JP2000021930A - Thermocompression bonding device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the heat capacity of a heater tool and to realize instantaneous heating by heating the linear bar-like heater tool by means of making current flow in the longitudinal direction, detecting the temperature of the heater tool, controlling the elevating position of the heater tool while the heater temperature is held to be constant. SOLUTION: A long groove 48 is formed below a long heater tool holder 44 made of an insulating material so that it goes through the longitudinal direction. A linear bar-like heater tool 50 is engaged with the long groove 48 from beneath so that both ends protrude from the long groove 48. A pair of right and left feeding means introduce current to the heater tool 50 while both ends of the heater tool 50 are held. A temperature sensor detects the temperature of the heater tool 50. Current introduced to the heater tool 50 is controlled so that the detected temperature of the temperature sensor is kept to be constant, and the elevating position of an elevating block 34 is controlled. Consequently, the heat capacity of the heater tool 50 becomes small and the temperature can instantaneously and precisely be managed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thermocompression bonding apparatus which can perform thermocompression bonding by a constant heating method in which a long heater tool heated to a constant temperature is pressed against a work.

[0002]

2. Description of the Related Art Conventionally, ultra-high-density packaging technology has been developed as electronic devices become smaller, lighter and thinner. For example, when connecting a terminal of a liquid crystal panel or the like to a connection terminal of an external circuit, the distance between the connection terminals is required to be further reduced, and the pitch of the connection terminals is 0.2 to 0.5 mm or finer. Is required. As one of means for connecting a lead wire to such a fine connection terminal, a method using an anisotropic conductive film is known.

The anisotropic conductive film is a polymer film formed by uniformly dispersing conductive particles in an adhesive such as a resin, and has an electric anisotropy. In other words, the conductive particles are brought into contact only in the thickness direction of the film by conducting the thermal compression by sandwiching them between the protruding electrodes, thereby obtaining conductivity, obtaining conductivity between the upper and lower electrodes, and insulating in the other directions. It is something that can be given.

Since the anisotropic conductive film can be mounted at a relatively low temperature, it is frequently used for connecting a liquid crystal panel having a low allowable temperature to a flexible wiring board. When performing thermocompression bonding between electrodes, for example, between a terminal and a lead wire using an anisotropic conductive film having such characteristics, in order to obtain stable electrical characteristics and adhesive strength, a predetermined pressing force, a predetermined pressure It is important that the heating temperature is applied uniformly to the connection surface.

For this reason, conventionally, a plate-shaped jig is placed on a heater block controlled at a predetermined temperature, and a liquid crystal display panel, an anisotropic conductive film, and a flexible printed wiring board (FPWB) are sequentially stacked on the jig. In addition, a thermocompression bonding device that presses a long heater tool having a length of a compression portion from above is used. As a heating method of the heater tool used here, a pulse heating method and a constant heating method are conventionally known.

In the pulse heating method, a long heater tool 500 as shown in FIG. 10 is used. The heater tool 500 is made of a resistance heating material such as molybdenum, titanium, or tungsten and has a substantially U-shaped cross section.
The thermocompression bonding section 502 is instantaneously heated by a pulse current (indicated by an arrow A) crossing the line 2. Here, a pair of electrode blocks 504, 504 along the longitudinal direction of the heater tool 500 are provided with power supply cords 5 at appropriate intervals.
06 is connected. In this heater tool 500,
The heat responsiveness of the thermocompression bonding section 502 to intermittent pulse current is improved by making the thermocompression bonding section 502 thinner and reducing its heat capacity.

The heater tool 500 is supplied with a pulse current A while being pressed against a work (a body to be thermally compressed), and the thermal compression part 502 is instantaneously heated. After the work is heated and pressed for a predetermined time, the pulse current is cut off, and after the heater tool 500 cools to a predetermined temperature, the heater tool 5
00 is separated from the work.

In the constant heating method, a long heater tool 510 as shown in FIG. 11 is fixed to the lower edge of a metal heater block 512 having good heat conductivity. A cartridge heater 514 is embedded in the heater block 512 along the longitudinal direction. The heater tool 510 is maintained in a state where the heater tool 510 is heated to a predetermined temperature in advance by heat transmitted from the heater block 512, and is pressed against a work (a body to be thermally pressed).

