HK1206867A1 - Downholder for holding down the substrate places of a substrate - Google Patents
Downholder for holding down the substrate places of a substrateInfo
- Publication number
- HK1206867A1 HK1206867A1 HK15107362.8A HK15107362A HK1206867A1 HK 1206867 A1 HK1206867 A1 HK 1206867A1 HK 15107362 A HK15107362 A HK 15107362A HK 1206867 A1 HK1206867 A1 HK 1206867A1
- Authority
- HK
- Hong Kong
- Prior art keywords
- substrate
- downholder
- holding down
- places
- substrate places
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title 2
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/75981—Apparatus chuck
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Actuator (AREA)
- Die Bonding (AREA)
- Road Paving Machines (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH02035/13A CH708932B1 (en) | 2013-12-09 | 2013-12-09 | Downholder for holding down the substrate locations of a substrate for the purpose of mounting semiconductor components. |
Publications (1)
Publication Number | Publication Date |
---|---|
HK1206867A1 true HK1206867A1 (en) | 2016-01-15 |
Family
ID=53185405
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK15107362.8A HK1206867A1 (en) | 2013-12-09 | 2015-07-31 | Downholder for holding down the substrate places of a substrate |
Country Status (7)
Country | Link |
---|---|
JP (1) | JP6627143B2 (en) |
KR (1) | KR20150067019A (en) |
CN (1) | CN104701220B (en) |
CH (1) | CH708932B1 (en) |
DE (1) | DE102014116939A1 (en) |
HK (1) | HK1206867A1 (en) |
SG (1) | SG10201407399PA (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102023110438A1 (en) | 2023-04-24 | 2024-10-24 | Besi Switzerland Ag | Device with an improved hold-down device |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01120834A (en) * | 1987-11-04 | 1989-05-12 | Nec Corp | Die bonding device for semiconductor element |
JPH0538884U (en) * | 1991-10-28 | 1993-05-25 | 関西日本電気株式会社 | Lead bonder |
JPH06252210A (en) * | 1993-02-25 | 1994-09-09 | Nec Kansai Ltd | Inner lead bonder |
US5556808A (en) * | 1994-06-30 | 1996-09-17 | Motorola Inc. | Method for aligning a semiconductor device |
JP2000021930A (en) * | 1998-07-01 | 2000-01-21 | Nippon Avionics Co Ltd | Thermocompression bonding device |
DE10058145B4 (en) * | 1999-11-26 | 2006-12-28 | Smc K.K. | cylinder device |
JP3850351B2 (en) * | 2002-04-25 | 2006-11-29 | 京セラ株式会社 | Electronic component element mounting method |
US7048174B2 (en) * | 2003-08-25 | 2006-05-23 | The Boeing Company | Adaptable spring force clamping apparatus and methods |
JP4241683B2 (en) * | 2005-07-06 | 2009-03-18 | パナソニック株式会社 | Parts pressing device |
FR2905883B1 (en) * | 2006-09-14 | 2008-12-05 | Valeo Electronique Sys Liaison | METHOD FOR WELDING AN ORGAN ON A SUPPORT BY DELIVERING MATERIAL AND DEVICE FOR ARRANGING TWO ELEMENTS ON ONE ANOTHER |
JP4839407B2 (en) * | 2007-11-08 | 2011-12-21 | 株式会社アルバック | Bonded substrate manufacturing apparatus and bonded substrate manufacturing method |
JP5359009B2 (en) * | 2008-04-18 | 2013-12-04 | 株式会社ニコン | Semiconductor substrate bonding equipment |
CN201262949Y (en) * | 2008-09-04 | 2009-06-24 | 浙江华越芯装电子股份有限公司 | Improved bonding clamper for integrated circuit heat pressing ultrasound ball welder |
WO2011036900A1 (en) * | 2009-09-28 | 2011-03-31 | 株式会社ニコン | Pressure applying module, pressure applying apparatus, and substrate bonding apparatus |
JP5580163B2 (en) * | 2010-10-13 | 2014-08-27 | 東レエンジニアリング株式会社 | Parallelism adjusting method and parallelism adjusting device for mounting apparatus |
TWI564106B (en) * | 2011-03-28 | 2017-01-01 | 山田尖端科技股份有限公司 | Bonding apparatus and bonding method |
JP2013143542A (en) * | 2012-01-12 | 2013-07-22 | Tokyo Electron Ltd | Semiconductor device manufacturing system and semiconductor device manufacturing method |
SG11201405431TA (en) * | 2012-03-07 | 2014-10-30 | Toray Industries | Method and apparatus for manufacturing semiconductor device |
-
2013
- 2013-12-09 CH CH02035/13A patent/CH708932B1/en not_active IP Right Cessation
-
2014
- 2014-11-10 SG SG10201407399PA patent/SG10201407399PA/en unknown
- 2014-11-17 KR KR1020140160125A patent/KR20150067019A/en active IP Right Grant
- 2014-11-19 DE DE102014116939.5A patent/DE102014116939A1/en not_active Withdrawn
- 2014-12-02 JP JP2014243892A patent/JP6627143B2/en not_active Expired - Fee Related
- 2014-12-09 CN CN201410810596.1A patent/CN104701220B/en not_active Expired - Fee Related
-
2015
- 2015-07-31 HK HK15107362.8A patent/HK1206867A1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
SG10201407399PA (en) | 2015-07-30 |
CH708932B1 (en) | 2017-04-13 |
CN104701220B (en) | 2019-07-23 |
KR20150067019A (en) | 2015-06-17 |
CN104701220A (en) | 2015-06-10 |
CH708932A1 (en) | 2015-06-15 |
JP6627143B2 (en) | 2020-01-08 |
DE102014116939A1 (en) | 2015-06-11 |
JP2015115606A (en) | 2015-06-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PC | Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee) |
Effective date: 20231207 |