IL160890A0 - Textured-grain-powder metallurgy tantalum sputter target - Google Patents
Textured-grain-powder metallurgy tantalum sputter targetInfo
- Publication number
- IL160890A0 IL160890A0 IL16089002A IL16089002A IL160890A0 IL 160890 A0 IL160890 A0 IL 160890A0 IL 16089002 A IL16089002 A IL 16089002A IL 16089002 A IL16089002 A IL 16089002A IL 160890 A0 IL160890 A0 IL 160890A0
- Authority
- IL
- Israel
- Prior art keywords
- textured
- grain
- powder metallurgy
- sputter target
- tantalum sputter
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C27/00—Alloys based on rhenium or a refractory metal not mentioned in groups C22C14/00 or C22C16/00
- C22C27/02—Alloys based on vanadium, niobium, or tantalum
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/02—Compacting only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/24—After-treatment of workpieces or articles
- B22F2003/248—Thermal after-treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
- B22F2998/10—Processes characterised by the sequence of their steps
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/955,348 US6770154B2 (en) | 2001-09-18 | 2001-09-18 | Textured-grain-powder metallurgy tantalum sputter target |
PCT/US2002/026480 WO2003025238A1 (en) | 2001-09-18 | 2002-08-21 | Textured-grain-powder metallurgy tantalum sputter target |
Publications (1)
Publication Number | Publication Date |
---|---|
IL160890A0 true IL160890A0 (en) | 2004-08-31 |
Family
ID=25496703
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL16089002A IL160890A0 (en) | 2001-09-18 | 2002-08-21 | Textured-grain-powder metallurgy tantalum sputter target |
IL160890A IL160890A (en) | 2001-09-18 | 2004-03-15 | Target for the sputtering of Tantalum's embroidered grain powder metallurgy |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL160890A IL160890A (en) | 2001-09-18 | 2004-03-15 | Target for the sputtering of Tantalum's embroidered grain powder metallurgy |
Country Status (7)
Country | Link |
---|---|
US (1) | US6770154B2 (ko) |
EP (1) | EP1427865A4 (ko) |
JP (1) | JP4833515B2 (ko) |
KR (1) | KR100903892B1 (ko) |
IL (2) | IL160890A0 (ko) |
TW (1) | TWI224147B (ko) |
WO (1) | WO2003025238A1 (ko) |
Families Citing this family (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7081148B2 (en) * | 2001-09-18 | 2006-07-25 | Praxair S.T. Technology, Inc. | Textured-grain-powder metallurgy tantalum sputter target |
JP4883546B2 (ja) * | 2002-09-20 | 2012-02-22 | Jx日鉱日石金属株式会社 | タンタルスパッタリングターゲットの製造方法 |
JP4263900B2 (ja) * | 2002-11-13 | 2009-05-13 | 日鉱金属株式会社 | Taスパッタリングターゲット及びその製造方法 |
WO2004090193A1 (ja) * | 2003-04-01 | 2004-10-21 | Nikko Materials Co., Ltd. | タンタルスパッタリングターゲット及びその製造方法 |
US7228722B2 (en) * | 2003-06-09 | 2007-06-12 | Cabot Corporation | Method of forming sputtering articles by multidirectional deformation |
JP2007523993A (ja) * | 2003-06-20 | 2007-08-23 | キャボット コーポレイション | スパッタターゲットをバッキングプレートに結合させるための方法及び設計 |
CN101857950B (zh) * | 2003-11-06 | 2012-08-08 | Jx日矿日石金属株式会社 | 钽溅射靶 |
WO2005071135A2 (en) * | 2004-01-08 | 2005-08-04 | Cabot Corporation | Tantalum and other metals with (110) orientation |
