JPS6427791A - Method for machining thin film - Google Patents

Method for machining thin film

Info

Publication number
JPS6427791A
JPS6427791A JP62182975A JP18297587A JPS6427791A JP S6427791 A JPS6427791 A JP S6427791A JP 62182975 A JP62182975 A JP 62182975A JP 18297587 A JP18297587 A JP 18297587A JP S6427791 A JPS6427791 A JP S6427791A
Authority
JP
Japan
Prior art keywords
work
thin film
mask
laser beam
prescribed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62182975A
Other languages
Japanese (ja)
Inventor
Yukio Nishikawa
Masashi Makino
Yuji Uesugi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP62182975A priority Critical patent/JPS6427791A/en
Publication of JPS6427791A publication Critical patent/JPS6427791A/en
Pending legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)
  • Lasers (AREA)
  • Manufacturing Of Electric Cables (AREA)

Abstract

PURPOSE:To machine a complicated pattern with high efficiency by fixing a mask on which slits are formed on the upper part of a work having a thin film layer and moving the work while scanning a laser beam through the mask to project it thereon. CONSTITUTION:The laser beam B emitted from a YAG laser beam oscillator 2 is enlarged by a beam expander and scanned by a polygonal mirror 5 and condensed by a lens 6 and projected on the work 1 through slits 7a of the mask 7. When the work 1 is moved in the prescribed direction continuously or intermittently by an X-Y table 8 while scanning the laser beam B in the lateral direction, the thin film layer of the work 1 is machined with the prescribed pattern. By this method, the complicated pattern can be machine at a high speed on a scale more than a medium lot with the machining width more than the prescribed quantity according to the slit 7a width of the mask 7 with respect to thin film material.
JP62182975A 1987-07-22 1987-07-22 Method for machining thin film Pending JPS6427791A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62182975A JPS6427791A (en) 1987-07-22 1987-07-22 Method for machining thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62182975A JPS6427791A (en) 1987-07-22 1987-07-22 Method for machining thin film

Publications (1)

Publication Number Publication Date
JPS6427791A true JPS6427791A (en) 1989-01-30

Family

ID=16127578

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62182975A Pending JPS6427791A (en) 1987-07-22 1987-07-22 Method for machining thin film

Country Status (1)

Country Link
JP (1) JPS6427791A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014530468A (en) * 2011-09-23 2014-11-17 ソシエテ ビックＳｏｃｉｅｔｅ Ｂｉｃ Method for forming an array of fuel cells on a composite surface

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014530468A (en) * 2011-09-23 2014-11-17 ソシエテ ビックＳｏｃｉｅｔｅ Ｂｉｃ Method for forming an array of fuel cells on a composite surface

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