When a thermosetting anisotropic conductive film is used for the work, if the heater tool 510 is pressed against the work for a predetermined time, the thermosetting resin is hardened, so that the heater tool 510 heats the work. After that, just release it. However, when the work uses non-thermosetting anisotropic conductive film or solder, for example, solder plating is applied to the electrodes of the wiring board, and IC leads are placed on this for thermocompression (reflow). However, when the heater tool 510 is separated from the work, the joint is separated. Therefore, in this case, it is necessary to use a pressing plate that keeps pressing the work with the heater tool 510 slightly separated from the work.

[0010]

Problems of the prior art FIG. 10 used in the pulse heating method
In the heater tool 500 shown in (1), when the thermocompression bonding portion becomes long, the current required to generate heat required for thermocompression bonding in the thermocompression bonding portion 502 increases. For this reason, it is necessary to increase the capacity of the power supply, and there is a problem that the power supply becomes large.

The heater tool 500 is made of tungsten,
Since it is made of a special metal such as molybdenum, it must be manufactured by a special method such as a wire cutting method. For this reason, when the length is increased, there is a problem that the processing becomes difficult or the cost increases.

In the continuous heating method, the heat capacity of the heater tool 510 is large, so that the time for heating and cooling is long. That is, instantaneous heating is impossible as in the pulse heating method. For this reason, there is a problem that the operation rate of the device is reduced.

[0013]

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and it is a first object of the present invention to provide a thermocompression bonding apparatus of a constant heating type capable of instantaneously heating by reducing the heat capacity of a heater tool. Aim. It is a second object of the present invention to provide a thermocompression bonding apparatus that can select and use either of a constant heating method and a pulse heating method.

[0014]

According to the present invention, a first object of the present invention is to provide a thermocompression bonding apparatus for pressing a long heater tool, which is heated by an electric current, onto a work and thermocompression-bonding the work, comprising: A long heater tool holder made of an insulating material fixed substantially horizontally to the lower surface of the elevating block, and both ends engaged with a long groove formed so as to vertically cut the lower surface of the heater tool holder in the longitudinal direction thereof, and both ends. A linear bar-shaped heater tool protruding from the long groove, a pair of left and right power supply means for holding both ends of the heater tool and conducting current to the heater tool, a temperature sensor for detecting the temperature of the heater tool, A controller for controlling a current guided to the heater tool so as to keep the detected temperature constant, and a controller for controlling an ascending / descending position of the elevating block. Thermocompression bonding device being characterized in that to enable heat bonding by, it is accomplished by.

Here, it is preferable that at least one of a pair of power supply means fixed to both ends of the linear bar-shaped heater tool is movably held in the longitudinal direction of the heater tool. This is because the expansion and contraction of the length due to the temperature change of the heater tool can be absorbed by the movable power supply means. It is preferable that the lifting block is provided with a pressing plate which moves down with the heater tool to press the work and separates from the work with a delay from the rising of the heater tool. Even if the heater tool is separated from the work, the press plate is kept pressed until the work is sufficiently cooled, so that the joint portion of the work can be prevented from peeling. In this case, if a cooling means for sending cooling air to the work is provided while the holding plate is pressing the work,
The work can be cooled quickly, and the operation rate of the device is further improved.

A second object of the present invention is to additionally provide a system selection switch for selecting one of a constant heating system and a pulse heating system in this apparatus, and the controller controls the heater tool current and the up / down movement in accordance with the selected system. This can be achieved by controlling the vertical position of the block. When the cooling means is provided here, the controller also controls the operation of the cooling means.

[0017]

FIG. 1 is a perspective view showing an embodiment of the present invention.
FIG. 2 is a front view of the thermocompression bonding head used here, FIG. 3 is a right side view showing a part of the head, FIG. 4 is an end view taken along the line IV-IV in FIG. 2, and FIG. is there. 6 is a control system diagram, FIG. 7 is an operation timing diagram of the pulse heating method, FIG. 8 is an operation timing diagram of the constant heating method, and FIG. 9 is a flowchart of the operation.

