AU2002308618A1 - Recessed sputter target - Google Patents

Recessed sputter target

Info

Publication number
AU2002308618A1
AU2002308618A1 AU2002308618A AU2002308618A AU2002308618A1 AU 2002308618 A1 AU2002308618 A1 AU 2002308618A1 AU 2002308618 A AU2002308618 A AU 2002308618A AU 2002308618 A AU2002308618 A AU 2002308618A AU 2002308618 A1 AU2002308618 A1 AU 2002308618A1
Authority
AU
Australia
Prior art keywords
sputter target
recessed
recessed sputter
target
sputter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002308618A
Inventor
Paul S. Gilman
Thomas J. Hunt
Holger J. Koenigsmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Praxair ST Technology Inc
Original Assignee
Praxair ST Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Praxair ST Technology Inc filed Critical Praxair ST Technology Inc
Publication of AU2002308618A1 publication Critical patent/AU2002308618A1/en
Abandoned legal-status Critical Current

Links

AU2002308618A 2001-05-30 2002-05-08 Recessed sputter target Abandoned AU2002308618A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/870,164 2001-05-30

Publications (1)

Publication Number Publication Date
AU2002308618A1 true AU2002308618A1 (en) 2002-12-16

Family

ID=

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