | 2016-05-04 | 青岛大学 | 一种以纳米孔石墨烯为基底生长三维氮掺杂石墨烯的方法 |
WO2017023376A1 (en) | 2015-08-05 | 2017-02-09 | Lockheed Martin Corporation | Perforatable sheets of graphene-based material |
CN107921402A (zh) * | 2015-08-05 | 2018-04-17 | 洛克希德马丁公司 | 石墨烯基材料的穿孔片 |
CN105514121B (zh) * | 2016-01-26 | 2019-03-15 | 武汉华星光电技术有限公司 | 一种tft阵列基板及其制作方法 |
KR20190018411A (ko) | 2016-04-14 | 2019-02-22 | 록히드 마틴 코포레이션 | 그래핀 결함의 선택적 계면 완화 |
KR20180133430A (ko) | 2016-04-14 | 2018-12-14 | 록히드 마틴 코포레이션 | 결함 형성 또는 힐링의 인 시츄 모니터링 및 제어를 위한 방법 |
CA3020686A1 (en) | 2016-04-14 | 2017-10-19 | Lockheed Martin Corporation | Method for treating graphene sheets for large-scale transfer using free-float method |
WO2017180134A1 (en) | 2016-04-14 | 2017-10-19 | Lockheed Martin Corporation | Methods for in vivo and in vitro use of graphene and other two-dimensional materials |
SG11201809015WA (en) | 2016-04-14 | 2018-11-29 | Lockheed Corp | Two-dimensional membrane structures having flow passages |
WO2018043634A1 (ja) | 2016-08-31 | 2018-03-08 | 国立大学法人大阪大学 | 自己触媒能を有する炭素系水素貯蔵材料、その製造方法、その化合物を用いる水素の吸蔵方法及び水素の放出方法、及び水素吸蔵用デバイス |
KR101934568B1 (ko) * | 2016-11-25 | 2019-01-02 | 한국과학기술연구원 | 나노다공성 그래핀 막의 제조 방법 |
KR101835596B1 (ko) * | 2017-03-20 | 2018-03-08 | 삼화콘덴서공업 주식회사 | 고용량 에너지 저장 커패시터 |
EP4006005A1 (de) * | 2019-07-24 | 2022-06-01 | Osaka University | Alkandehydrierungskatalysator und verfahren zur wasserstoffherstellung, bei dem dieser zum einsatz kommt |
CN110451496B (zh) * | 2019-09-17 | 2021-04-20 | 北京石墨烯研究院 | 一种连续放量制备粉体石墨烯的方法 |
WO2021217157A2 (en) | 2020-02-21 | 2021-10-28 | Wood John A | Above room temperature type ii superconductor |
KR102654642B1 (ko) * | 2021-05-24 | 2024-04-04 | (주)에스그래핀 | 기능기의 탈부착을 이용한 그래핀 나노홀의 형성방법 및 이에 의해 형성된 그래핀 나노홀을 가지는 그래핀 시트 |
Family Cites Families (43)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19536560C1 (de) | 1995-10-02 | 1997-03-13 | Mft Membran Filtrations Techni | Membranelement |
JP3972393B2 (ja) * | 1995-12-19 | 2007-09-05 | セイコーエプソン株式会社 | 表面処理方法及び装置、圧電素子の製造方法、インクジェット用プリントヘッドの製造方法、液晶パネルの製造方法、並びにマイクロサンプリング方法 |
JP3939943B2 (ja) | 2001-08-29 | 2007-07-04 | 株式会社Gsiクレオス | 気相成長法による炭素繊維からなるフィルター材 |
JP2004179014A (ja) | 2002-11-28 | 2004-06-24 | Matsushita Electric Ind Co Ltd | プラズマ加工方法及び装置 |
US8435676B2 (en) | 2008-01-09 | 2013-05-07 | Nanotek Instruments, Inc. | Mixed nano-filament electrode materials for lithium ion batteries |
US8147599B2 (en) | 2009-02-17 | 2012-04-03 | Mcalister Technologies, Llc | Apparatuses and methods for storing and/or filtering a substance |
CN101996853B (zh) * | 2009-08-19 | 2012-08-08 | 中国科学院物理研究所 | 一种对石墨或石墨烯进行各向异性刻蚀的方法 |
US20110073563A1 (en) * | 2009-09-25 | 2011-03-31 | Industrial Technology Research Institute | Patterning Method for Carbon-Based Substrate |
US8808810B2 (en) | 2009-12-15 | 2014-08-19 | Guardian Industries Corp. | Large area deposition of graphene on substrates, and products including the same |
US8268180B2 (en) * | 2010-01-26 | 2012-09-18 | Wisconsin Alumni Research Foundation | Methods of fabricating large-area, semiconducting nanoperforated graphene materials |
KR101537638B1 (ko) * | 2010-05-18 | 2015-07-17 | 삼성전자 주식회사 | 그라펜 박막을 이용한 수지의 도금 방법 |
KR20120002216A (ko) | 2010-06-30 | 2012-01-05 | 대우조선해양 주식회사 | 부유식 해양 구조물의 전기 설비 배치구조 |
US9751763B2 (en) | 2010-07-14 | 2017-09-05 | Monash University | Material and applications therefor |
US8361321B2 (en) | 2010-08-25 | 2013-01-29 | Lockheed Martin Corporation | Perforated graphene deionization or desalination |
US9475709B2 (en) | 2010-08-25 | 2016-10-25 | Lockheed Martin Corporation | Perforated graphene deionization or desalination |
WO2012030368A1 (en) | 2010-09-01 | 2012-03-08 | Lawrence Curtin | Application of radio frequency to fluidized beds |
EP2611948A2 (de) | 2010-09-01 | 2013-07-10 | Facultés Universitaires Notre-Dame de la Paix | Verfahren zur abscheidung von nanopartikeln auf substraten |
