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Application filed by Leybold Vacuum GmbhfiledCriticalLeybold Vacuum Gmbh
Priority claimed from PCT/EP2002/014375external-prioritypatent/WO2003056187A1/de
Publication of HK1069423A1publicationCriticalpatent/HK1069423A1/zh
Publication of HK1069423BpublicationCriticalpatent/HK1069423B/zh