US20080271305A1 (en) * | 2005-01-19 | 2008-11-06 | Tosoh Smd Etna, Llc | Automated Sputtering Target Production |
US7998287B2 (en) | 2005-02-10 | 2011-08-16 | Cabot Corporation | Tantalum sputtering target and method of fabrication |
WO2006117949A1 (ja) * | 2005-04-28 | 2006-11-09 | Nippon Mining & Metals Co., Ltd. | スパッタリングターゲット |
BRPI0611451A2 (pt) * | 2005-05-05 | 2010-09-08 | Starck H C Gmbh | processo de revestimento para fabricação ou reprocessamento de alvos de metalização e anodos de raios x |
WO2006117144A1 (en) | 2005-05-05 | 2006-11-09 | H.C. Starck Gmbh | Method for coating a substrate surface and coated product |
EP1931812B1 (en) | 2005-09-12 | 2018-10-24 | Board of Regents of the Nevada System of Higher Education, on behalf of The University of Nevada, Reno | Targets for laser high-energy physics |
EP1942204B1 (en) * | 2005-10-04 | 2012-04-25 | JX Nippon Mining & Metals Corporation | Sputtering target |
US20080078268A1 (en) * | 2006-10-03 | 2008-04-03 | H.C. Starck Inc. | Process for preparing metal powders having low oxygen content, powders so-produced and uses thereof |
US20080110746A1 (en) * | 2006-11-09 | 2008-05-15 | Kardokus Janine K | Novel manufacturing design and processing methods and apparatus for sputtering targets |
US20080145688A1 (en) | 2006-12-13 | 2008-06-19 | H.C. Starck Inc. | Method of joining tantalum clade steel structures |
WO2008134516A2 (en) * | 2007-04-27 | 2008-11-06 | Honeywell International Inc. | Novel manufacturing design and processing methods and apparatus for sputtering targets |
US8197894B2 (en) | 2007-05-04 | 2012-06-12 | H.C. Starck Gmbh | Methods of forming sputtering targets |
US8250895B2 (en) * | 2007-08-06 | 2012-08-28 | H.C. Starck Inc. | Methods and apparatus for controlling texture of plates and sheets by tilt rolling |
KR101201577B1 (ko) | 2007-08-06 | 2012-11-14 | 에이치. 씨. 스타아크 아이앤씨 | 향상된 조직 균일성을 가진 내화 금속판 |
US20110104480A1 (en) | 2008-02-19 | 2011-05-05 | Steven Malekos | Targets and processes for fabricating same |
WO2009107763A1 (ja) * | 2008-02-29 | 2009-09-03 | 新日鉄マテリアルズ株式会社 | 金属系スパッタリングターゲット材 |
US8246903B2 (en) | 2008-09-09 | 2012-08-21 | H.C. Starck Inc. | Dynamic dehydriding of refractory metal powders |
US8043655B2 (en) * | 2008-10-06 | 2011-10-25 | H.C. Starck, Inc. | Low-energy method of manufacturing bulk metallic structures with submicron grain sizes |
JP5144760B2 (ja) | 2009-05-22 | 2013-02-13 | Jx日鉱日石金属株式会社 | タンタルスパッタリングターゲット |
EP2465968A4 (en) | 2009-08-11 | 2014-04-30 | Jx Nippon Mining & Metals Corp | TANTALE SPRAY TARGET |
US8703233B2 (en) | 2011-09-29 | 2014-04-22 | H.C. Starck Inc. | Methods of manufacturing large-area sputtering targets by cold spray |
SG2014009997A (en) * | 2011-11-30 | 2014-04-28 | Jx Nippon Mining & Metals Corp | Tantalum sputtering target and method for manufacturing same |
US9859104B2 (en) | 2013-03-04 | 2018-01-02 | Jx Nippon Mining & Metals Corporation | Tantalum sputtering target and production method therefor |
WO2015157421A1 (en) | 2014-04-11 | 2015-10-15 | H.C. Starck Inc. | High purity refractory metal sputtering targets which have a uniform random texture manufactured by hot isostatic pressing high purity refractory metal powders |