KR101813170B1 (ko) | 2011-04-11 | 2017-12-28 | 삼성전자주식회사 | 그래핀 함유 분리막 |
CN102344132B (zh) * | 2011-07-08 | 2013-06-19 | 中国科学院上海微系统与信息技术研究所 | 一种逐层减薄石墨烯的方法 |
US9193587B2 (en) | 2011-07-13 | 2015-11-24 | Lockheed Martin Corporation | System and method for water purification and desalination |
US20130240355A1 (en) | 2012-03-16 | 2013-09-19 | Lockheed Martin Corporation | Functionalization of graphene holes for deionization |
US9028663B2 (en) | 2012-03-21 | 2015-05-12 | Lockheed Martin Corporation | Molecular separation device |
US9463421B2 (en) | 2012-03-29 | 2016-10-11 | Lockheed Martin Corporation | Planar filtration and selective isolation and recovery device |
US9095823B2 (en) | 2012-03-29 | 2015-08-04 | Lockheed Martin Corporation | Tunable layered membrane configuration for filtration and selective isolation and recovery devices |
US20130277305A1 (en) | 2012-04-19 | 2013-10-24 | Lockheed Martin Corporation | Selectively perforated graphene membranes for compound harvest, capture and retention |
US9834809B2 (en) | 2014-02-28 | 2017-12-05 | Lockheed Martin Corporation | Syringe for obtaining nano-sized materials for selective assays and related methods of use |
US9067811B1 (en) | 2012-05-25 | 2015-06-30 | Lockheed Martin Corporation | System, method, and control for graphenoid desalination |
US20150258498A1 (en) | 2014-03-12 | 2015-09-17 | Lockheed Martin Corporation | Graphene-based molecular separation and sequestration device and methods for harvest and recovery |
US9744617B2 (en) | 2014-01-31 | 2017-08-29 | Lockheed Martin Corporation | Methods for perforating multi-layer graphene through ion bombardment |
TW201504140A (zh) | 2013-03-12 | 2015-02-01 | Lockheed Corp | 形成具有均勻孔尺寸之多孔石墨烯之方法 |
WO2014159043A1 (en) | 2013-03-13 | 2014-10-02 | Lockheed Martin Corporation | Nanoporous membranes and methods for making the same |
US9480952B2 (en) | 2013-03-14 | 2016-11-01 | Lockheed Martin Corporation | Methods for chemical reaction perforation of atomically thin materials |
WO2014150363A2 (en) | 2013-03-15 | 2014-09-25 | Lockheed Martin Corporation | Method of separating an atomically thin material from a substrate |
US9572918B2 (en) | 2013-06-21 | 2017-02-21 | Lockheed Martin Corporation | Graphene-based filter for isolating a substance from blood |
US20150075667A1 (en) | 2013-09-19 | 2015-03-19 | Lockheed Martin Corporation | Carbon macrotubes and methods for making the same |
CN105940479A (zh) | 2014-01-31 | 2016-09-14 | 洛克希德马丁公司 | 使用宽离子场穿孔二维材料 |
CA2938305A1 (en) | 2014-01-31 | 2015-08-06 | Lockheed Martin Corporation | Processes for forming composite structures with a two-dimensional material using a porous, non-sacrificial supporting layer |
KR20160132102A (ko) | 2014-03-12 | 2016-11-16 | 록히드 마틴 코포레이션 | 체내 및 체외에서의 그래핀 사용 |
WO2015138752A1 (en) | 2014-03-12 | 2015-09-17 | Lockheed Martin Corporation | Coating of a porous substrate for disposition of graphene and other two-dimensional materials thereon |
AU2015229331A1 (en) | 2014-03-12 | 2016-10-27 | Lockheed Martin Corporation | Separation membranes formed from perforated graphene |
US20150258525A1 (en) | 2014-03-12 | 2015-09-17 | Lockheed Martin Corporation | Graphene-based molecular sieves and methods for production thereof |
WO2015148548A2 (en) | 2014-03-24 | 2015-10-01 | Lockheed Martin Corporation | Large area membrane evaluation apparatuses and methods for use thereof |
KR20160149310A (ko) | 2014-05-08 | 2016-12-27 | 록히드 마틴 코포레이션 | 적층된 이차원 소재 및 이를 포함하는 구조체를 제조하는 방법 |
-
2013
- 2013-03-12 JP JP2015501729A patent/JP6246785B2/ja not_active Expired - Fee Related
- 2013-03-12 CN CN201380013988.9A patent/CN104245577A/zh active Pending
- 2013-03-12 KR KR1020147029287A patent/KR20140146131A/ko not_active Application Discontinuation