In FIG. 1, reference numeral 10 denotes an XY moving table which can be moved in both X and Y directions on a horizontal plane.
Reference numeral 12 denotes a heater block mounted on the table 10. The heater block 12 is a thick plate made of metal, and a heat insulating plate 14 made of aramid resin or the like is adhered to a lower surface thereof, and the heat insulating plate 14 is in close contact with the table 10.

A small hole (not shown) penetrating in the left-right direction is formed in the heater block 12, and an electric heater 16 (only one is shown) is inserted into the small hole from both left and right sides. A current is supplied to the heater 16 from a heater power supply circuit (not shown) to heat the heater block 12 and maintain it at about 100 ° C.

Reference numeral 18 denotes a plate-shaped jig which is mounted on the upper surface of the heater block 12. The jig 18 is made of an aluminum plate or the like, and is heated by the heater block 12.

Reference numeral 20 denotes a wiring board, and here, a liquid crystal display panel is used. On the upper surface of the substrate 20, a large number of long electrodes in the front-rear direction have a small pitch (about 0.2 mm = 200 μm) in the horizontal direction (the length direction of the electric heater 16).
They are formed side by side at intervals. The substrate 20 may be a rigid insulating substrate such as a phenol resin or a glass epoxy resin or a flexible insulating substrate such as a polyimide resin or a polyester resin instead of the liquid crystal panel.

Reference numeral 22 denotes an anisotropic conductive film cut into a tape shape, which is adhered on the electrodes of the substrate 20 along the direction in which many electrodes are arranged in parallel. On the anisotropic conductive film 22, an object 24 is further placed. In this case, the object to be crimped 24 is a lead of a driving LSI or an IC of a liquid crystal panel.
0 corresponding to the corresponding electrode.

The object to be crimped 24 may of course be an electrode such as a flexible wiring board instead of the LSI or IC lead. The electrodes, the anisotropic conductive film 22 and the object 24 are located above the heater 16 along the length direction of the heater 16. In this embodiment, a laminate of the substrate 26, the anisotropic conductive film 22, and the object to be compressed 24 becomes a work 26 to be subjected to thermocompression bonding.

Reference numeral 30 denotes a thermocompression head, which is held by a head holding part 32 so as to be vertically movable. This crimping head 3
Numeral 0 has an elevating block 34 in the form of a horizontal and long block, and a pair of left and right guide rods 36, which are vertically implanted in the elevating block 34, are held by the head holding portion 32 so as to be vertically movable. An air cylinder 38 is interposed between the lifting block 34 and the head holding unit 32, and the lifting block 34 can be moved up and down by the air cylinder 38.

The lifting block 34 comprises a pressure block 40 and a holding block 42 fixed to the lower surface thereof. These are made of stainless steel. As shown in FIG. 4, the holding block 42 has a front lower portion that is horizontally cut away to form a substantially inverted L-shaped cross section, and a lower portion is a tongue piece 42A that hangs down in a plate shape.

A plate-shaped heater tool holder 44 made of an insulating material such as black gabbro is closely attached and fixed to the front surface of the plate-shaped tongue piece 42A. That is, the heater tool holder 44 is sandwiched between the tongue piece 42A of the holding block 42 and the holding block 46 made of stainless steel, and is fixed to the holding block 42 by a plurality of bolts 47 (FIG. 2).

The lower portion of the heater tool holder 44 protrudes downward and to the left and right in a tongue shape. The lower edge is horizontal, and a groove 48 shown in FIG. 4 is formed in the lower edge. A straight-bar-shaped heater tool 50 having a rectangular cross section is engaged and held in the groove 48. The heater tool 50 is made of a high-resistance material such as molybdenum, titanium, tungsten, or Kovar.
It has a shape to engage with.

The lower surface of the heater tool 50 is a flat crimping surface 50A, which is longer than the crimping area of the work 26. That is, it is longer than the length of the anisotropic conductive film 22 (FIG. 1). Both ends of the heater tool 50 protrude outside the heater tool holder 44, and power supply means 52, 52 (FIG. 2) insulated from the holding block 42 are connected to the protrusion.

These feeding means 52, 52 are shown in FIGS.
It is configured as shown in FIG. That is, a power supply block 54 made of copper which is electrically insulated and fixed to the end surface of the holding block 42, a shank 56 made of copper which is spaced below the power supply block 54, and the power supply block 54 and the shank And two leaf springs 58 and 58 made of beryllium copper.