US11062889B2 (en) | 2017-06-26 | 2021-07-13 | Tosoh Smd, Inc. | Method of production of uniform metal plates and sputtering targets made thereby |
JP7448955B2 (ja) | 2018-03-05 | 2024-03-13 | グローバル アドバンスト メタルズ ユー.エス.エー.,インコーポレイティド | 球状タンタル粉末、それを含有する製品、及びその作製方法 |
EP3746238A1 (en) | 2018-03-05 | 2020-12-09 | Global Advanced Metals USA, Inc. | Anodes containing spherical powder and capacitors |
US11289276B2 (en) | 2018-10-30 | 2022-03-29 | Global Advanced Metals Japan K.K. | Porous metal foil and capacitor anodes made therefrom and methods of making same |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3335037A (en) | 1963-12-27 | 1967-08-08 | Gen Electric | Method for producing tantalum sheet |
US3497402A (en) | 1966-02-03 | 1970-02-24 | Nat Res Corp | Stabilized grain-size tantalum alloy |
US5590389A (en) * | 1994-12-23 | 1996-12-31 | Johnson Matthey Electronics, Inc. | Sputtering target with ultra-fine, oriented grains and method of making same |
US6348139B1 (en) | 1998-06-17 | 2002-02-19 | Honeywell International Inc. | Tantalum-comprising articles |
US6193821B1 (en) | 1998-08-19 | 2001-02-27 | Tosoh Smd, Inc. | Fine grain tantalum sputtering target and fabrication process |
US6348113B1 (en) * | 1998-11-25 | 2002-02-19 | Cabot Corporation | High purity tantalum, products containing the same, and methods of making the same |
JP2001020065A (ja) * | 1999-07-07 | 2001-01-23 | Hitachi Metals Ltd | スパッタリング用ターゲット及びその製造方法ならびに高融点金属粉末材料 |
US6165413A (en) * | 1999-07-08 | 2000-12-26 | Praxair S.T. Technology, Inc. | Method of making high density sputtering targets |
US6261337B1 (en) | 1999-08-19 | 2001-07-17 | Prabhat Kumar | Low oxygen refractory metal powder for powder metallurgy |
US6331233B1 (en) | 2000-02-02 | 2001-12-18 | Honeywell International Inc. | Tantalum sputtering target with fine grains and uniform texture and method of manufacture |
-
2001
- 2001-09-18 US US09/955,348 patent/US6770154B2/en not_active Expired - Lifetime
-
2002
- 2002-08-21 IL IL16089002A patent/IL160890A0/xx active IP Right Grant
- 2002-08-21 KR KR1020047003959A patent/KR100903892B1/ko active IP Right Grant
- 2002-08-21 EP EP02773225A patent/EP1427865A4/en not_active Ceased
- 2002-08-21 JP JP2003530008A patent/JP4833515B2/ja not_active Expired - Lifetime
- 2002-08-21 WO PCT/US2002/026480 patent/WO2003025238A1/en active Application Filing
- 2002-09-17 TW TW091121246A patent/TWI224147B/zh not_active IP Right Cessation
-
2004
- 2004-03-15 IL IL160890A patent/IL160890A/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR100903892B1 (ko) | 2009-06-19 |
IL160890A (en) | 2007-03-08 |
TWI224147B (en) | 2004-11-21 |
WO2003025238A1 (en) | 2003-03-27 |
KR20040029485A (ko) | 2004-04-06 |
JP4833515B2 (ja) | 2011-12-07 |
EP1427865A4 (en) | 2005-09-14 |
EP1427865A1 (en) | 2004-06-16 |
JP2005503482A (ja) | 2005-02-03 |
US20030089429A1 (en) | 2003-05-15 |
US6770154B2 (en) | 2004-08-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FF | Patent granted | ||
KB | Patent renewed | ||
KB | Patent renewed |