IL145136A0 - Multiple plate tip or sample scanning reconfigurable scanning probe microscope with transparent interfacing of far-field optical microscopes - Google Patents

Multiple plate tip or sample scanning reconfigurable scanning probe microscope with transparent interfacing of far-field optical microscopes

Info

Publication number
IL145136A0
IL145136A0 IL14513601A IL14513601A IL145136A0 IL 145136 A0 IL145136 A0 IL 145136A0 IL 14513601 A IL14513601 A IL 14513601A IL 14513601 A IL14513601 A IL 14513601A IL 145136 A0 IL145136 A0 IL 145136A0
Authority
IL
Israel
Prior art keywords
scanning
far
probe microscope
reconfigurable
field optical
Prior art date
Application number
IL14513601A
Other languages
English (en)
Inventor
Aaron Lewis
Anatoly Komissar
Alexander Ratner
Hesham Taha
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to IL14513601A priority Critical patent/IL145136A0/xx
Publication of IL145136A0 publication Critical patent/IL145136A0/xx
Priority to PCT/US2002/025947 priority patent/WO2003019238A2/fr
Priority to JP2003524047A priority patent/JP2005530125A/ja
Priority to EP02763453A priority patent/EP1427983A4/fr
Priority to AU2002327461A priority patent/AU2002327461A1/en
Priority to US10/487,391 priority patent/US7047796B2/en
Priority to JP2011016791A priority patent/JP2011107157A/ja

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02Probe holders
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00Methods or apparatus for measurement or analysis of nanostructures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00Monitoring the movement or position of the probe
    • G01Q20/02Monitoring the movement or position of the probe by optical means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/02Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
    • G01Q30/025Optical microscopes coupled with SPM
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/08Means for establishing or regulating a desired environmental condition within a sample chamber
    • G01Q30/10Thermal environment
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38Probes, their manufacture, or their related instrumentation, e.g. holders

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
IL14513601A 2001-08-27 2001-08-27 Multiple plate tip or sample scanning reconfigurable scanning probe microscope with transparent interfacing of far-field optical microscopes IL145136A0 (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
IL14513601A IL145136A0 (en) 2001-08-27 2001-08-27 Multiple plate tip or sample scanning reconfigurable scanning probe microscope with transparent interfacing of far-field optical microscopes
PCT/US2002/025947 WO2003019238A2 (fr) 2001-08-27 2002-08-27 Microscope-sonde a balayage reconfigurable pour balayage d'echantillon ou de pointe a plaques multiples, a interfacage transparent de microscopes optiques a champ lointain
JP2003524047A JP2005530125A (ja) 2001-08-27 2002-08-27 遠方領域の光学顕微鏡の透明インタフェイスを備えた複数プレートのチップまたはサンプルをスキャンする再現可能なスキャンプローブ顕微鏡
EP02763453A EP1427983A4 (fr) 2001-08-27 2002-08-27 Microscope-sonde a balayage reconfigurable pour balayage d'echantillon ou de pointe a plaques multiples, a interfacage transparent de microscopes optiques a champ lointain
AU2002327461A AU2002327461A1 (en) 2001-08-27 2002-08-27 Multiple plate tip or sample scanning reconfigurable scanned probe microscope with transparent interfacing of far-field optical microscopes
US10/487,391 US7047796B2 (en) 2001-08-27 2002-08-27 Multiple plate tip or sample scanning reconfigurable scanned probe microscope with transparent interfacing of far-field optical microscopes
JP2011016791A JP2011107157A (ja) 2001-08-27 2011-01-28 遠方領域の光学顕微鏡の透明インタフェイスを備えた複数プレートのチップまたはサンプルをスキャンする再現可能なスキャンプローブ顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IL14513601A IL145136A0 (en) 2001-08-27 2001-08-27 Multiple plate tip or sample scanning reconfigurable scanning probe microscope with transparent interfacing of far-field optical microscopes

Publications (1)

Publication Number Publication Date
IL145136A0 true IL145136A0 (en) 2002-06-30

Family

ID=11075740

Family Applications (1)

