IL283082A - חיישן כמו-פרוסה משופר - Google Patents

חיישן כמו-פרוסה משופר

Info

Publication number
IL283082A
IL283082A IL283082A IL28308221A IL283082A IL 283082 A IL283082 A IL 283082A IL 283082 A IL283082 A IL 283082A IL 28308221 A IL28308221 A IL 28308221A IL 283082 A IL283082 A IL 283082A
Authority
IL
Israel
Prior art keywords
sensor
improved slice
slice
improved
Prior art date
Application number
IL283082A
Other languages
English (en)
Other versions
IL283082B2 (he
IL283082B1 (he
Original Assignee
Cyberoptics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cyberoptics Corp filed Critical Cyberoptics Corp
Publication of IL283082A publication Critical patent/IL283082A/he
Publication of IL283082B1 publication Critical patent/IL283082B1/he
Publication of IL283082B2 publication Critical patent/IL283082B2/he

Links

Classifications

    • H10P72/0604—
    • H10P72/0612—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
    • B32B17/10009—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets
    • B32B17/10036—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets comprising two outer glass sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
    • B32B17/10009—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets
    • B32B17/10128—Treatment of at least one glass sheet
    • B32B17/10137—Chemical strengthening
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
    • B32B17/10165—Functional features of the laminated safety glass or glazing
    • B32B17/10431—Specific parts for the modulation of light incorporated into the laminated safety glass or glazing
    • B32B17/1044—Invariable transmission
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
    • B32B17/1055—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the resin layer, i.e. interlayer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
    • B32B17/1055—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the resin layer, i.e. interlayer
    • B32B17/10651—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the resin layer, i.e. interlayer comprising colorants, e.g. dyes or pigments
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
    • B32B17/1055—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the resin layer, i.e. interlayer
    • B32B17/10733—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the resin layer, i.e. interlayer containing epoxy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
    • B32B17/10807—Making laminated safety glass or glazing; Apparatus therefor
    • B32B17/10899—Making laminated safety glass or glazing; Apparatus therefor by introducing interlayers of synthetic resin
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
    • B32B17/10807—Making laminated safety glass or glazing; Apparatus therefor
    • B32B17/10981—Pre-treatment of the layers
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by quality surveillance of production
    • H10P72/06—
    • H10P72/0602—
    • H10P74/207—
    • H10P74/238—
    • H10P74/277—
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32179—Quality control, monitor production tool with multiple sensors

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Automation & Control Theory (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Quality & Reliability (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Pressure Sensors (AREA)
IL283082A 2018-11-14 2019-11-12 חיישן כמו-פרוסה משופר IL283082B2 (he)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862767251P 2018-11-14 2018-11-14
US16/678,278 US12074044B2 (en) 2018-11-14 2019-11-08 Wafer-like sensor
PCT/US2019/060905 WO2020102187A1 (en) 2018-11-14 2019-11-12 Improved wafer-like sensor

Publications (3)

Publication Number Publication Date
IL283082A true IL283082A (he) 2021-06-30
IL283082B1 IL283082B1 (he) 2024-05-01
IL283082B2 IL283082B2 (he) 2024-09-01

Family

ID=70550766

Family Applications (1)

Application Number Title Priority Date Filing Date
IL283082A IL283082B2 (he) 2018-11-14 2019-11-12 חיישן כמו-פרוסה משופר

Country Status (9)

Country Link
US (2) US12074044B2 (he)
EP (1) EP3881350A4 (he)
JP (1) JP7195427B2 (he)
KR (1) KR102616976B1 (he)
CN (1) CN113016057B (he)
IL (1) IL283082B2 (he)
SG (1) SG11202104665XA (he)
TW (1) TWI753321B (he)
WO (1) WO2020102187A1 (he)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20180366354A1 (en) 2017-06-19 2018-12-20 Applied Materials, Inc. In-situ semiconductor processing chamber temperature apparatus
US11373890B2 (en) * 2018-12-17 2022-06-28 Applied Materials, Inc. Wireless in-situ real-time measurement of electrostatic chucking force in semiconductor wafer processing
US11651982B2 (en) * 2019-10-11 2023-05-16 Winbond Electronics Corp. Drying block structure and storage device
US12259660B2 (en) 2021-10-26 2025-03-25 Industrial Technology Research Institute Inspection method and inspection platform for lithography
KR102753523B1 (ko) * 2021-12-29 2025-01-15 세메스 주식회사 온도측정용 기판 및 다이 본딩 장치 및 온도 측정 방법

