IL137607A0 - Crystal ion-slicing of single-crystal films - Google Patents

Crystal ion-slicing of single-crystal films

Info

Publication number
IL137607A0
IL137607A0 IL13760799A IL13760799A IL137607A0 IL 137607 A0 IL137607 A0 IL 137607A0 IL 13760799 A IL13760799 A IL 13760799A IL 13760799 A IL13760799 A IL 13760799A IL 137607 A0 IL137607 A0 IL 137607A0
Authority
IL
Israel
Prior art keywords
crystal
crystal structure
slicing
ion
films
Prior art date
Application number
IL13760799A
Other languages
English (en)
Original Assignee
Univ Columbia
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Columbia filed Critical Univ Columbia
Publication of IL137607A0 publication Critical patent/IL137607A0/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
    • H01L21/76254—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/60—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
    • H01L21/2003—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy characterised by the substrate
    • H01L21/2007—Bonding of semiconductor wafers to insulating substrates or to semiconducting substrates using an intermediate insulating layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/30604—Chemical etching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/915—Separating from substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Element Separation (AREA)
  • Weting (AREA)
IL13760799A 1998-02-17 1999-02-08 Crystal ion-slicing of single-crystal films IL137607A0 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/025,114 US6120597A (en) 1998-02-17 1998-02-17 Crystal ion-slicing of single-crystal films
PCT/US1999/002625 WO1999041779A1 (en) 1998-02-17 1999-02-08 Crystal ion-slicing of single-crystal films

Publications (1)

Publication Number Publication Date
IL137607A0 true IL137607A0 (en) 2001-07-24

Family

ID=21824125

Family Applications (1)

Application Number Title Priority Date Filing Date
IL13760799A IL137607A0 (en) 1998-02-17 1999-02-08 Crystal ion-slicing of single-crystal films

Country Status (11)

Country Link
US (1) US6120597A (xx)
EP (1) EP1060509B1 (xx)
JP (1) JP2002503885A (xx)
KR (1) KR100552448B1 (xx)
CN (1) CN1158702C (xx)
AT (1) ATE305171T1 (xx)
AU (1) AU2590699A (xx)
CA (1) CA2320218C (xx)
DE (1) DE69927360T2 (xx)
IL (1) IL137607A0 (xx)
WO (1) WO1999041779A1 (xx)