- 2013-03-12 EP EP13713275.9A patent/EP2828196A1/de not_active Withdrawn
- 2013-03-12 SG SG11201405346RA patent/SG11201405346RA/en unknown
- 2013-03-12 US US13/795,276 patent/US9567224B2/en not_active Expired - Fee Related
- 2013-03-12 AU AU2013235643A patent/AU2013235643B2/en not_active Ceased
- 2013-03-12 IN IN7732DEN2014 patent/IN2014DN07732A/en unknown
- 2013-03-12 CA CA2865634A patent/CA2865634A1/en not_active Abandoned
- 2013-03-12 WO PCT/US2013/030344 patent/WO2013142133A1/en active Application Filing
-
2014
- 2014-09-16 IL IL234684A patent/IL234684A0/en unknown
Also Published As
Publication number | Publication date |
---|---|
IL234684A0 (en) | 2014-11-30 |
CA2865634A1 (en) | 2013-09-26 |
JP2015516357A (ja) | 2015-06-11 |
SG11201405346RA (en) | 2014-10-30 |
AU2013235643B2 (en) | 2015-12-17 |
US9567224B2 (en) | 2017-02-14 |
WO2013142133A1 (en) | 2013-09-26 |
US20130249147A1 (en) | 2013-09-26 |
JP6246785B2 (ja) | 2017-12-13 |
CN104245577A (zh) | 2014-12-24 |
EP2828196A1 (de) | 2015-01-28 |
AU2013235643A1 (en) | 2014-10-16 |
KR20140146131A (ko) | 2014-12-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
IN2014DN07732A (de) | ||
IL264134B (en) | Methods and devices for the production of purified hydrogen peroxide gas | |
CL2014002343A1 (es) | Aparato y proceso para la producción de monóxido de carbono de alta pureza, que comprende por lo menos una celda de electrolisis de oxido solido y una unidad de separacion de gases de salida | |
SG10201807764RA (en) | Graphene Modification | |
IL255287A0 (en) | Methods for using hydrogen peroxide gas in agricultural produce, transportation and storage | |
PH12016502600A1 (en) | Component handling assembly and method of handling components | |
EP3144963A4 (de) | Verfahren zur messung einer gaseinlassöffnung in einer elektrode für eine plasmaätzvorrichtung, elektrode, elektrodenregenerationsverfahren, regenerierte elektrode, plasmaätzvorrichtung und gaseinlassöffnungszustandsverteilungsdiagramm und anzeigeverfahren dafür | |
AU345526S (en) | Input device for an electronic tablet | |
PL2918994T3 (pl) | Sposób i urządzenie do wykrywania gazu, o niskim poborze mocy, oparte o VCSEL | |
AU333453S (en) | Bottle | |
AU348564S (en) | Tablet computer | |
CL2014003293A1 (es) | Proceso y equipo para producir un solución pura con contenido de litio. | |
EP3068734A4 (de) | Maschine und verfahren zur bereitstellung eines unter druck stehenden flüssigkeitsstroms mit gelöstem gas | |
EP2785152A4 (de) | Plasmaerzeugungsquelle und vakuumplasmaverarbeitungsvorrichtung damit | |
EP2915799A4 (de) | Poröser polymermetallkomplex, gasadsorptionsmittel und gasabscheidungsvorrichtung sowie gasspeicherungsvorrichtung damit | |
EP2802407A4 (de) | Beseitigung von luftverschmutzenden elementen aus gas, zugehörige vorrichtung, prozesse dafür und verwendung davon | |
MY172202A (en) | Methods and apparatus to form electronic circuitry on ophthalmic devices | |
EP3229299A4 (de) | Carbonfolie, basismaterial für gasdiffusionselektrode und brennstoffzelle | |
MX2015007441A (es) | Metodo para degradar (co) polimeros en un extrusor y extrusor para realizar el metodo. | |
MX364321B (es) | Método para fabricar partículas, partículas, y aparato para fabricar partículas. | |
EP2808511A4 (de) | Halterungsmaterial für gasbehandlungsvorrichtung, gasbehandlungsvorrichtung und produktionsverfahren dafür | |
EP3039099A4 (de) | Wasserstoffnutzung und kohlenstoffrückgewinnung | |
MX345702B (es) | Aparato y metodos de inversion de datos. | |
EP3131856A4 (de) | Herstellung von wasserstoff und anderen gasförmigen oder flüssigen produkten in einem beschleunigten biologischen verfahren | |
EP3064483A4 (de) | Hochreiner fluorierter kohlenwasserstoff, verwendung als ein plasmaätzgas und plasmaätzverfahren |