Application Number Title Priority Date Filing Date
IL14513601A IL145136A0 (en) 2001-08-27 2001-08-27 Multiple plate tip or sample scanning reconfigurable scanning probe microscope with transparent interfacing of far-field optical microscopes

Country Status (6)

Country Link
US (1) US7047796B2 (fr)
EP (1) EP1427983A4 (fr)
JP (2) JP2005530125A (fr)
AU (1) AU2002327461A1 (fr)
IL (1) IL145136A0 (fr)
WO (1) WO2003019238A2 (fr)

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AU2003290531A1 (en) 2002-10-21 2004-05-13 Nanoink, Inc. Nanometer-scale engineered structures, methods and apparatus for fabrication thereof, and applications to mask repair, enhancement, and fabrication
DE112005002510A5 (de) * 2004-08-05 2007-07-12 Jpk Instruments Ag Vorrichtung zum Aufnehmen einer Messprobe
JP4323412B2 (ja) * 2004-11-02 2009-09-02 株式会社ミツトヨ 表面性状測定用探針およびこれを用いた顕微鏡
GB2443674B (en) * 2006-10-04 2008-11-26 Oxford Instr Superconductivity Flow-cooled magnet system
US7692138B1 (en) 2006-10-23 2010-04-06 David James Ray Integrated scanning probe microscope and confocal microscope
US7842920B2 (en) 2006-12-14 2010-11-30 Dcg Systems, Inc. Methods and systems of performing device failure analysis, electrical characterization and physical characterization
US8720256B2 (en) * 2007-02-20 2014-05-13 Wayne Allen Bonin Off-axis imaging for indentation instruments
WO2008131416A1 (fr) * 2007-04-24 2008-10-30 The University Of Akron Procédé et appareil de réalisation d'une microscopie optique à balayage en champ proche sans ouverture
IL197329A0 (en) * 2009-03-01 2009-12-24 David Lewis A scanned probe microscope without interference or geometric constraint for single or multiple probe operation in air or liquid
FR2955938B1 (fr) 2010-01-29 2012-08-03 Commissariat Energie Atomique Dispositif electronique de pilotage et d'amplification pour une sonde locale piezoelectrique de mesure de force sous un faisceau de particules
CN103616532B (zh) * 2013-11-06 2015-10-28 中国科学技术大学 低回差高重复扫描探针显微镜独立扫描器
KR101675489B1 (ko) 2014-12-24 2016-11-14 한국표준과학연구원 헤드 일체형 원자간력 현미경 및 이를 포함한 융합 현미경
EP3262426A1 (fr) 2015-02-26 2018-01-03 Xallent, LLC Microscope à sonde de balayage à multiples pointes intégrées
CN116699180A (zh) 2015-02-26 2023-09-05 沙朗特有限责任公司 用于制造纳电子机械系统探针的系统和方法
CN104749160B (zh) * 2015-03-06 2017-09-12 华南师范大学 一种并列双针尖增强的拉曼光谱扫描成像方法
WO2017156245A1 (fr) 2016-03-09 2017-09-14 Xallent, LLC Puce de sonde fonctionnelle
WO2018089022A1 (fr) * 2016-11-11 2018-05-17 Aaron Lewis Amélioration de signaux optiques à l'aide de pointes de sonde optimisées pour des caractéristiques optiques et de potentiel chimique
WO2018187525A1 (fr) 2017-04-06 2018-10-11 Kwame Amponsah Dispositifs nanoélectromécaniques à contacts métal-métal
US10663484B2 (en) 2018-02-14 2020-05-26 Xallent, LLC Multiple integrated tips scanning probe microscope with pre-alignment components

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Also Published As

Publication number Publication date
WO2003019238A3 (fr) 2003-10-09
US20040216518A1 (en) 2004-11-04
AU2002327461A1 (en) 2003-03-10
WO2003019238A2 (fr) 2003-03-06
JP2005530125A (ja) 2005-10-06
EP1427983A2 (fr) 2004-06-16
EP1427983A4 (fr) 2008-01-23
JP2011107157A (ja) 2011-06-02
US7047796B2 (en) 2006-05-23

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