HK1026067A1 - Chemical mechanical abrasive composition for use in semiconductor processing - Google Patents
Chemical mechanical abrasive composition for use in semiconductor processingInfo
- Publication number
- HK1026067A1 HK1026067A1 HK00105270A HK00105270A HK1026067A1 HK 1026067 A1 HK1026067 A1 HK 1026067A1 HK 00105270 A HK00105270 A HK 00105270A HK 00105270 A HK00105270 A HK 00105270A HK 1026067 A1 HK1026067 A1 HK 1026067A1
- Authority
- HK
- Hong Kong
- Prior art keywords
- chemical mechanical
- semiconductor processing
- abrasive composition
- mechanical abrasive
- composition
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 98117452 CN1126152C (zh) | 1998-08-31 | 1998-08-31 | 半导体制程用的化学机械研磨组合物 |
Publications (1)
Publication Number | Publication Date |
---|---|
HK1026067A1 true HK1026067A1 (en) | 2000-12-01 |
Family
ID=5225529
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK00105270A HK1026067A1 (en) | 1998-08-31 | 2000-08-22 | Chemical mechanical abrasive composition for use in semiconductor processing |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP0984049B1 (fr) |
CN (1) | CN1126152C (fr) |
DE (1) | DE69831150T2 (fr) |
HK (1) | HK1026067A1 (fr) |
MY (1) | MY133054A (fr) |
SG (1) | SG99280A1 (fr) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4053165B2 (ja) * | 1998-12-01 | 2008-02-27 | 株式会社フジミインコーポレーテッド | 研磨用組成物およびそれを用いた研磨方法 |
TWI227726B (en) | 1999-07-08 | 2005-02-11 | Eternal Chemical Co Ltd | Chemical-mechanical abrasive composition and method |
CN1107097C (zh) * | 1999-07-28 | 2003-04-30 | 长兴化学工业股份有限公司 | 化学机械研磨组合物及方法 |
WO2001012739A1 (fr) | 1999-08-13 | 2001-02-22 | Cabot Microelectronics Corporation | Systemes de polissage mecanico-chimique et leurs procedes d'utilisation |
US6443812B1 (en) | 1999-08-24 | 2002-09-03 | Rodel Holdings Inc. | Compositions for insulator and metal CMP and methods relating thereto |
KR100799965B1 (ko) * | 2000-07-08 | 2008-02-01 | 에포크 머티리얼 컴퍼니, 리미티드 | 화학-기계적 연마제 조성물 및 연마 방법 |
JP2002075927A (ja) * | 2000-08-24 | 2002-03-15 | Fujimi Inc | 研磨用組成物およびそれを用いた研磨方法 |
US6805812B2 (en) | 2001-10-11 | 2004-10-19 | Cabot Microelectronics Corporation | Phosphono compound-containing polishing composition and method of using same |
TWI339680B (en) * | 2002-02-19 | 2011-04-01 | Kanto Kagaku | Washing liquid composition for semiconductor substrate |
GB2393447B (en) | 2002-08-07 | 2006-04-19 | Kao Corp | Polishing composition |
US7300603B2 (en) * | 2003-08-05 | 2007-11-27 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical planarization compositions for reducing erosion in semiconductor wafers |
US7214623B2 (en) * | 2003-10-13 | 2007-05-08 | International Business Machines Corporation | Planarization system and method using a carbonate containing fluid |
CN104031609B (zh) * | 2008-07-11 | 2016-08-03 | 霓达哈斯股份有限公司 | 研磨组合物 |
CN102477261B (zh) * | 2010-11-26 | 2015-06-17 | 安集微电子(上海)有限公司 | 一种化学机械抛光液 |
CN102477258B (zh) * | 2010-11-26 | 2015-05-27 | 安集微电子(上海)有限公司 | 一种化学机械抛光液 |
KR101922289B1 (ko) * | 2015-11-26 | 2018-11-27 | 삼성에스디아이 주식회사 | Cmp 슬러리 조성물 및 이를 이용한 유기막 연마방법 |
CN106590439B (zh) * | 2016-12-07 | 2019-02-05 | 中国电子科技集团公司第十一研究所 | 一种抛光液及应用该抛光液对锑化镓晶片进行抛光的方法 |
FR3067034B1 (fr) * | 2017-06-02 | 2019-12-20 | Treliant Fang | Sels halites servant d'agents de gravure du carbure de silicium pour augmenter la vitesse d'elimination de materiau par cmp pour une tranche de sic |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0325232B1 (fr) * | 1988-01-19 | 1996-09-11 | Fujimi Incorporated | Composition de polissage |
US5783489A (en) * | 1996-09-24 | 1998-07-21 | Cabot Corporation | Multi-oxidizer slurry for chemical mechanical polishing |
US6039891A (en) * | 1996-09-24 | 2000-03-21 | Cabot Corporation | Multi-oxidizer precursor for chemical mechanical polishing |
US6068787A (en) * | 1996-11-26 | 2000-05-30 | Cabot Corporation | Composition and slurry useful for metal CMP |
US6309560B1 (en) * | 1996-12-09 | 2001-10-30 | Cabot Microelectronics Corporation | Chemical mechanical polishing slurry useful for copper substrates |
-
1998
- 1998-08-31 CN CN 98117452 patent/CN1126152C/zh not_active Expired - Lifetime
- 1998-11-27 MY MYPI9805368 patent/MY133054A/en unknown
- 1998-11-27 SG SG9805011A patent/SG99280A1/en unknown
- 1998-11-30 DE DE69831150T patent/DE69831150T2/de not_active Expired - Lifetime
- 1998-11-30 EP EP19980309812 patent/EP0984049B1/fr not_active Expired - Lifetime
-
2000
- 2000-08-22 HK HK00105270A patent/HK1026067A1/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
DE69831150T2 (de) | 2006-06-08 |
EP0984049B1 (fr) | 2005-08-10 |
DE69831150D1 (de) | 2005-09-15 |
CN1126152C (zh) | 2003-10-29 |
MY133054A (en) | 2007-10-31 |
SG99280A1 (en) | 2003-10-27 |
CN1246725A (zh) | 2000-03-08 |
EP0984049A1 (fr) | 2000-03-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PF | Patent in force | ||
PC | Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee) |
Effective date: 20070831 |