HUE059396T2 - Eljárás félvezetõ-minta jellemzésére állandó felületi potenciálú koronatöltéssel - Google Patents

Eljárás félvezetõ-minta jellemzésére állandó felületi potenciálú koronatöltéssel

Info

Publication number
HUE059396T2
HUE059396T2 HUE16804449A HUE16804449A HUE059396T2 HU E059396 T2 HUE059396 T2 HU E059396T2 HU E16804449 A HUE16804449 A HU E16804449A HU E16804449 A HUE16804449 A HU E16804449A HU E059396 T2 HUE059396 T2 HU E059396T2
Authority
HU
Hungary
Prior art keywords
characterizing
surface potential
corona charging
semiconductor sample
constant surface
Prior art date
Application number
HUE16804449A
Other languages
English (en)
Hungarian (hu)
Inventor
Jacek Lagowski
Marshall Wilson
Alexandre Savtchouk
Carlos Almeida
Csaba Buday
Original Assignee
Semilab Semiconductor Physics Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semilab Semiconductor Physics Laboratory Co Ltd filed Critical Semilab Semiconductor Physics Laboratory Co Ltd
Publication of HUE059396T2 publication Critical patent/HUE059396T2/hu

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
    • G01R29/12—Measuring electrostatic fields or voltage-potential
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/221—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance by investigating the dielectric properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0095—Semiconductive materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
HUE16804449A 2015-06-05 2016-06-02 Eljárás félvezetõ-minta jellemzésére állandó felületi potenciálú koronatöltéssel HUE059396T2 (hu)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US14/731,677 US10969370B2 (en) 2015-06-05 2015-06-05 Measuring semiconductor doping using constant surface potential corona charging

Publications (1)

Publication Number Publication Date
HUE059396T2 true HUE059396T2 (hu) 2022-11-28

Family

ID=57442269

Family Applications (1)

Application Number Title Priority Date Filing Date
HUE16804449A HUE059396T2 (hu) 2015-06-05 2016-06-02 Eljárás félvezetõ-minta jellemzésére állandó felületi potenciálú koronatöltéssel

Country Status (5)

Country Link
US (1) US10969370B2 (enExample)
EP (1) EP3304063B1 (enExample)
JP (1) JP6829253B2 (enExample)
HU (1) HUE059396T2 (enExample)
WO (1) WO2016196813A1 (enExample)

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JP7140148B2 (ja) * 2019-02-27 2022-09-21 株式会社デンソー 炭化珪素半導体装置およびその製造方法
CN117276345A (zh) * 2019-02-27 2023-12-22 株式会社电装 碳化硅半导体装置的制造方法
TWI821750B (zh) * 2020-10-07 2023-11-11 台灣愛司帝科技股份有限公司 電子元件量測設備、電子元件量測方法及發光二極體的製造方法
JP7521407B2 (ja) 2020-12-16 2024-07-24 住友電気工業株式会社 炭化珪素エピタキシャル基板の検査方法、炭化珪素エピタキシャル基板の製造方法および炭化珪素エピタキシャル基板の検査装置
JP7621308B2 (ja) * 2021-05-14 2025-01-24 東京エレクトロン株式会社 プラズマ処理装置およびプラズマ処理方法
US11769698B2 (en) * 2021-07-16 2023-09-26 Taiwan Semiconductor Manufacturing Company Ltd. Method of testing semiconductor package
US12027430B1 (en) * 2023-03-17 2024-07-02 Semilab Semiconductor Physics Laboratory Co., Ltd. Semiconductor doping characterization method using photoneutralization time constant of corona surface charge

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Also Published As

Publication number Publication date
EP3304063B1 (en) 2022-03-30
WO2016196813A1 (en) 2016-12-08
EP3304063A4 (en) 2019-03-20
US20160356750A1 (en) 2016-12-08
EP3304063A1 (en) 2018-04-11
JP2018518063A (ja) 2018-07-05
JP6829253B2 (ja) 2021-02-10
US10969370B2 (en) 2021-04-06

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