Here, a groove 60 for engaging the heater tool 50 is formed on the lower end surface of the shank 56 (FIGS. 3 and 5), and a slot 62 is formed along one inner wall of the groove 60. . Accordingly, the shank 56 can be fixed to the heater tool 50 by engaging the heater tool 50 into the groove 60 from below and tightening the screw 64 (FIG. 3) crossing the slit 62. By loosening the screw 64, the heater tool 50 can be removed from the shank 56.

The leaf springs 58, 58 are provided with a shank 56.
Are allowed to move left and right. That is, the leaf spring 5
8 is in a direction orthogonal to the heater tool 50 (parallel to the side end surface of the heater tool holder 44), and allows the heater tool 50 to move in the longitudinal direction. A pair of leaf springs 5
8 are parallel to each other, and the feed block 54 and the shank 5
6 is fixed.

The heater tool 50 includes a wiring cord 6
6 and the power supply block 54,
8 (FIG. 6), the heater tool 50 is heated by the current. At an appropriate position of the heater tool 50, for example, near the center, a temperature sensor 68 such as a thermocouple is provided.
(FIG. 2) is stuck and temperature controlled. For example, crimping surface 5
The vicinity of the center of 0A is controlled at about 300 to 400 ° C.

Reference numeral 70 denotes a holding plate. The pressing plate 70 is held by the pressing block 40 so as to be able to move up and down, and has a downward elastic return behavior. That is, a cylinder 74 for holding a pair of left and right linear bearings 72 (FIG. 3) is fixed to the lower surface of the pressure block 40. At the upper end of 76, a compression coil spring 7 loaded in a cylinder 74 is provided.
8 is in contact.

At the lower end of each support rod 76, an arm 80 that is long in parallel with the heater tool 50 and extends toward the heater tool 50 is fixed, and a holding plate 70 is attached to the lower end of the arm 80. The holding plate 70 is parallel to the heater tool 50 and longer than the heater tool 50, and extends below the heater tool 50. The holding plate 70 has a long hole 82 through which the heater tool 50 can pass from above to below.
Are formed.

Therefore, when the lifting block 34 is lowered toward the work 26, the holding plate 70 first comes into contact with the work 26. When the lifting block 34 is further lowered, the support rod 76 supporting the holding plate 70 relatively moves upward in the bearing 72 while compressing the coil spring 78. Then, the heater tool 50 enters the long hole 82 of the holding plate 70 and comes into contact with the work 26. In the case of the pulse heating method, a pulse current is supplied and heated before the heater tool 50 descends, then pressed by the work 26, and cooled when separated from the work 26. That is, the heater tool 50 is provided for each work 26.
Heating and cooling are repeated.

In the case of the constant heating method, the heater tool 50 preheated to a constant temperature is lowered together with the lifting block 34, and the heater tool 50 is further lowered while the holding plate 70 is pressed against the work 26 to thereby lower the holding plate. 70 long hole 82
Is pressed on the work 26. After pressing for a certain period of time, the heater tool 50 is separated from the work 26, and the work 26 is pressed only by the holding plate 70 to be cooled.

The holding plate 70 is detachable, and may be removed if the holding plate 70 is unnecessary. For example, when the heater tool 50 can be cooled quickly while being pressed after thermocompression bonding by the pulse heating method, or when an anisotropic conductive film of a thermosetting resin is used in the constant heating method, the heater tool 50 is separated from the work 26. This is because the thermocompression bonding part does not peel off.

The apparatus of this embodiment is provided with an air cooling pipe 90 for forcibly cooling the crimping portion continuously during operation or intermittently at the end of thermocompression bonding. That is, the holding arm 92 is fixed to the front and rear surfaces of the pressure block 40, and the pipe 90 is horizontally held near the holding block 42 by the holding arm 92. The pipe 90 is provided with a large number of air injection ports toward the holding block 42, and cooling air is supplied to both ends of the pipe 90 via connectors 94, 94.

