AU2002368353A1 - Die cast sputter targets - Google Patents

Die cast sputter targets

Info

Publication number
AU2002368353A1
AU2002368353A1 AU2002368353A AU2002368353A AU2002368353A1 AU 2002368353 A1 AU2002368353 A1 AU 2002368353A1 AU 2002368353 A AU2002368353 A AU 2002368353A AU 2002368353 A AU2002368353 A AU 2002368353A AU 2002368353 A1 AU2002368353 A1 AU 2002368353A1
Authority
AU
Australia
Prior art keywords
die cast
sputter targets
sputter
targets
cast
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002368353A
Inventor
Michael Thomas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
Honeywell International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Publication of AU2002368353A1 publication Critical patent/AU2002368353A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D27/00—Treating the metal in the mould while it is molten or ductile ; Pressure or vacuum casting
    • B22D27/04—Influencing the temperature of the metal, e.g. by heating or cooling the mould
    • B22D27/045—Directionally solidified castings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D25/00—Special casting characterised by the nature of the product
    • B22D25/02—Special casting characterised by the nature of the product by its peculiarity of shape; of works of art
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
AU2002368353A 2002-11-07 2002-11-07 Die cast sputter targets Abandoned AU2002368353A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2002/036069 WO2004043631A1 (en) 2002-11-07 2002-11-07 Die cast sputter targets

Publications (1)

Publication Number Publication Date
AU2002368353A1 true AU2002368353A1 (en) 2004-06-03

Family

ID=32311648

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002368353A Abandoned AU2002368353A1 (en) 2002-11-07 2002-11-07 Die cast sputter targets

Country Status (3)

Country Link
AU (1) AU2002368353A1 (en)
TW (1) TW200407445A (en)
WO (1) WO2004043631A1 (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3555844B2 (en) 1999-04-09 2004-08-18 三宅 正二郎 Sliding member and manufacturing method thereof
US6969198B2 (en) 2002-11-06 2005-11-29 Nissan Motor Co., Ltd. Low-friction sliding mechanism
JP4863152B2 (en) 2003-07-31 2012-01-25 日産自動車株式会社 gear
KR101003865B1 (en) 2003-08-06 2010-12-30 닛산 지도우샤 가부시키가이샤 Low-Friction Sliding Mechanism, Low-Friction Agent Composition and Method of Friction Reduction
JP4973971B2 (en) 2003-08-08 2012-07-11 日産自動車株式会社 Sliding member
US7771821B2 (en) 2003-08-21 2010-08-10 Nissan Motor Co., Ltd. Low-friction sliding member and low-friction sliding mechanism using same
EP1508611B1 (en) 2003-08-22 2019-04-17 Nissan Motor Co., Ltd. Transmission comprising low-friction sliding members and transmission oil therefor
EP2287356A1 (en) * 2009-07-31 2011-02-23 Bekaert Advanced Coatings NV. Sputter target, method and apparatus for manufacturing sputter targets
CN101920439B (en) * 2010-08-20 2011-10-26 宁夏东方钽业股份有限公司 Reeling, welding and knurling process for inner and outer surfaces of sputtered tantalum ring
CN101920438B (en) * 2010-08-20 2012-01-11 宁夏东方钽业股份有限公司 Coiling machine continuous knurling technique on inner and outer surfaces of sputtering tantalum ring
CN103814151B (en) 2011-06-27 2016-01-20 梭莱有限公司 PVD target and castmethod thereof
CN112548069B (en) * 2020-11-04 2022-06-03 深圳市众诚达应用材料科技有限公司 Preparation method of aluminum-scandium alloy target material
CN113235058B (en) * 2021-05-07 2022-08-05 先导薄膜材料（广东）有限公司 Preparation method of CoZrTa alloy target blank and target material

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62161452A (en) * 1986-01-10 1987-07-17 Akio Nakano Die casting machine
US6368427B1 (en) * 1999-09-10 2002-04-09 Geoffrey K. Sigworth Method for grain refinement of high strength aluminum casting alloys

Also Published As

Publication number Publication date
WO2004043631A1 (en) 2004-05-27
TW200407445A (en) 2004-05-16

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase