IN153131B - - Google Patents

Info

Publication number
IN153131B
IN153131B IN446/CAL/80A IN446CA1980A IN153131B IN 153131 B IN153131 B IN 153131B IN 446CA1980 A IN446CA1980 A IN 446CA1980A IN 153131 B IN153131 B IN 153131B
Authority
IN
India
Prior art keywords
radiation
reflection
reflected
point
properties
Prior art date
Application number
IN446/CAL/80A
Other languages
English (en)
Inventor
Johan Emanuel Stenberg
Lars Bertil Stiblert
Erland Torbjorn Sandstrom
Original Assignee
Johan Emanuel Stenberg
Lars Bertil Stiblert
Sandstroem Erland Torbjoern
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Johan Emanuel Stenberg, Lars Bertil Stiblert, Sandstroem Erland Torbjoern filed Critical Johan Emanuel Stenberg
Publication of IN153131B publication Critical patent/IN153131B/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21Polarisation-affecting properties
    • G01N21/211Ellipsometry

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
IN446/CAL/80A 1979-04-17 1980-04-17 IN153131B (ru)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE7903311A SE416681B (sv) 1979-04-17 1979-04-17 Sett att jemfora tva ytors reflexionsegenskaper

Publications (1)

Publication Number Publication Date
IN153131B true IN153131B (ru) 1984-06-02

Family

ID=20337810

Family Applications (1)

Application Number Title Priority Date Filing Date
IN446/CAL/80A IN153131B (ru) 1979-04-17 1980-04-17

Country Status (9)

Country Link
US (1) US4332476A (ru)
EP (1) EP0019088B1 (ru)
JP (1) JPS5649910A (ru)
AT (1) ATE6888T1 (ru)
BR (1) BR8002380A (ru)
CA (1) CA1140771A (ru)
DE (1) DE3067238D1 (ru)
IN (1) IN153131B (ru)
SE (1) SE416681B (ru)