For this reason, the cooling air jetted from the air jet port hits the holding block 42, the holding block 46 or the heater tool holder 44, and quickly cools them. A hinge mechanism 92 </ b> A is provided in the middle of the holding arm 92 so that the distance between the pipe 90 and the holding block 42 can be adjusted. When cooling is unnecessary, for example, when an anisotropic conductive film of a thermosetting resin is used, the holding arm 92 is bent to connect the pipe 90 to the heater head 5.
It should just be kept away from 0.

In FIG. 6, reference numeral 100 denotes a temperature detection circuit which detects the heater tool temperature T based on the output of the temperature sensor 68 attached to the heater tool 50. Reference numeral 102 denotes a controller that controls a current flowing through the heater tool 50 so that the heater tool temperature T is set to a predetermined temperature at a predetermined time. That is, the controller 102 sends a signal indicating a target current to a PWM (pulse width control) circuit 104, and the PWM circuit 104 sends an on / off signal having a duty ratio corresponding to the target current to the driver 106. The driver 106 is turned on by the PWM circuit 104.
On / off control of the current supplied from the power supply 108 is performed based on the OFF signal, and the current flowing to the heater tool 50 is controlled.

The controller 102 raises and lowers the lifting block 34 at a predetermined timing, and opens and closes the air valve 110 at a predetermined timing. The air valve 110 interrupts the air that the air pump 112 sucks through the air filter 114 and sends it to the air cooling pipe 90 under pressure.

In FIG. 6, reference numeral 116 denotes a system selection switch for selecting one of a pulse heating system and a constant heating system. The result selected by the system selection switch 116 is input to the controller 102, and the controller 102 controls the heater current, the raising / lowering position of the lifting / lowering block 34, and the air valve 110 and the air pump 112 of the cooling system according to the selected system. .

When using this crimping apparatus, the jig 18 is placed on the heater block 12 on the XY moving table 10 and the electric heater 16 of the heater block 12 is energized to reduce the surface temperature of the jig 18 to about 100 ° C. To keep. A work, that is, a work 26 which is a laminate of the substrate 20, the anisotropic conductive film 22, and the material to be pressed 24 is placed thereon. And table 10
To move the crimped portion of the workpiece 26 to the heater tool 50.
(See step 2 in FIG. 8).
00).

The case where the pulse heating method is selected by the method selection switch 116 in this state will be described with reference to FIGS. In this case, the holding plate 70 is removed. First, as shown in FIG. 7, the controller 102 supplies a large current I ₁ to the heater tool 50 from a certain time t ₁ ,
0 is quickly heated (step 202). The controller 102 controls the heater tool 50 detected by the temperature sensor 68.
The temperature T of controlling the heater current I to a predetermined temperature T _1. At this time (t = t ₂ ), the heater tool temperature T ₁ is
It is almost the same as the thermocompression bonding temperature (T ₂ ) of the work.

The volume of the heater tool 50 increases due to thermal expansion and extends in the longitudinal direction. However, since both ends of the heater tool 50 are connected to the leaf springs 58, 58 via the shank 56, 56, the extension of the heater tool 50 is achieved. Length of leaf spring 5
The heater tool 50 does not undulate in the area of contact with the heater tool holder 44 due to the flexure of 8, 58.

The lifting head 34 is lowered (step 2).
04), when the heater tool 50 preheated in this way is pressed against the work 26, a predetermined pressing force and a predetermined heating temperature are uniformly applied to the connection surface. When the heater tool 50 comes into contact with the work, the heat of the heater tool 50 is transferred to the work, so that the heater temperature T drops momentarily.
2 keeps the heater temperature T at T ₂ by increasing the current I to I ₂ .
The temperature T ₂ is desirably made almost the same as T _1. As described above, since the heater tool 50 is pre-heated and then pressed against the work, the heater tool 50 does not expand when the work is pressed, and the work is not displaced due to expansion and contraction of the heater tool, thereby improving reliability. I do.

This heating is continued for about 30 seconds (t =
At t ₃ , step 206), the energization of the heater tool 50 is stopped (step 208), and the air valve 110 is opened to apply cooling air to the pressure bonding head 30 to rapidly cool it (step 210). For this reason, the heater tool 50 and the work 26 cool rapidly. The work 26 cools down (T ≦ T ₃ ),
After the resin in the anisotropic conductive film 22 has solidified, the pressure bonding head 30
Is raised (step 212), the heater tool 50 is separated from the work 26, and the air valve 110 is closed.

