IL163954A0 - A method and apparatus for automated analysis and characterization of chemical constituents of process solutions - Google Patents

A method and apparatus for automated analysis and characterization of chemical constituents of process solutions

Info

Publication number
IL163954A0
IL163954A0 IL16395404A IL16395404A IL163954A0 IL 163954 A0 IL163954 A0 IL 163954A0 IL 16395404 A IL16395404 A IL 16395404A IL 16395404 A IL16395404 A IL 16395404A IL 163954 A0 IL163954 A0 IL 163954A0
Authority
IL
Israel
Prior art keywords
characterization
automated analysis
chemical constituents
process solutions
solutions
Prior art date
Application number
IL16395404A
Other languages
English (en)
Original Assignee
Metara Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Metara Inc filed Critical Metara Inc
Publication of IL163954A0 publication Critical patent/IL163954A0/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/26—Oils; Viscous liquids; Paints; Inks
    • G01N33/28—Oils, i.e. hydrocarbon liquids
    • G01N33/30—Oils, i.e. hydrocarbon liquids for lubricating properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D59/00—Separation of different isotopes of the same chemical element
    • B01D59/44—Separation by mass spectrography
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/10—Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/10—Devices for withdrawing samples in the liquid or fluent state
    • G01N1/14—Suction devices, e.g. pumps; Ejector devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/38—Diluting, dispersing or mixing samples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/88—Integrated analysis systems specially adapted therefor, not covered by a single one of the groups G01N30/04 - G01N30/86
    • G01N2030/8804—Integrated analysis systems specially adapted therefor, not covered by a single one of the groups G01N30/04 - G01N30/86 automated systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/88—Integrated analysis systems specially adapted therefor, not covered by a single one of the groups G01N30/04 - G01N30/86
    • G01N2030/8809—Integrated analysis systems specially adapted therefor, not covered by a single one of the groups G01N30/04 - G01N30/86 analysis specially adapted for the sample
    • G01N2030/8868—Integrated analysis systems specially adapted therefor, not covered by a single one of the groups G01N30/04 - G01N30/86 analysis specially adapted for the sample elemental analysis, e.g. isotope dilution analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/88—Integrated analysis systems specially adapted therefor, not covered by a single one of the groups G01N30/04 - G01N30/86
    • G01N2030/8886—Analysis of industrial production processes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/11—Automated chemical analysis
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/11—Automated chemical analysis
    • Y10T436/117497—Automated chemical analysis with a continuously flowing sample or carrier stream
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/11—Automated chemical analysis
    • Y10T436/117497—Automated chemical analysis with a continuously flowing sample or carrier stream
    • Y10T436/118339—Automated chemical analysis with a continuously flowing sample or carrier stream with formation of a segmented stream
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/13—Tracers or tags
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/24—Nuclear magnetic resonance, electron spin resonance or other spin effects or mass spectrometry
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/25—Chemistry: analytical and immunological testing including sample preparation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/25—Chemistry: analytical and immunological testing including sample preparation
    • Y10T436/25625—Dilution

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
IL16395404A 2002-03-08 2004-03-04 A method and apparatus for automated analysis and characterization of chemical constituents of process solutions IL163954A0 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/094,394 US7531134B1 (en) 2002-03-08 2002-03-08 Method and apparatus for automated analysis and characterization of chemical constituents of process solutions
PCT/US2003/006680 WO2003076905A1 (en) 2002-03-08 2003-03-04 A method and apparatus for automated analysis and characterization of chemical constituents of process solutions

Publications (1)

Publication Number Publication Date
IL163954A0 true IL163954A0 (en) 2005-12-18

Family

ID=27804254

Family Applications (1)

Application Number Title Priority Date Filing Date
IL16395404A IL163954A0 (en) 2002-03-08 2004-03-04 A method and apparatus for automated analysis and characterization of chemical constituents of process solutions

Country Status (7)

Country Link
US (1) US7531134B1 (ja)
EP (1) EP1490663A1 (ja)
JP (1) JP2005520131A (ja)
KR (1) KR20040104501A (ja)
AU (1) AU2003217928A1 (ja)
IL (1) IL163954A0 (ja)
WO (1) WO2003076905A1 (ja)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7485464B2 (en) * 2003-04-30 2009-02-03 Westco Scientific Instruments, Inc. Method and apparatus for sample preparation in an automated discrete fluid sample analyzer
EP1865533B1 (en) * 2006-06-08 2014-09-17 Microsaic Systems PLC Microengineerd vacuum interface for an ionization system
DK2108111T3 (da) * 2006-12-07 2019-07-15 Definitek Inc Fastfase- og katalyseaktiveret automatiseret isotopfortynding og specieret isotopfortyndingsmassespektrometri
WO2010099108A2 (en) * 2009-02-24 2010-09-02 Mayo Foundation For Medical Education And Research Multiplexing derivatized anayltes using mass spectroscopy
US8808521B2 (en) * 2010-01-07 2014-08-19 Boli Zhou Intelligent control system for electrochemical plating process
JP5827776B2 (ja) * 2011-07-07 2015-12-02 株式会社日本エイピーアイ 測定方法及びこれを用いた核燃料破損の検出方法、並びに、測定装置及びその使用方法
KR20140066513A (ko) * 2012-11-23 2014-06-02 삼성전기주식회사 금속 도금액 중의 알데히드 화합물의 분석방법
CN103529152B (zh) * 2013-10-15 2015-07-01 中国工程物理研究院化工材料研究所 一种基于质谱仪的自反馈气体定量装置及其使用方法
CN103728361B (zh) * 2013-12-18 2016-05-04 中国原子能科学研究院 一种新的ft-tims分析易裂变核素微粒同位素比方法
US20160327543A1 (en) * 2014-01-02 2016-11-10 John P. Jasper Method for continuously monitoring chemical or biological processes
US10976294B2 (en) * 2016-07-13 2021-04-13 Ams Trace Metals, Inc. Techniques for toxic metal detection and speciation in aqueous matrices
US20190219539A1 (en) * 2017-12-21 2019-07-18 Southern Research Institute Continuous Monitoring of Selenium in Water
US10590560B1 (en) 2018-08-22 2020-03-17 Eci Technology, Inc. Control of additive turnover in an electrodeposition solution
US11022593B2 (en) 2018-10-25 2021-06-01 Savannah River Nuclear Solutions, Llc Solid phase sampling device and methods for point-source sampling of polar organic analytes
KR102542740B1 (ko) * 2022-04-01 2023-06-14 주식회사 위드텍 멀티 샘플루프가 구비되는 웨이퍼 표면 오염물 샘플링 장치 및 이를 이용한 웨이퍼 샘플링 방법

