IL24399A - Source of positively charged particles - Google Patents
Source of positively charged particlesInfo
- Publication number
- IL24399A IL24399A IL24399A IL2439965A IL24399A IL 24399 A IL24399 A IL 24399A IL 24399 A IL24399 A IL 24399A IL 2439965 A IL2439965 A IL 2439965A IL 24399 A IL24399 A IL 24399A
- Authority
- IL
- Israel
- Prior art keywords
- source
- jet
- charged particles
- positively charged
- plates
- Prior art date
Links
- 239000002245 particle Substances 0.000 title claims description 14
- 230000007935 neutral effect Effects 0.000 claims description 5
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 230000005684 electric field Effects 0.000 claims 3
- 238000011144 upstream manufacturing Methods 0.000 claims 3
- 230000007423 decrease Effects 0.000 claims 1
- 150000002500 ions Chemical class 0.000 description 10
- 239000007789 gas Substances 0.000 description 6
- 238000000605 extraction Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/022—Details
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Particle Accelerators (AREA)
- Plasma Technology (AREA)
- Catalysts (AREA)
- Electrostatic Spraying Apparatus (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Description
niuji inn mini"! n PATENTS AND DESIGNS ORDINANCE SPECIFICATION A source of positively charged particles I (we) C0MMISS1RIAT A L' ENSRGIE ATOMIQUE, of 29, rue de la F4dOration, Paris 15e, Prance do hereby declare the nature of this invention and in what manner the same is to "be performed, to be particularly described and ascertained in and. by the following statement:— The present invention relates to a source of positively charged particles, and in particular a source of positive ions adapted to generate a very high-energy ion beam.
The known high energy ion sources usually comprisa an enclosure provided with a small opening and containing a mixture of neutral gases and an ionized gas, the pressure of said neutral gases being es -5 —7 from 10 to 10 atmosphere.
One or several electrodes mounted in register with said opening and raised to negative potentials with respect to said enclosure, permit to extract the ions contained in the latter and to accelerate them. The ionized gas is homogeneously and isotropically distributed in said enclosure, i. e. the velocities of the particles (in particular of the ions) are randomly orientated.
Therefore, whenever an ion passes through the enclosure opening, its velocity (which will be referred to as its initial velocity) can have any direction and is usually low, since the kinetic energy of the plasma contained in the enclosure is of small value. It follows that, in the vicinity of said enclosure, a positive space—charge is created, said space—charge resulting from the presence of a large amount of low initial-velocity ions and having a tendency to interfere with the extraction of ions from said enclosure.
Consequently, the intensity of the ion beam obtained is limited 2 to about 1mA.-^6m for an extraction voltage of up to 1000 volts. Jxi addition, the energy of the ions forming such a beam is rather low and can be increased only by carrying out acceleration methods which require voltage sources of several hundred thousand volts.
Moreover, since the pressure of neutral gases is high, the major portion of the extracted ions is lost, due to charge exchanges in the numerous collisions between ions and neutral gases. from ,ς ' The present invention, which is free
Claims (4)
1. ) A source of positively charged particles, in particular an ion source adapted to generate a very high energy ion beam, said source comprising means for generating an accelerated jet of positively charged particles and negatively charged particles which is altogether electrically neutral and possessed of a very high energy, at least two electrically conductive parallel plates at right angles to the longitudinal axis of said jet, said plates being provided with with openings co-axial -be said jet and the areas of which are of the order of that of the cross-sec ion of said jet, and a source of direct current adapted to establish an electric field between said plates and so mounted that its positive terminal is connected to that of said plates which is the more upstream of said jet, whereby when said jet has passed through said opening of said upstream plate, the negatively-charged particles of said et, due to said electric field, are slowed down and then sent back towards said upstream plate by which they are captured, whereas the positively-charged particles proceed on their way and pass through the opening of the other plate after having been accelerated by said electric field.
2. ) A source of positively charged particles according to claim 1 , wherein the jet of particles is constituted by an accelerated plasma emitted by an electro-magnetic accelerator.
3. ) A source of positively charged particles according to claims 1 and 2, wherein are provided means for generating a magnetic field which is parallel to the axis of said jet of particles and the intensity of which decreases in the direction of flow of said jet.