Then, the work 26 is taken out (step 21).
4) If there is another work 26 (step 216), the work is replaced, a new work is positioned under the pressure bonding head 30 (step 200), and the above operation is repeated.

Next, a case where the constant heating method is selected by the method selection switch 116 will be described with reference to FIGS. In this case, if a thermosetting resin is used for the anisotropic conductive film 22, the holding plate 70 is not necessarily required and may be removed. When a thermosetting resin is not used for the anisotropic conductive film 22, it is necessary to attach the holding plate 70.
Hereinafter, the operation when the holding plate 70 is attached will be described.

First, the press-bonded portion of the work 26 is exposed below the long hole 82 of the holding plate 70. At this time, the crimping surface 50A of the heater tool 50 is located above the long hole 82 (FIG. 9).
Step 200). If the constant heating method is selected by the method selection switch 116, the controller 102 is set at a certain time t.
_The heater current I is supplied from step ₁₀ to the heater tool 50 (step 302). Then the heater temperature T rises, and controls the heater current I to hold at this temperature T ₁₀ when a predetermined temperature T _10. Although heater current I 9 is depicted in constant actually increases and decreases as the heater temperature T becomes T _10.

[0051] the time the heater temperature T reaches the predetermined temperature T ₁₀ t
_{At 20} , the lifting block 34 starts lowering (the head position changes from H to L). After the presser plate 70 presses the work 26 first, the heater tool 50 delays the elongate hole 82 of the presser plate 70.
Is pressed on the work 26. This state is maintained for a predetermined time L and thermocompression bonding is performed. At the time t
_{At 30} (step 306), the lifting block 34 rises slightly to separate only the heater tool 50 from the work 26 (step 308).

At this time, the holding plate 70 keeps pressing the work 26 to prevent the pressure-bonded portion of the work 26 from peeling off. In this state, the cooling system operates (Step 310). That is, the air valve 110 is opened, the air pump 112 operates, and the cooling air hits the work 26 and the vicinity of the holding plate 70 to cool them.

[0053] predetermined time cooled At time t ₄₀ in the lifting head 34 is further increased, the presser plate 70 is separated from the work 26 (step 312), take out the workpiece 26 has finished thermocompression bonding in this state (step 314) If there is a new work 26 to be thermocompression-bonded next (step 316), the new work 26 is positioned and the above operation is repeated. When the thermocompression bonding is completed for all the workpieces 26 (step 316), the heater current I is turned off and the operation is completed (step 318).

The present invention can be used not only for thermocompression bonding using the anisotropic conductive film 22, but also for other thermocompression bonding. For example, the present invention can also be applied to a method in which a predetermined amount of solder is supplied to electrodes in advance by solder plating or the like, and the electrodes are reflowed by heating with a heater tool. In the present embodiment, the cross section of the bar-shaped heater tool 50 has been described as a rectangle, but depending on the work, the crimping surface may be formed in an inverted convex shape or a single-blade shape.

[0055]

As described above, the first aspect of the present invention heats a linear rod-shaped heater tool by applying a current in the longitudinal direction thereof, and detects the temperature of the heater tool to maintain the heater temperature constant. In addition, since the elevation position of the heater tool is controlled, the heat capacity of the heater tool is reduced, and the temperature can be controlled instantaneously and accurately. Therefore, it is suitable for thermocompression bonding by a constant heating method.

According to the second aspect of the present invention, at least one of the pair of right and left power supply means of the heater tool can be moved in the longitudinal direction of the heater tool. Therefore, expansion and contraction due to temperature change of the heater tool is absorbed by the movement of the power supply means. And deformation of the heater tool can be prevented.

According to the third aspect of the present invention, since the presser plate which moves down together with the heater tool to press the work and separates from the work with a delay from the raising of the heater tool is provided in the elevating block, the thermocompression is always performed by the heating method. In this case, only the heater tool can be separated from the work while the work is being pressed by the holding plate, and the work can be kept pressed by the holding plate while waiting for cooling of the thermocompression bonding section. For this reason, the peeling of the thermocompression bonding portion can be prevented and the reliability of the thermocompression bonding process can be improved, which is particularly suitable when an anisotropic conductive film having a thermosetting resin is not used.

