HK1206867A1 - Downholder for holding down the substrate places of a substrate - Google Patents

Downholder for holding down the substrate places of a substrate

Info

Publication number
HK1206867A1
HK1206867A1 HK15107362.8A HK15107362A HK1206867A1 HK 1206867 A1 HK1206867 A1 HK 1206867A1 HK 15107362 A HK15107362 A HK 15107362A HK 1206867 A1 HK1206867 A1 HK 1206867A1
Authority
HK
Hong Kong
Prior art keywords
substrate
downholder
holding down
places
substrate places
Prior art date
Application number
HK15107362.8A
Other languages
Chinese (zh)
Inventor
Guido Suter
Original Assignee
Besi Switzerland Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Besi Switzerland Ag filed Critical Besi Switzerland Ag
Publication of HK1206867A1 publication Critical patent/HK1206867A1/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/75Apparatus for connecting with bump connectors or layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/75981Apparatus chuck

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Actuator (AREA)
  • Die Bonding (AREA)
  • Road Paving Machines (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
HK15107362.8A 2013-12-09 2015-07-31 Downholder for holding down the substrate places of a substrate HK1206867A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH02035/13A CH708932B1 (en) 2013-12-09 2013-12-09 Downholder for holding down the substrate locations of a substrate for the purpose of mounting semiconductor components.

Publications (1)

Publication Number Publication Date
HK1206867A1 true HK1206867A1 (en) 2016-01-15

Family

ID=53185405

Family Applications (1)

Application Number Title Priority Date Filing Date
HK15107362.8A HK1206867A1 (en) 2013-12-09 2015-07-31 Downholder for holding down the substrate places of a substrate

Country Status (7)

Country Link
JP (1) JP6627143B2 (en)
KR (1) KR20150067019A (en)
CN (1) CN104701220B (en)
CH (1) CH708932B1 (en)
DE (1) DE102014116939A1 (en)
HK (1) HK1206867A1 (en)
SG (1) SG10201407399PA (en)

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01120834A (en) * 1987-11-04 1989-05-12 Nec Corp Die bonding device for semiconductor element
JPH0538884U (en) * 1991-10-28 1993-05-25 関西日本電気株式会社 Lead bonder
JPH06252210A (en) * 1993-02-25 1994-09-09 Nec Kansai Ltd Inner lead bonder
US5556808A (en) * 1994-06-30 1996-09-17 Motorola Inc. Method for aligning a semiconductor device
JP2000021930A (en) * 1998-07-01 2000-01-21 Nippon Avionics Co Ltd Thermocompression bonding device
DE10058145B4 (en) * 1999-11-26 2006-12-28 Smc K.K. cylinder device
JP3850351B2 (en) * 2002-04-25 2006-11-29 京セラ株式会社 Electronic component element mounting method
US7048174B2 (en) * 2003-08-25 2006-05-23 The Boeing Company Adaptable spring force clamping apparatus and methods
JP4241683B2 (en) * 2005-07-06 2009-03-18 パナソニック株式会社 Parts pressing device
FR2905883B1 (en) * 2006-09-14 2008-12-05 Valeo Electronique Sys Liaison METHOD FOR WELDING AN ORGAN ON A SUPPORT BY DELIVERING MATERIAL AND DEVICE FOR ARRANGING TWO ELEMENTS ON ONE ANOTHER
CN101801646B (en) * 2007-11-08 2013-04-17 株式会社爱发科 Bonding substrate manufacturing apparatus and bonding substrate manufacturing method
JP5359009B2 (en) * 2008-04-18 2013-12-04 株式会社ニコン Semiconductor substrate bonding equipment
CN201262949Y (en) * 2008-09-04 2009-06-24 浙江华越芯装电子股份有限公司 Improved bonding clamper for integrated circuit heat pressing ultrasound ball welder
TWI550680B (en) * 2009-09-28 2016-09-21 尼康股份有限公司 Substrate pressurization device and its control method
JP5580163B2 (en) * 2010-10-13 2014-08-27 東レエンジニアリング株式会社 Parallelism adjusting method and parallelism adjusting device for mounting apparatus
TWI564106B (en) * 2011-03-28 2017-01-01 山田尖端科技股份有限公司 Bonding apparatus and bonding method
JP2013143542A (en) * 2012-01-12 2013-07-22 Tokyo Electron Ltd Semiconductor device manufacturing system and semiconductor device manufacturing method
CN104145328A (en) * 2012-03-07 2014-11-12 东丽株式会社 Method and apparatus for manufacturing semiconductor device

Also Published As

Publication number Publication date
JP6627143B2 (en) 2020-01-08
JP2015115606A (en) 2015-06-22
KR20150067019A (en) 2015-06-17
CH708932A1 (en) 2015-06-15
CH708932B1 (en) 2017-04-13
DE102014116939A1 (en) 2015-06-11
CN104701220B (en) 2019-07-23
CN104701220A (en) 2015-06-10
SG10201407399PA (en) 2015-07-30

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