4. ) A source of positively charged particles acc ding to claims 1 to 3, said source being located- within a tight enclosure incide ^ich the air pressure is of the der of 10~° atmosphere. Dated this let day of October, 1965 For th^ Applicants B 1762-3 - Isr. - Pak
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR991423A FR1476514A (en) | 1964-10-14 | 1964-10-14 | Ion source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| IL24399A true IL24399A (en) | 1969-05-28 |
Family
ID=8840338
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IL24399A IL24399A (en) | 1964-10-14 | 1965-10-03 | Source of positively charged particles |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US3376469A (en) |
| BE (1) | BE670351A (en) |
| CH (1) | CH444829A (en) |
| DE (1) | DE1489777B1 (en) |
| ES (1) | ES318459A1 (en) |
| FR (1) | FR1476514A (en) |
| GB (1) | GB1063199A (en) |
| IL (1) | IL24399A (en) |
| LU (1) | LU49581A1 (en) |
| NL (1) | NL6512861A (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2950330C2 (en) * | 1979-12-14 | 1983-06-01 | Leybold-Heraeus GmbH, 5000 Köln | Device for chemical analysis of samples |
| US4453086A (en) * | 1981-12-31 | 1984-06-05 | International Business Machines Corporation | Electron beam system with reduced charge buildup |
| US4471224A (en) * | 1982-03-08 | 1984-09-11 | International Business Machines Corporation | Apparatus and method for generating high current negative ions |
| JPS59113175A (en) * | 1982-12-20 | 1984-06-29 | Nisshin Haiboruteeji Kk | Negative ion source |
| US4472174A (en) * | 1983-04-25 | 1984-09-18 | Raymond L. Chuan | Method and apparatus for providing and using RF generated plasma for particle charging in electrostatic precipitation |
| US6515426B1 (en) | 1998-12-15 | 2003-02-04 | Hitachi, Ltd. | Ion beam processing apparatus and method of operating ion source therefor |
| US6441382B1 (en) | 1999-05-21 | 2002-08-27 | Axcelis Technologies, Inc. | Deceleration electrode configuration for ultra-low energy ion implanter |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3082326A (en) * | 1954-03-08 | 1963-03-19 | Schlumberger Well Surv Corp | Neutron generating apparatus |
| GB816681A (en) * | 1955-01-07 | 1959-07-15 | Licentia Gmbh | Ion source |
| DE1021963B (en) * | 1955-04-01 | 1958-01-02 | Messen Jaschin G A | Device for the electrical charging of matter suspended in an air stream by means of radioactive preparations |
| US2934665A (en) * | 1956-09-12 | 1960-04-26 | Siemens Ag | Ion source |
| US3279176A (en) * | 1959-07-31 | 1966-10-18 | North American Aviation Inc | Ion rocket engine |
| US3287582A (en) * | 1963-01-04 | 1966-11-22 | Lionel V Baldwin | Apparatus for increasing ion engine beam density |
-
1964
- 1964-10-14 FR FR991423A patent/FR1476514A/en not_active Expired
-
1965
- 1965-09-30 BE BE670351D patent/BE670351A/xx unknown
- 1965-09-30 US US491699A patent/US3376469A/en not_active Expired - Lifetime
- 1965-10-01 DE DE19651489777 patent/DE1489777B1/en not_active Withdrawn
- 1965-10-03 IL IL24399A patent/IL24399A/en unknown
- 1965-10-04 NL NL6512861A patent/NL6512861A/xx unknown
- 1965-10-04 GB GB42034/65A patent/GB1063199A/en not_active Expired
- 1965-10-04 CH CH1366065A patent/CH444829A/en unknown
- 1965-10-05 LU LU49581A patent/LU49581A1/xx unknown
- 1965-10-14 ES ES0318459A patent/ES318459A1/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| NL6512861A (en) | 1966-04-15 |
| DE1489777B1 (en) | 1970-01-15 |
| FR1476514A (en) | 1967-04-14 |
| US3376469A (en) | 1968-04-02 |
| CH444829A (en) | 1967-10-15 |
| LU49581A1 (en) | 1965-12-06 |
| BE670351A (en) | 1966-01-17 |
| ES318459A1 (en) | 1967-05-16 |
| GB1063199A (en) | 1967-03-30 |
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