According to the fourth aspect of the present invention, the cooling air is sent to the work while the heater tool is separated from the work and only the holding plate is pressing the work, so that the cooling time of the work can be reduced. (1) The operation rate of the apparatus can be improved by shortening the time (tact) required for one process.

According to a fifth aspect of the present invention, in the apparatus of any one of the first to third aspects, a system selection switch for selecting one of a constant heating system and a pulse heating system is added to perform thermocompression bonding by both systems. It is made selectable. That is, the pulse heating method can be used by utilizing the fact that the heating capacity of the heater tool is small and instantaneous heating is possible. Therefore, it is possible to select an optimum method according to the work even though it is a single device, and it is not necessary to prepare a separate thermocompression bonding device for each method.

According to a sixth aspect of the present invention, a system selection switch for selecting one of a constant heating system and a pulse heating system is added to the apparatus of the fourth embodiment. In addition to the effect, there is an effect that the cooling by the cooling means is promoted to shorten the tact time and improve the operation rate.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an embodiment of the present invention.

FIG. 2 is a front view of a thermocompression bonding head used here.

FIG. 3 is a right side view showing a cross section of a part of the thermocompression bonding head.

FIG. 4 is an end view taken along line IV-IV in FIG. 2;

FIG. 5 is an exploded perspective view of a power supply unit.

FIG. 6 is a control system diagram

FIG. 7 is an operation timing chart of the pulse heating method.

FIG. 8 is an operation timing chart of a constant heating method.

FIG. 9 is an operation flowchart.

FIG. 10 is a perspective view showing a heater tool used in a conventional pulse heating method.

FIG. 11 is a perspective view showing a heater tool used in a conventional continuous heating method.

[Explanation of symbols]

 26 Work 30 Thermocompression Head 34 Elevating Block 40 Pressing Block 42 Holding Block 44 Heater Tool Holder 50 Heater Tool 52 Power Supply Means 54 Power Supply Block 56 Shank 58 Leaf Spring 68 Temperature Sensor 70 Pressing Plate 82 Slot 90 Air Cooling Pipe 102 Controller 108 Power supply 116 system selection switch

Claims (6)

[Claims] In a thermocompression bonding apparatus for pressing a long heater tool heated by an electric current against a work and thermocompression-bonding the work, an elevating block which moves up and down above the work, and which is fixed substantially horizontally to a lower surface of the elevating block. A long heater tool holder made of an insulating material, and a linear bar-shaped heater tool which engages from below with a long groove formed so as to vertically cut the lower surface of the heater tool holder in the longitudinal direction and both ends protrude from the long groove. A pair of right and left power supply means for holding both ends of the heater tool and guiding current to the heater tool, a temperature sensor for detecting the temperature of the heater tool, and a heater tool for maintaining the temperature detected by the temperature sensor constant. And a controller that controls the current to be guided to the elevating block and the elevating position of the elevating block. Characteristic thermocompression bonding equipment. 2. The thermocompression bonding apparatus according to claim 1, wherein at least one of the pair of left and right power supply means holds the heater tool movably in the longitudinal direction. 3. The thermocompression bonding apparatus according to claim 1, wherein the lifting block is provided with a pressing plate which moves down together with the heater tool to press the work and separates the work from the work after the heater tool is lifted. 4. The thermocompression bonding apparatus according to claim 1, further comprising cooling means for sending cooling air to the work while the heater tool is separated from the work and only the holding plate is pressing the work. 5. The thermocompression bonding apparatus according to claim 1, further comprising a system selection switch for selecting one of a constant heating system and a pulse heating system, wherein the controller is selected by the system selection switch. A thermocompression bonding device that controls the current of the heater tool and the elevation position of the elevation block according to the method. 6. The thermocompression bonding apparatus according to claim 4, further comprising a method selection switch for selecting one of a constant heating method and a pulse heating method, wherein said controller controls the heater tool according to the method selected by said method selection switch. A thermocompression bonding device that controls the current, the lifting position of the lifting block, and the cooling means.