IL72010A - X-ray dispersive and reflective structures and their manufacture - Google Patents

X-ray dispersive and reflective structures and their manufacture

Info

Publication number
IL72010A
IL72010A IL72010A IL7201084A IL72010A IL 72010 A IL72010 A IL 72010A IL 72010 A IL72010 A IL 72010A IL 7201084 A IL7201084 A IL 7201084A IL 72010 A IL72010 A IL 72010A
Authority
IL
Israel
Prior art keywords
manufacture
reflective structures
ray dispersive
dispersive
ray
Prior art date
Application number
IL72010A
Other languages
English (en)
Other versions
IL72010A0 (en
Original Assignee
Ovonic Synthetic Materials
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=27053893&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=IL72010(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Ovonic Synthetic Materials filed Critical Ovonic Synthetic Materials
Publication of IL72010A0 publication Critical patent/IL72010A0/xx
Publication of IL72010A publication Critical patent/IL72010A/xx

Links

Classifications

    • GPHYSICS
    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21KTECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • GPHYSICS
    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21KTECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • G21K1/062Devices having a multilayer structure
    • GPHYSICS
    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21KTECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2201/00Arrangements for handling radiation or particles
    • G21K2201/06Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
    • G21K2201/061Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements characterised by a multilayer structure
    • GPHYSICS
    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21KTECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2201/00Arrangements for handling radiation or particles
    • G21K2201/06Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
    • G21K2201/062Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements the element being a crystal
    • GPHYSICS
    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21KTECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2201/00Arrangements for handling radiation or particles
    • G21K2201/06Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
    • G21K2201/067Construction details
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/26Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/261In terms of molecular thickness or light wave length

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Physical Vapour Deposition (AREA)
  • Optical Filters (AREA)
IL72010A 1983-06-06 1984-06-04 X-ray dispersive and reflective structures and their manufacture IL72010A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US50165983A 1983-06-06 1983-06-06
US06/547,338 US4693933A (en) 1983-06-06 1983-10-31 X-ray dispersive and reflective structures and method of making the structures

Publications (2)

Publication Number Publication Date
IL72010A0 IL72010A0 (en) 1984-10-31
IL72010A true IL72010A (en) 1988-07-31

Family

ID=27053893

Family Applications (1)

Application Number Title Priority Date Filing Date
IL72010A IL72010A (en) 1983-06-06 1984-06-04 X-ray dispersive and reflective structures and their manufacture

Country Status (8)