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2524611B2 (de) * 1975-06-03 1977-07-14 Vorrichtung zum selbsttaetigen ermitteln der groesse einer spezifischen komponente einer mehrere stoffkomponenten aufweisenden probefluessigkeit eines metallabscheidenden bades
US4132605A (en) 1976-12-27 1979-01-02 Rockwell International Corporation Method for evaluating the quality of electroplating baths
US4326940A (en) * 1979-05-21 1982-04-27 Rohco Incorporated Automatic analyzer and control system for electroplating baths
US4324621A (en) 1979-12-26 1982-04-13 Cominco Ltd. Method and apparatus for controlling the quality of electrolytes
US4479852A (en) 1983-01-21 1984-10-30 International Business Machines Corporation Method for determination of concentration of organic additive in plating bath
JPS6113153A (ja) * 1984-06-29 1986-01-21 Hitachi Ltd 自動滴定装置
EP0172933A1 (en) * 1984-08-29 1986-03-05 Rigaku Industrial Corporation Fluorescent X-ray analyzing method of solution specimen
JPS61199069A (ja) 1985-02-28 1986-09-03 C Uyemura & Co Ltd めっき液濃度自動連続管理装置
US4917777A (en) 1986-04-24 1990-04-17 Shipley Company Inc. Method for analyzing additive concentration
US5012052A (en) 1988-03-22 1991-04-30 Indiana University Foundation Isotope-ratio-monitoring gas chromatography-mass spectrometry apparatus and method
US5192403A (en) 1991-05-16 1993-03-09 International Business Machines Corporation Cyclic voltammetric method for the measurement of concentrations of subcomponents of plating solution additive mixtures
EP0540035A3 (en) * 1991-10-31 1993-12-01 Hughes Aircraft Co Sensor for monitoring solutes in a liquid stream
US5414259A (en) 1994-01-05 1995-05-09 Duquesne University Of The Holy Ghost Method of speciated isotope dilution mass spectrometry
GB9417700D0 (en) 1994-09-02 1994-10-19 Fisons Plc Apparatus and method for isotopic ratio plasma mass spectrometry
FR2726654B1 (fr) * 1994-11-04 1996-11-29 Commissariat Energie Atomique Module fluidique pour dispositif d'analyse automatique
DE19540527A1 (de) * 1995-10-31 1997-05-07 Hewlett Packard Gmbh Vorrichtung zur Erkennung austauschbarer Teile in analytischen Meßgeräten
US5696378A (en) 1996-03-20 1997-12-09 Baylor University High accuracy determination of chlorine content by isotope dilution flame infrared emission spectrometry (ID-FIRE)
US5703360A (en) 1996-08-30 1997-12-30 Hewlett-Packard Company Automated calibrant system for use in a liquid separation/mass spectrometry apparatus
US5777214A (en) * 1996-09-12 1998-07-07 Lockheed Martin Energy Research Corporation In-situ continuous water analyzing module
US5872357A (en) 1997-05-30 1999-02-16 Hewlett-Packard Company Mass spectrometry calibration using homogeneously substituted fluorinated triazatriphosphorines
US6032513A (en) 1997-06-30 2000-03-07 Texas Instruments Incorporated Apparatus and method for measuring contaminants in semiconductor processing chemicals
US5983734A (en) * 1997-07-21 1999-11-16 Medica Corporation Modular automated diagnostic analysis apparatus with a self cleaning sample input port, an improved fluid selection port, and an improved reagent pack
US6113769A (en) * 1997-11-21 2000-09-05 International Business Machines Corporation Apparatus to monitor and add plating solution of plating baths and controlling quality of deposited metal
US6790673B1 (en) * 1998-01-29 2004-09-14 Duquesne University Of The Holy Ghost Speciated isotope dilution mass spectrometry of reactive species and related methods
JP2000131310A (ja) * 1998-10-28 2000-05-12 Hitachi Ltd 水質計の自己診断機能
US6280602B1 (en) 1999-10-20 2001-08-28 Advanced Technology Materials, Inc. Method and apparatus for determination of additives in metal plating baths
JP2001296305A (ja) * 2000-04-18 2001-10-26 Ebara Udylite Kk 試料溶液の自動分析装置および自動分析方法
US6726824B1 (en) * 2001-04-11 2004-04-27 Novellus Systems, Inc. Closed loop monitoring of electroplating bath constituents using mass spectrometry

Also Published As

Publication number Publication date
WO2003076905A1 (en) 2003-09-18
KR20040104501A (ko) 2004-12-10
US7531134B1 (en) 2009-05-12
JP2005520131A (ja) 2005-07-07
AU2003217928A1 (en) 2003-09-22
EP1490663A1 (en) 2004-12-29

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