Families Citing this family (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3135196A1 (de) * 1981-09-05 1983-03-17 Merck Patent Gmbh, 6100 Darmstadt Verfahren, mittel und vorrichtung zur bestimmung biologischer komponenten
US4502762A (en) * 1982-11-12 1985-03-05 Northern Telecom Limited Dual wavelength optical system
JPS59103255U (ja) * 1982-12-28 1984-07-11 日本真空技術株式会社 偏光計測装置における偏光用ミラ−
JPS6052706A (ja) * 1983-08-31 1985-03-26 Nippon Kokan Kk <Nkk> 膜厚測定装置
DE3419463C1 (de) * 1984-05-24 1985-09-12 Sagax Instrument AB, Sundbyberg Vorrichtung zur Erfassung von Stoffeigenschaften von Probenoberflaechen
DE3434575C1 (de) * 1984-09-20 1986-03-13 Sagax Instrument AB, Sundbyberg Ellipsometrische Vorrichtung zur Untersuchung der physikalischen Eigenschaften der Oberflaeche einer Probe
US6060237A (en) * 1985-02-26 2000-05-09 Biostar, Inc. Devices and methods for optical detection of nucleic acid hybridization
US4681450A (en) * 1985-06-21 1987-07-21 Research Corporation Photodetector arrangement for measuring the state of polarization of light
US5482830A (en) * 1986-02-25 1996-01-09 Biostar, Inc. Devices and methods for detection of an analyte based upon light interference
DE3914631A1 (de) * 1989-05-03 1990-11-08 Basf Ag Verfahren zur untersuchung der physikalischen eigenschaften duenner schichten
US5639671A (en) * 1989-09-18 1997-06-17 Biostar, Inc. Methods for optimizing of an optical assay device
US5541057A (en) * 1989-09-18 1996-07-30 Biostar, Inc. Methods for detection of an analyte
US5550063A (en) * 1991-02-11 1996-08-27 Biostar, Inc. Methods for production of an optical assay device
US5955377A (en) * 1991-02-11 1999-09-21 Biostar, Inc. Methods and kits for the amplification of thin film based assays
DE69127628T2 (de) * 1991-10-01 1998-01-22 Biostar Inc Hochempfindlicher optischer Immunoassay durch Gebrauch von Enzymmarkierten Reagenz
US5418136A (en) * 1991-10-01 1995-05-23 Biostar, Inc. Devices for detection of an analyte based upon light interference
US5494829A (en) * 1992-07-31 1996-02-27 Biostar, Inc. Devices and methods for detection of an analyte based upon light interference
EP0622624B1 (en) * 1993-04-23 1999-12-01 Research Development Corporation Of Japan A method for observing film thickness and/or refractive index
US5552272A (en) * 1993-06-10 1996-09-03 Biostar, Inc. Detection of an analyte by fluorescence using a thin film optical device
US7215424B1 (en) 1998-03-03 2007-05-08 J.A. Woollam Co., Inc. Broadband ellipsometer or polarimeter system including at least one multiple element lens
US7301631B1 (en) 2004-09-17 2007-11-27 J.A. Woollam Co., Inc. Control of uncertain angle of incidence of beam from Arc lamp
US7518725B1 (en) 1995-09-20 2009-04-14 J.A. Woollam Co., Inc. Temperature controlled lens
US7075649B1 (en) 1995-09-20 2006-07-11 J.A. Woollam Co. Discrete polarization state rotatable compensator spectroscopic ellipsometer system, and method of calibration
US7193710B1 (en) 1995-09-20 2007-03-20 J.A. Woollam Co., Inc. Rotating or rotatable compensator spectroscopic ellipsometer system including multiple element lenses
US5958704A (en) 1997-03-12 1999-09-28 Ddx, Inc. Sensing system for specific substance and molecule detection
US5798837A (en) 1997-07-11 1998-08-25 Therma-Wave, Inc. Thin film optical measurement system and method with calibrating ellipsometer
US6278519B1 (en) 1998-01-29 2001-08-21 Therma-Wave, Inc. Apparatus for analyzing multi-layer thin film stacks on semiconductors
US7345762B1 (en) 2000-05-30 2008-03-18 J.A. Woollam Co., Inc. Control of beam spot size in ellipsometer and the like systems
US7535566B1 (en) 2000-09-05 2009-05-19 J.A. Woollam Co., Inc. Beam chromatic shifting and directing means
US6795184B1 (en) 2001-04-06 2004-09-21 J.A. Woollam Co., Inc Odd bounce image rotation system in ellipsometer systems
US6713753B1 (en) 2001-07-03 2004-03-30 Nanometrics Incorporated Combination of normal and oblique incidence polarimetry for the characterization of gratings
JP3978153B2 (ja) * 2003-06-12 2007-09-19 富士フイルム株式会社 光干渉基材、標的検出用基材、並びに、標的検出装置及び標的検出方法
US20120077206A1 (en) 2003-07-12 2012-03-29 Accelr8 Technology Corporation Rapid Microbial Detection and Antimicrobial Susceptibility Testing
EP1648286B1 (en) 2003-07-12 2017-12-20 Accelerate Diagnostics, Inc. Sensitive and rapid biodetection
US8189193B1 (en) 2004-04-23 2012-05-29 J.A. Woollam Co., Inc. System and method of applying horizontally oriented arc-lamps in ellipsometer or the like systems
US7738105B1 (en) 2004-04-23 2010-06-15 Liphardt Martin M System and method of applying horizontally oriented arc-lamps in ellipsometer or the like systems
WO2007070832A1 (en) * 2005-12-13 2007-06-21 Great Basin Scientific Improved thin film biosensor and method and device for detection of analytes
US8416408B1 (en) 2009-02-27 2013-04-09 J.A. Woollam Co., Inc. Terahertz-infrared ellipsometer system, and method of use
US8488119B2 (en) 2009-02-27 2013-07-16 J.A. Woollam Co., Inc. Terahertz-infrared ellipsometer system, and method of use
US8934096B2 (en) 2009-02-27 2015-01-13 University Of Nebraska Board Of Regents Terahertz-infrared ellipsometer system, and method of use
US8169611B2 (en) 2009-02-27 2012-05-01 University Of Nebraska Board Of Regents Terahertz-infrared ellipsometer system, and method of use
US8736838B2 (en) 2009-02-27 2014-05-27 J.A. Woollam Co., Inc. Terahertz ellipsometer system, and method of use
US8564777B1 (en) 2010-08-16 2013-10-22 J.A. Woollam Co., Inc. System and method for compensating detector non-idealities
EP2683831B1 (en) 2011-03-07 2015-09-23 Accelerate Diagnostics, Inc. Rapid cell purification systems
US10254204B2 (en) 2011-03-07 2019-04-09 Accelerate Diagnostics, Inc. Membrane-assisted purification
EP2798322B1 (en) * 2011-12-31 2020-07-15 J.A. Woollam Co., Inc. Terahertz ellipsometer system, and method of use
US9677109B2 (en) 2013-03-15 2017-06-13 Accelerate Diagnostics, Inc. Rapid determination of microbial growth and antimicrobial susceptibility
US10023895B2 (en) 2015-03-30 2018-07-17 Accelerate Diagnostics, Inc. Instrument and system for rapid microogranism identification and antimicrobial agent susceptibility testing
US10253355B2 (en) 2015-03-30 2019-04-09 Accelerate Diagnostics, Inc. Instrument and system for rapid microorganism identification and antimicrobial agent susceptibility testing