Country Link
US (1) US4693933A (xx)
EP (1) EP0128026B1 (xx)
JP (1) JPH0646240B2 (xx)
KR (1) KR910007147B1 (xx)
AU (1) AU2902784A (xx)
CA (1) CA1223090A (xx)
DE (1) DE3479617D1 (xx)
IL (1) IL72010A (xx)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4785470A (en) * 1983-10-31 1988-11-15 Ovonic Synthetic Materials Company, Inc. Reflectivity and resolution X-ray dispersive and reflective structures for carbon, beryllium and boron analysis
JPS61225488A (ja) * 1985-03-29 1986-10-07 三菱マテリアル株式会社 ボタンビツト
US4675889A (en) * 1985-07-08 1987-06-23 Ovonic Synthetic Materials Company, Inc. Multiple wavelength X-ray dispersive devices and method of making the devices
JPS6221223A (ja) * 1985-07-19 1987-01-29 Shimadzu Corp 軟x線用投影結像装置
JPH07113679B2 (ja) * 1986-03-28 1995-12-06 日本電信電話株式会社 多層膜反射鏡
JPH0799400B2 (ja) * 1986-04-25 1995-10-25 オボニツク・シンセテイツク・マテイリアルズ・カンパニ−・インコ−ポレ−テツド 高反射能、高分解能のx線分散性反射性構造体とそれを用いた分光分析方法
JPH0634107B2 (ja) * 1986-06-18 1994-05-02 キヤノン株式会社 X線用多層膜反射鏡
US4969175A (en) * 1986-08-15 1990-11-06 Nelson Robert S Apparatus for narrow bandwidth and multiple energy x-ray imaging
US5433988A (en) * 1986-10-01 1995-07-18 Canon Kabushiki Kaisha Multi-layer reflection mirror for soft X-ray to vacuum ultraviolet ray
JP2831349B2 (ja) * 1986-12-25 1998-12-02 キヤノン株式会社 X線又は真空紫外線用多層膜反射鏡
US5310603A (en) * 1986-10-01 1994-05-10 Canon Kabushiki Kaisha Multi-layer reflection mirror for soft X-ray to vacuum ultraviolet ray
JP2566564B2 (ja) * 1986-10-01 1996-12-25 キヤノン株式会社 軟x線又は真空紫外線用多層膜反射鏡
JPS63111500A (ja) * 1986-10-29 1988-05-16 株式会社日立製作所 X線用多層膜反射鏡およびそれを用いた装置
EP0279670B1 (en) * 1987-02-18 1997-10-29 Canon Kabushiki Kaisha A reflection type mask
JP2648599B2 (ja) * 1987-10-06 1997-09-03 キヤノン株式会社 X線又は真空紫外線用多層膜反射鏡の作成方法
JPH01202700A (ja) * 1988-02-09 1989-08-15 Mitsubishi Electric Corp X線ミラー及びその製造方法
US4915463A (en) * 1988-10-18 1990-04-10 The United States Of America As Represented By The Department Of Energy Multilayer diffraction grating
US4994538A (en) * 1989-02-24 1991-02-19 Avery International Corporation Siliconized emulsion based pressure-sensitive adhesives
JP2865257B2 (ja) * 1989-03-07 1999-03-08 オリンパス光学工業株式会社 シュヴアルツシルド光学系
FR2653234A1 (fr) * 1989-10-13 1991-04-19 Philips Electronique Lab Dispositif du type miroir dans le domaine des rayons x-uv.
DE4015275C2 (de) * 1990-05-12 1994-07-21 Geesthacht Gkss Forschung Anordnung mit beschichtetem Spiegel zur Untersuchung von Proben nach der Methode der Röntgenfluoreszenzanalyse
US5164975A (en) * 1991-06-13 1992-11-17 The United States Of America As Represented By The United States Department Of Energy Multiple wavelength X-ray monochromators
JPH0534500A (ja) * 1991-08-02 1993-02-09 Olympus Optical Co Ltd X線多層膜反射鏡
US5528646A (en) * 1992-08-27 1996-06-18 Olympus Optical Co., Ltd. Sample vessel for X-ray microscopes
JP2995371B2 (ja) * 1992-11-12 1999-12-27 セイコーインスツルメンツ株式会社 X線反射鏡用材料
US5382342A (en) * 1993-01-14 1995-01-17 The United States Of America As Represented By The Department Of Energy Fabrication process for a gradient index x-ray lens
US6333967B1 (en) 1996-07-19 2001-12-25 Rigaku Corporation X-ray generator
JP3734366B2 (ja) 1998-03-20 2006-01-11 株式会社リガク X線分析装置
US6389100B1 (en) 1999-04-09 2002-05-14 Osmic, Inc. X-ray lens system
US6421417B1 (en) 1999-08-02 2002-07-16 Osmic, Inc. Multilayer optics with adjustable working wavelength
US7261957B2 (en) * 2000-03-31 2007-08-28 Carl Zeiss Smt Ag Multilayer system with protecting layer system and production method
US20070281109A1 (en) * 2000-03-31 2007-12-06 Carl Zeiss Smt Ag Multilayer system with protecting layer system and production method
US6870896B2 (en) 2000-12-28 2005-03-22 Osmic, Inc. Dark-field phase contrast imaging
US6804324B2 (en) * 2001-03-01 2004-10-12 Osmo, Inc. X-ray phase contrast imaging using a fabry-perot interferometer concept
US6510200B1 (en) 2001-06-29 2003-01-21 Osmic, Inc. Multi-layer structure with variable bandpass for monochromatization and spectroscopy
WO2003020213A2 (en) * 2001-08-30 2003-03-13 Praecis Pharmaceuticals Incorporated Methods and compositions for treating inflammatory disorders
US6643353B2 (en) 2002-01-10 2003-11-04 Osmic, Inc. Protective layer for multilayers exposed to x-rays
JP3629520B2 (ja) * 2002-03-05 2005-03-16 理学電機工業株式会社 X線分光素子およびそれを用いた蛍光x線分析装置
EP1348984A1 (en) * 2002-03-27 2003-10-01 Carl Zeiss Semiconductor Manufacturing Technologies Ag Optical broad band element and process for its production
US20050111083A1 (en) * 2002-03-27 2005-05-26 Yakshin Andrey E. Optical broad band element and process for its production
KR20020087919A (ko) * 2002-10-22 2002-11-23 김병철 모기링(Mosquito Ring)-모기향에 끼워 연소를 중지시키는작용
JP4566791B2 (ja) * 2004-03-26 2010-10-20 キヤノン株式会社 軟x線多層膜反射鏡
JP2007134464A (ja) * 2005-11-09 2007-05-31 Canon Inc 多層膜を有する光学素子及びそれを有する露光装置
EP1965229A3 (en) * 2007-02-28 2008-12-10 Corning Incorporated Engineered fluoride-coated elements for laser systems
US7848483B2 (en) * 2008-03-07 2010-12-07 Rigaku Innovative Technologies Magnesium silicide-based multilayer x-ray fluorescence analyzers
US8744048B2 (en) * 2010-12-28 2014-06-03 General Electric Company Integrated X-ray source having a multilayer total internal reflection optic device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3682528A (en) * 1970-09-10 1972-08-08 Optical Coating Laboratory Inc Infra-red interference filter
US3887261A (en) * 1973-03-23 1975-06-03 Ibm Low-loss reflection coatings using absorbing materials
CH595458A5 (xx) * 1975-03-07 1978-02-15 Balzers Patent Beteilig Ag
US4261771A (en) * 1979-10-31 1981-04-14 Bell Telephone Laboratories, Incorporated Method of fabricating periodic monolayer semiconductor structures by molecular beam epitaxy
US4495254A (en) * 1981-05-18 1985-01-22 Westinghouse Electric Corp. Protectively-coated gold-plated article of jewelry or wristwatch component
US4727000A (en) * 1983-06-06 1988-02-23 Ovonic Synthetic Materials Co., Inc. X-ray dispersive and reflective structures

Also Published As

Publication number Publication date
JPS607400A (ja) 1985-01-16
IL72010A0 (en) 1984-10-31
DE3479617D1 (en) 1989-10-05
KR910007147B1 (ko) 1991-09-18
EP0128026A2 (en) 1984-12-12
AU2902784A (en) 1984-12-13
EP0128026B1 (en) 1989-08-30
EP0128026A3 (en) 1986-07-23
KR850000692A (ko) 1985-02-25
JPH0646240B2 (ja) 1994-06-15
US4693933A (en) 1987-09-15
CA1223090A (en) 1987-06-16

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Legal Events

Date Code Title Description
MM9K Patent not in force due to non-payment of renewal fees
ERR Corrigendum

Free format text: CORRECT NAME APPLICANT: ROCKY C.S. SHIH; DELETE INTERNATIONAL PUBLICATION NO.: WO/2007/023366; CORRECT DATE OF APPLICATION: 30.6.2009