Family Cites Families (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04318955A (ja) * 1991-04-17 1992-11-10 Asahi Glass Co Ltd ダミーウェハー用ガラス基板
JP2534193Y2 (ja) * 1991-06-28 1997-04-30 住友金属工業株式会社 温度測定装置
JP3250285B2 (ja) * 1992-11-26 2002-01-28 セイコーエプソン株式会社 情報計測手段を備えた被処理基板
JPH0945751A (ja) 1995-07-27 1997-02-14 Sony Corp プラズマ装置用ダミーウエハ
JP3249911B2 (ja) * 1996-01-08 2002-01-28 東京エレクトロン株式会社 温度測定装置、処理装置及び処理方法
JPH11307606A (ja) * 1998-04-20 1999-11-05 Dainippon Screen Mfg Co Ltd 基板熱処理装置の評価方法および評価装置
IL147692A0 (en) 2002-01-17 2002-08-14 Innersense Ltd Machine and environment analyzer
JP3792165B2 (ja) * 2002-02-26 2006-07-05 林電工株式会社 熱電対ウエハセンサ
US7151366B2 (en) * 2002-12-03 2006-12-19 Sensarray Corporation Integrated process condition sensing wafer and data analysis system
US7135852B2 (en) 2002-12-03 2006-11-14 Sensarray Corporation Integrated process condition sensing wafer and data analysis system
KR20070009600A (ko) 2004-03-09 2007-01-18 싸이버옵틱스 쎄미콘덕터 인코퍼레이티드 개선된 무선 기판형 센서
US8604361B2 (en) 2005-12-13 2013-12-10 Kla-Tencor Corporation Component package for maintaining safe operating temperature of components
JP5128080B2 (ja) * 2006-03-29 2013-01-23 東京エレクトロン株式会社 基板処理装置の制御装置およびその制御方法
US7540188B2 (en) * 2006-05-01 2009-06-02 Lynn Karl Wiese Process condition measuring device with shielding
EP1860418A1 (en) * 2006-05-23 2007-11-28 Sensirion AG A method for fabricating a pressure sensor using SOI wafers
TWI480935B (zh) * 2008-12-24 2015-04-11 Nanchang O Film Optoelectronics Technology Ltd 將玻璃黏著在影像感測器封裝體中之技術
US8859103B2 (en) 2010-11-05 2014-10-14 Joseph Eugene Canale Glass wafers for semiconductor fabrication processes and methods of making same
US9134186B2 (en) * 2011-02-03 2015-09-15 Kla-Tencor Corporation Process condition measuring device (PCMD) and method for measuring process conditions in a workpiece processing tool configured to process production workpieces
GB2487962B (en) * 2011-02-11 2016-10-12 M-Solv Ltd Method for making a two-layer capacitive touch sensor panel
US9317158B2 (en) * 2011-03-08 2016-04-19 Synaptics Incorporated Baseline management for input devices
EP2617690B1 (en) * 2012-01-19 2017-11-22 Corning Incorporated Method of decorating chemically strengthened glass
JP5712975B2 (ja) * 2012-07-06 2015-05-07 東京エレクトロン株式会社 計測用基板、基板処理装置及び基板処理装置の運転方法
US9159687B2 (en) * 2012-07-31 2015-10-13 Taiwan Semiconductor Manufacturing Company, Ltd. Solder bump for ball grid array
CN105408109A (zh) 2013-04-22 2016-03-16 康宁股份有限公司 具有高的玻璃-聚合物中间层粘附的层叠玻璃结构
KR102059716B1 (ko) * 2013-05-30 2019-12-26 케이엘에이 코포레이션 열 플럭스를 측정하기 위한 방법 및 시스템
DE102013019003A1 (de) 2013-11-13 2015-05-13 Taiwan Glass Ind. Corp. Alkali-Alumino-Silikatglas
CN105293901A (zh) 2014-07-01 2016-02-03 科立视材料科技有限公司 化学强化碱铝硅酸盐玻璃用玻璃组合物及其制造方法
DE102015213075A1 (de) 2015-07-13 2017-01-19 Schott Ag Asymmetrisch aufgebaute, auf beiden Oberflächenseiten chemisch vorgespannte Dünnglasscheibe, Verfahren zu deren Herstellung sowie deren Verwendung
US11048028B2 (en) * 2015-12-03 2021-06-29 Sony Semiconductor Solutions Corporation Semiconductor chip and electronic apparatus for suppressing degradation of semiconductor chip
EP3222964B1 (en) * 2016-03-25 2020-01-15 Fogale Nanotech Chromatic confocal device and method for 2d/3d inspection of an object such as a wafer
US10460966B2 (en) 2016-06-15 2019-10-29 Kla-Tencor Corporation Encapsulated instrumented substrate apparatus for acquiring measurement parameters in high temperature process applications
KR102592054B1 (ko) * 2016-12-23 2023-10-23 삼성전자주식회사 글래스 하우징을 포함하는 전자 장치

Also Published As

Publication number Publication date
US20250022732A1 (en) 2025-01-16
EP3881350A1 (en) 2021-09-22
WO2020102187A1 (en) 2020-05-22
TWI753321B (zh) 2022-01-21
SG11202104665XA (en) 2021-06-29
CN113016057B (zh) 2024-05-17
KR20210066925A (ko) 2021-06-07
JP2022508112A (ja) 2022-01-19
JP7195427B2 (ja) 2022-12-23
TW202041994A (zh) 2020-11-16
US20200152494A1 (en) 2020-05-14
US12074044B2 (en) 2024-08-27
IL283082B2 (he) 2024-09-01
IL283082B1 (he) 2024-05-01
KR102616976B1 (ko) 2023-12-21
EP3881350A4 (en) 2022-07-27
CN113016057A (zh) 2021-06-22

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