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3622245A (en) * 1970-06-10 1971-11-23 Commerce Usa Double plate calorimeter for measuring the reflectivity of the plates and the energy in a beam of radiation
FR2257914B1 (ru) * 1972-11-20 1976-04-30 Sopelem
JPS51129279A (en) * 1975-05-02 1976-11-10 Nippon Kogaku Kk <Nikon> Polarizing analyzer

Also Published As

Publication number Publication date
CA1140771A (en) 1983-02-08
EP0019088A1 (de) 1980-11-26
SE416681B (sv) 1981-01-26
JPS6257936B2 (ru) 1987-12-03
US4332476A (en) 1982-06-01
SE7903311L (sv) 1980-10-18
EP0019088B1 (de) 1984-03-28
BR8002380A (pt) 1980-12-02
JPS5649910A (en) 1981-05-06
ATE6888T1 (de) 1984-04-15
DE3067238D1 (en) 1984-05-03

Similar Documents

Publication Publication Date Title
IN153131B (ru)
EP0397388A3 (en) Method and apparatus for measuring thickness of thin films
GB1174005A (en) Improvements in or relating to Internal Reflection Elements
EP0119630A3 (en) Method and apparatus for coating detection and surface evaluation
ES484441A1 (es) Dispositivo para la medicion de la claridad de productos de-molienda.
US2726173A (en) Method and apparatus for measuring film thickness
Corl et al. Thickness measurement of silicon dioxide layers by ultraviolet-visible interference method
JPS56115905A (en) Measuring method for thickness of transparent film and device therefor
JPS52138183A (en) Inspecting apparatus for flaw
DE3275750D1 (en) Apparatus for inspecting a transparent lacquer coating on a metal surface
JPS63163152A (ja) 透明基材又は半透明基材の検査方法とその検査装置
Clapham et al. Surface-coated reference flats for testing fully aluminized surfaces by means of the Fizeau interferometer
US3187623A (en) Method of model photoelasticity analysis
Sauro et al. X-ray interference structure in the specularly reflected radiation from thin films
JPS5667739A (en) Defect inspecting apparatus
Holmes The reflexion factor of glass
JPS5754803A (en) Inspecting device for transparent pattern
JPS5340584A (en) Bottle inspector by elliptically focusing system
JPS55140102A (en) Measuring device for flatness of inspected plane glass
JPS54124780A (en) Surface inspection apparatus
JPS5764130A (en) Radiation thermometer
JPS5618731A (en) Pyrheliometer employing solar battery
Heavens et al. The use of lateral waves for the examination of weakly absorbing surface films
JPS5257843A (en) Measuring device for thickness of film
JPH0450518Y2 (ru)