Families Citing this family (66)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6146979A (en) 1997-05-12 2000-11-14 Silicon Genesis Corporation Pressurized microbubble thin film separation process using a reusable substrate
US6033974A (en) 1997-05-12 2000-03-07 Silicon Genesis Corporation Method for controlled cleaving process
US20070122997A1 (en) 1998-02-19 2007-05-31 Silicon Genesis Corporation Controlled process and resulting device
US6548382B1 (en) 1997-07-18 2003-04-15 Silicon Genesis Corporation Gettering technique for wafers made using a controlled cleaving process
US6641662B2 (en) * 1998-02-17 2003-11-04 The Trustees Of Columbia University In The City Of New York Method for fabricating ultra thin single-crystal metal oxide wave retarder plates and waveguide polarization mode converter using the same
US6540827B1 (en) * 1998-02-17 2003-04-01 Trustees Of Columbia University In The City Of New York Slicing of single-crystal films using ion implantation
US6503321B2 (en) * 1998-02-17 2003-01-07 The Trustees Of Columbia University In The City Of New York Slicing of single-crystal films using ion implantation
US6582513B1 (en) * 1998-05-15 2003-06-24 Apollo Diamond, Inc. System and method for producing synthetic diamond
US6858080B2 (en) * 1998-05-15 2005-02-22 Apollo Diamond, Inc. Tunable CVD diamond structures
IT1305829B1 (it) * 1998-06-05 2001-05-16 St Microelectronics Srl Recupero del danneggiamento dell'ossido di campo causato da processidi impiantazione ionica ad alta energia e procedimenti di
JP3619058B2 (ja) * 1998-06-18 2005-02-09 キヤノン株式会社 半導体薄膜の製造方法
US6555443B1 (en) * 1998-11-11 2003-04-29 Robert Bosch Gmbh Method for production of a thin film and a thin-film solar cell, in particular, on a carrier substrate
US6211095B1 (en) * 1998-12-23 2001-04-03 Agilent Technologies, Inc. Method for relieving lattice mismatch stress in semiconductor devices
US6263941B1 (en) 1999-08-10 2001-07-24 Silicon Genesis Corporation Nozzle for cleaving substrates
US6500732B1 (en) 1999-08-10 2002-12-31 Silicon Genesis Corporation Cleaving process to fabricate multilayered substrates using low implantation doses
US6544862B1 (en) 2000-01-14 2003-04-08 Silicon Genesis Corporation Particle distribution method and resulting structure for a layer transfer process
AU2001253032A1 (en) * 2000-03-31 2001-10-15 The Trustees Of Columbia University In The City Of New York Method for fabricating ultra thin single-crystal metal oxide wave retarder plates and a waveguide polarization mode converter using the same
FR2807074B1 (fr) * 2000-04-03 2002-12-06 Soitec Silicon On Insulator Procede et dispositif de fabrication de substrats
US6600173B2 (en) 2000-08-30 2003-07-29 Cornell Research Foundation, Inc. Low temperature semiconductor layering and three-dimensional electronic circuits using the layering
US6436614B1 (en) 2000-10-20 2002-08-20 Feng Zhou Method for the formation of a thin optical crystal layer overlying a low dielectric constant substrate
US6544431B2 (en) * 2001-01-16 2003-04-08 Triquint Technology Holding Co. Thin film lithium niobate structure and method of making the same
US6699770B2 (en) * 2001-03-01 2004-03-02 John Tarje Torvik Method of making a hybride substrate having a thin silicon carbide membrane layer
US6600843B2 (en) 2001-03-13 2003-07-29 Srico, Inc. Optical modulator
JP4775680B2 (ja) * 2001-05-16 2011-09-21 信越半導体株式会社 シリコン結晶中の結晶欠陥観察用試料作製方法及び薄片試料
DE10128630A1 (de) * 2001-06-13 2003-01-02 Freiberger Compound Mat Gmbh Vorrichtung und Verfahren zur Bestimmung der Orientierung einer kristallografischen Ebene relativ zu einer Kristalloberfläche sowie Vorrichtung und Verfahren zum Trennen eines Einkristalls in einer Trennmaschine
JP4653374B2 (ja) * 2001-08-23 2011-03-16 セイコーエプソン株式会社 電気光学装置の製造方法
US6800519B2 (en) * 2001-09-27 2004-10-05 Kabushiki Kaisha Toshiba Semiconductor device and method of manufacturing the same
US6607969B1 (en) 2002-03-18 2003-08-19 The United States Of America As Represented By The Secretary Of The Navy Method for making pyroelectric, electro-optical and decoupling capacitors using thin film transfer and hydrogen ion splitting techniques
US6767749B2 (en) 2002-04-22 2004-07-27 The United States Of America As Represented By The Secretary Of The Navy Method for making piezoelectric resonator and surface acoustic wave device using hydrogen implant layer splitting
US6885781B2 (en) * 2002-05-03 2005-04-26 Fujitsu Limited Thin film electro-optical deflector device and a method of fabrication of such a device
FR2842650B1 (fr) 2002-07-17 2005-09-02 Soitec Silicon On Insulator Procede de fabrication de substrats notamment pour l'optique, l'electronique ou l'opto-electronique
EP1537258B9 (en) * 2002-07-17 2008-10-29 S.O.I.Tec Silicon on Insulator Technologies Method of fabricating substrates, in particular for optics, electronics or optoelectronics----------------------------------------
