HU168264B - - Google Patents

Info

Publication number
HU168264B
HU168264B HUMA002555A HU168264B HU 168264 B HU168264 B HU 168264B HU MA002555 A HUMA002555 A HU MA002555A HU 168264 B HU168264 B HU 168264B
Authority
HU
Hungary
Application number
Other languages
Hungarian (hu)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to HUMA002555 priority Critical patent/HU168264B/hu
Priority to GB1101575A priority patent/GB1504984A/en
Priority to NL7503645A priority patent/NL7503645A/xx
Priority to FR7509487A priority patent/FR2266299B3/fr
Priority to DE19752513832 priority patent/DE2513832C2/de
Priority to JP50037717A priority patent/JPS50141968A/ja
Publication of HU168264B publication Critical patent/HU168264B/hu
Priority to US05/683,832 priority patent/US4071766A/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/20Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2001Maintaining constant desired temperature
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2002Controlling environment of sample
    • H01J2237/2003Environmental cells

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Microscoopes, Condenser (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
HUMA002555 1974-03-28 1974-03-28 HU168264B (en:Method)

Priority Applications (7)

Application Number Priority Date Filing Date Title
HUMA002555 HU168264B (en:Method) 1974-03-28 1974-03-28
GB1101575A GB1504984A (en) 1974-03-28 1975-03-17 Micro-chamber for electron optical examinations
NL7503645A NL7503645A (nl) 1974-03-28 1975-03-26 Micro-kamer voor elektronen-optische onderzoe- kingen, meer in het bijzonder voor het elektro- nenmicroscopisch onderzoek van biologische objecten.
FR7509487A FR2266299B3 (en:Method) 1974-03-28 1975-03-26
DE19752513832 DE2513832C2 (de) 1974-03-28 1975-03-27 Anordnung zur elektronenoptischen Untersuchung von Proben
JP50037717A JPS50141968A (en:Method) 1974-03-28 1975-03-28
US05/683,832 US4071766A (en) 1974-03-28 1976-05-06 Micro-chamber for electron optical examinations particularly for the electron microscopic examination of biological objects

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
HUMA002555 HU168264B (en:Method) 1974-03-28 1974-03-28

Publications (1)

Publication Number Publication Date
HU168264B true HU168264B (en:Method) 1976-03-28

Family

ID=10998701

Family Applications (1)

Application Number Title Priority Date Filing Date
HUMA002555 HU168264B (en:Method) 1974-03-28 1974-03-28

Country Status (6)

Country Link
JP (1) JPS50141968A (en:Method)
DE (1) DE2513832C2 (en:Method)
FR (1) FR2266299B3 (en:Method)
GB (1) GB1504984A (en:Method)
HU (1) HU168264B (en:Method)
NL (1) NL7503645A (en:Method)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2794471B2 (ja) * 1989-11-24 1998-09-03 日本電子テクニクス株式会社 電子顕微鏡
IL150056A0 (en) * 2002-06-05 2002-12-01 Yeda Res & Dev Low-pressure chamber for scanning electron microscopy in a wet environment
DE10256718B4 (de) * 2002-12-04 2004-10-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zur Probenuntersuchung mittels eines atmosphärischen oder druckvariablen Rasterelektronenmikroskops
CN1862250A (zh) * 2005-05-09 2006-11-15 李炳寰 在真空或低压环境中操作液体且可供观测的方法及装置
JP6364167B2 (ja) * 2013-09-30 2018-07-25 株式会社日立ハイテクノロジーズ 環境制御型荷電粒子観察システム

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE911409C (de) * 1942-04-29 1954-05-13 Siemens Ag Korpuskularstrahlapparat, insbesondere Elektronenmikroskop

Also Published As

Publication number Publication date
JPS50141968A (en:Method) 1975-11-15
DE2513832C2 (de) 1981-10-08
NL7503645A (nl) 1975-09-30
FR2266299B3 (en:Method) 1977-07-01
FR2266299A1 (en:Method) 1975-10-24
DE2513832A1 (de) 1975-10-02
GB1504984A (en) 1978-03-22

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