HK90595A - Process for the vapor deposition of polysilanes - Google Patents

Process for the vapor deposition of polysilanes

Info

Publication number
HK90595A
HK90595A HK90595A HK90595A HK90595A HK 90595 A HK90595 A HK 90595A HK 90595 A HK90595 A HK 90595A HK 90595 A HK90595 A HK 90595A HK 90595 A HK90595 A HK 90595A
Authority
HK
Hong Kong
Prior art keywords
polysilanes
vapor deposition
deposition
vapor
Prior art date
Application number
HK90595A
Other languages
English (en)
Inventor
David M Dobuzinsky
Mark C Hakey
Steven J Holmes
David V Horak
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of HK90595A publication Critical patent/HK90595A/xx

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/167—Coating processes; Apparatus therefor from the gas phase, by plasma deposition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0754—Non-macromolecular compounds containing silicon-to-silicon bonds

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Thermal Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Silicon Polymers (AREA)
  • Physical Vapour Deposition (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Paints Or Removers (AREA)
  • Formation Of Insulating Films (AREA)
  • Chemical Vapour Deposition (AREA)
HK90595A 1989-02-15 1995-06-08 Process for the vapor deposition of polysilanes HK90595A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US31132689A 1989-02-15 1989-02-15

Publications (1)

Publication Number Publication Date
HK90595A true HK90595A (en) 1995-06-16

Family

ID=23206394

Family Applications (1)

Application Number Title Priority Date Filing Date
HK90595A HK90595A (en) 1989-02-15 1995-06-08 Process for the vapor deposition of polysilanes

Country Status (12)

Country Link
EP (1) EP0382932B1 (de)
JP (1) JPH0739629B2 (de)
KR (1) KR920005620B1 (de)
CN (1) CN1029043C (de)
AU (1) AU624467B2 (de)
BR (1) BR9000665A (de)
CA (1) CA1334911C (de)
DE (1) DE68919346T2 (de)
HK (1) HK90595A (de)
MX (1) MX172109B (de)
MY (1) MY110289A (de)
PH (1) PH27127A (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0643655A (ja) * 1991-03-04 1994-02-18 Internatl Business Mach Corp <Ibm> レジスト画像の生成プロセス及び電子デバイス
DE4202651A1 (de) * 1992-01-30 1993-08-05 Fraunhofer Ges Forschung Verfahren zur trockenentwicklung einer siliziumhaltigen ultraviolett- und/oder elektronenstrahlempfindlichen lackschicht
DE4202652C2 (de) * 1992-01-30 1996-03-28 Fraunhofer Ges Forschung Verfahren zum Aufbringen einer UV- und/oder elektronenstrahlempfindlichen Lackschicht
US5635338A (en) * 1992-04-29 1997-06-03 Lucent Technologies Inc. Energy sensitive materials and methods for their use
US5439780A (en) * 1992-04-29 1995-08-08 At&T Corp. Energy sensitive materials and methods for their use
CA2137928C (en) 1992-07-04 2002-01-29 Christopher David Dobson A method of treating a semiconductor wafer
WO1995006900A1 (fr) * 1993-09-03 1995-03-09 Hitachi, Ltd. Procede et appareil de realisation de motifs
US5858880A (en) * 1994-05-14 1999-01-12 Trikon Equipment Limited Method of treating a semi-conductor wafer
GB2331626B (en) 1996-08-24 2001-06-13 Trikon Equip Ltd Method and apparatus for depositing a planarized dielectric layer on a semiconductor substrate
US5885751A (en) * 1996-11-08 1999-03-23 Applied Materials, Inc. Method and apparatus for depositing deep UV photoresist films
US7488693B2 (en) 2004-02-17 2009-02-10 Toagosei Co., Ltd. Method for producing silicon oxide film
CN101402446B (zh) * 2008-11-06 2011-06-01 西安交通大学 一种减阻表面的制造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4348473A (en) * 1981-03-04 1982-09-07 Xerox Corporation Dry process for the production of microelectronic devices
US4460436A (en) * 1983-09-06 1984-07-17 International Business Machines Corporation Deposition of polymer films by means of ion beams
JPS6250337A (ja) * 1985-08-28 1987-03-05 Nippon Sheet Glass Co Ltd プラズマ重合による保護膜形成方法
US4781942A (en) * 1985-12-19 1988-11-01 Hughes Aircraft Company Process for the photochemical vapor deposition of siloxane polymers
JP2528471B2 (ja) * 1987-06-22 1996-08-28 出光興産株式会社 ジクロロシラン類の製造方法

Also Published As

Publication number Publication date
AU4778890A (en) 1990-08-23
JPH0739629B2 (ja) 1995-05-01
EP0382932A3 (en) 1990-12-05
CN1029043C (zh) 1995-06-21
MX172109B (es) 1993-12-03
KR900013102A (ko) 1990-09-03
MY110289A (en) 1998-04-30
AU624467B2 (en) 1992-06-11
PH27127A (en) 1993-03-16
BR9000665A (pt) 1991-01-15
EP0382932A2 (de) 1990-08-22
CN1044995A (zh) 1990-08-29
JPH02263981A (ja) 1990-10-26
DE68919346T2 (de) 1995-05-24
EP0382932B1 (de) 1994-11-09
CA1334911C (en) 1995-03-28
KR920005620B1 (ko) 1992-07-10
DE68919346D1 (de) 1994-12-15

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)