US8187377B2 (en) 2002-10-04 2012-05-29 Silicon Genesis Corporation Non-contact etch annealing of strained layers
EP1484794A1 (en) * 2003-06-06 2004-12-08 S.O.I. Tec Silicon on Insulator Technologies S.A. A method for fabricating a carrier substrate
FR2861497B1 (fr) * 2003-10-28 2006-02-10 Soitec Silicon On Insulator Procede de transfert catastrophique d'une couche fine apres co-implantation
WO2005080645A2 (en) * 2004-02-13 2005-09-01 Apollo Diamond, Inc. Diamond structure separation
TW200706697A (en) * 2005-04-13 2007-02-16 Univ California Etching technique for the fabrication of thin (Al, In, Ga)N layers
US20080267557A1 (en) * 2005-12-29 2008-10-30 Zheng Wang Integrated Magneto-Optical Devices for Uni-Directional Optical Resonator Systems
WO2007087354A2 (en) * 2006-01-24 2007-08-02 Baer Stephen C Cleaving wafers from silicon crystals
FR2899378B1 (fr) * 2006-03-29 2008-06-27 Commissariat Energie Atomique Procede de detachement d'un film mince par fusion de precipites
US7811900B2 (en) 2006-09-08 2010-10-12 Silicon Genesis Corporation Method and structure for fabricating solar cells using a thick layer transfer process
US8293619B2 (en) 2008-08-28 2012-10-23 Silicon Genesis Corporation Layer transfer of films utilizing controlled propagation
US8993410B2 (en) 2006-09-08 2015-03-31 Silicon Genesis Corporation Substrate cleaving under controlled stress conditions
US9362439B2 (en) 2008-05-07 2016-06-07 Silicon Genesis Corporation Layer transfer of films utilizing controlled shear region
EP2109883A1 (en) * 2007-02-08 2009-10-21 S.O.I.T.E.C. Silicon on Insulator Technologies Method of fabrication of highly heat dissipative substrates
FR2924272B1 (fr) * 2007-11-28 2010-06-11 Commissariat Energie Atomique Procede de transfert de films
FR2930072B1 (fr) * 2008-04-15 2010-08-20 Commissariat Energie Atomique Procede de transfert d'une couche mince par echange protonique.
US8330126B2 (en) 2008-08-25 2012-12-11 Silicon Genesis Corporation Race track configuration and method for wafering silicon solar substrates
JP4636292B2 (ja) 2008-08-27 2011-02-23 株式会社村田製作所 電子部品及び電子部品の製造方法
JP2010114409A (ja) * 2008-10-10 2010-05-20 Sony Corp Ｓｏｉ基板とその製造方法、固体撮像装置とその製造方法、および撮像装置
JP4821834B2 (ja) 2008-10-31 2011-11-24 株式会社村田製作所 圧電性複合基板の製造方法
US8329557B2 (en) 2009-05-13 2012-12-11 Silicon Genesis Corporation Techniques for forming thin films by implantation with reduced channeling
US9154107B2 (en) 2009-05-28 2015-10-06 Northrop Grumman Systems Corporation Lateral over-moded bulk acoustic resonators
CN102443851B (zh) * 2010-10-13 2014-08-20 济南晶正电子科技有限公司 一种薄膜材料的剥离方法
JP5786393B2 (ja) * 2011-03-18 2015-09-30 株式会社村田製作所 水晶デバイスの製造方法
WO2013147966A2 (en) 2012-01-06 2013-10-03 President And Fellows Of Harvard College Small-scale fabrication systems and methods
CN103696022B (zh) * 2013-12-27 2016-04-13 贵州蓝科睿思技术研发中心 一种离子注入分离蓝宝石的方法
US10573627B2 (en) 2015-01-09 2020-02-25 Silicon Genesis Corporation Three dimensional integrated circuit
CN104630899B (zh) * 2015-01-17 2017-09-22 王宏兴 金刚石层的分离方法
FR3045677B1 (fr) 2015-12-22 2019-07-19 Soitec Procede de fabrication d'une couche monocristalline, notamment piezoelectrique
FR3045678B1 (fr) 2015-12-22 2017-12-22 Soitec Silicon On Insulator Procede de fabrication d'une couche piezoelectrique monocristalline et dispositif microelectronique, photonique ou optique comprenant une telle couche
CN106222754A (zh) * 2016-07-29 2016-12-14 成都立威讯科技有限公司 一种工艺精湛的蓝宝石分离方法
WO2019108945A1 (en) 2017-12-01 2019-06-06 Silicon Genesis Corporation Three dimensional integrated circuit
CN109468683A (zh) * 2018-12-19 2019-03-15 山东建筑大学 一种基于He离子辐照的石榴石晶体薄膜的制备方法
US11410984B1 (en) 2021-10-08 2022-08-09 Silicon Genesis Corporation Three dimensional integrated circuit with lateral connection layer
CN115867107B (zh) * 2023-02-27 2023-12-08 青禾晶元(天津)半导体材料有限公司 一种利用键合技术同步制备两片复合压电衬底的方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4308078A (en) * 1980-06-06 1981-12-29 Cook Melvin S Method of producing single-crystal semiconductor films by laser treatment
US4303463A (en) * 1980-09-29 1981-12-01 Cook Melvin S Method of peeling thin films using directional heat flow
US4601779A (en) * 1985-06-24 1986-07-22 International Business Machines Corporation Method of producing a thin silicon-on-insulator layer
FR2681472B1 (fr) * 1991-09-18 1993-10-29 Commissariat Energie Atomique Procede de fabrication de films minces de materiau semiconducteur.
US5587210A (en) * 1994-06-28 1996-12-24 The United States Of America As Represented By The Secretary Of The Navy Growing and releasing diamonds
US5877070A (en) * 1997-05-31 1999-03-02 Max-Planck Society Method for the transfer of thin layers of monocrystalline material to a desirable substrate

