Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
  • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
  • H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/18, H10D48/04 and H10D48/07, with or without impurities, e.g. doping materials
  • H01L21/42—Bombardment with radiation
• • G—PHYSICS
  • G06—COMPUTING OR CALCULATING; COUNTING
  • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
  • G06K7/00—Methods or arrangements for sensing record carriers, e.g. for reading patterns
  • G06K7/01—Details
  • G06K7/015—Aligning or centering of the sensing device with respect to the record carrier
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
  • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
  • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
  • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
  • B23K26/042—Automatically aligning the laser beam
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L23/00—Details of semiconductor or other solid state devices
  • H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
  • H01L2924/0001—Technical content checked by a classifier
  • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

• Physics & Mathematics (AREA)
• Engineering & Computer Science (AREA)
• Optics & Photonics (AREA)
• General Physics & Mathematics (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Power Engineering (AREA)
• Artificial Intelligence (AREA)
• Computer Vision & Pattern Recognition (AREA)
• Theoretical Computer Science (AREA)
• Plasma & Fusion (AREA)
• Mechanical Engineering (AREA)
• Manufacturing & Machinery (AREA)
• Toxicology (AREA)
• Health & Medical Sciences (AREA)
• Mechanical Optical Scanning Systems (AREA)
• Laser Beam Printer (AREA)
• Laser Beam Processing (AREA)
• Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
• Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Applications Claiming Priority (1)

Publications (2)

Family

ID=4263345

Family Applications (1)

Country Status (10)

Families Citing this family (7)

Family Cites Families (4)

• 1986
  • 1986-09-22 CH CH3781/86A patent/CH670592A5/de not_active IP Right Cessation
• 1987
  • 1987-08-21 ZA ZA876229A patent/ZA876229B/xx unknown
  • 1987-09-01 EP EP87810500A patent/EP0262088B1/de not_active Expired - Lifetime
  • 1987-09-01 DE DE8787810500T patent/DE3770559D1/de not_active Expired - Fee Related
  • 1987-09-01 AT AT87810500T patent/ATE64238T1/de not_active IP Right Cessation
  • 1987-09-10 KR KR870010044A patent/KR880004559A/ko not_active Withdrawn
  • 1987-09-21 IL IL83969A patent/IL83969A/xx not_active IP Right Cessation
  • 1987-09-21 CA CA000547447A patent/CA1278392C/en not_active Expired - Lifetime
  • 1987-09-22 JP JP62236373A patent/JPS6394622A/ja active Pending
  • 1987-09-22 US US07/108,444 patent/US4809014A/en not_active Expired - Fee Related

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