Also Published As

Publication number Publication date
ATE305171T1 (de) 2005-10-15
CN1291349A (zh) 2001-04-11
WO1999041779A1 (en) 1999-08-19
CA2320218A1 (en) 1999-08-19
KR100552448B1 (ko) 2006-02-20
CA2320218C (en) 2009-06-02
DE69927360T2 (de) 2006-06-29
JP2002503885A (ja) 2002-02-05
US6120597A (en) 2000-09-19
EP1060509A1 (en) 2000-12-20
EP1060509B1 (en) 2005-09-21
KR20010034502A (ko) 2001-04-25
AU2590699A (en) 1999-08-30
DE69927360D1 (de) 2006-02-02
CN1158702C (zh) 2004-07-21
EP1060509A4 (en) 2001-05-02

Similar Documents

Publication Publication Date Title
IL137607A0 (en) Crystal ion-slicing of single-crystal films
WO2002006568A3 (en) Slicing of single-crystal films using ion implantation
WO1997045156A3 (en) Tissue heating and ablation systems and methods using porous electrode structures
US7927980B2 (en) Method for forming a detachable substrate including implantation and exfoliation
EP0993048A3 (en) Nitride semiconductor device and its manufacturing method
AU2002222036A1 (en) Method for making a substrate
EP0703605A3 (en) Method for etching semiconductor, method for fabricating semiconductor device, method for fabricating semiconductor laser, and semiconductor laser
EP1408545A3 (en) A method of producing a substrate by transferring a donor wafer comprising foreign species, and an associated donor wafer
EP0977254A3 (en) Hot-melt sheet for holding and protecting semiconductor wafers and method for applying the same
AU2003292305A1 (en) Method for forming a brittle zone in a substrate by co-implantation
WO2003062507A3 (en) Method for manufacturing a free-standing substrate made of monocrystalline semi-conductor material
EP1396877A3 (en) Substrate for electronic devices, manufacturing method therefor, and electronic device
AU2002246910A1 (en) Method and apparatus for electrodeposition or etching of uniform film with minimal edge exclusion on substrate
TW327700B (en) The method for using rough oxide mask to form isolating field oxide
WO1989004548A3 (en) Ion implantation and annealing of compound semiconductor layers
EP0866493A3 (en) Semiconductor substrate having compound semiconductor layer, process for its production, and electronic device fabricated on semiconductor substrate
MY135877A (en) Tungsten doped crucible and method for preparing same
MY128008A (en) Substrate fabrication method and device
WO2004060792A3 (en) Method of forming semiconductor devices through epitaxy
AU2003247130A1 (en) Method of transferring of a layer of strained semiconductor material
US5254494A (en) Method of manufacturing a semiconductor device having field oxide regions formed through oxidation
EP1087427A3 (en) Selective growth process for group III-nitride-based semiconductors
TW429487B (en) Epitaxial wafer, its manufacture method and method for surface cleaning of compound semiconductor substrate
GB2372635B (en) Method of fabricating group-III nitride semiconductor crystals.
WO2004051738A3 (en) Method for the manufacture of a display

Legal Events

Date Code Title Description
FF Patent granted
KB Patent renewed
KB Patent renewed
MM9K Patent not in force due to non-payment of renewal fees