SG10201706765QA - Substrate holding apparatus and substrate polishing apparatus - Google Patents

Substrate holding apparatus and substrate polishing apparatus

Info

Publication number
SG10201706765QA
SG10201706765QA SG10201706765QA SG10201706765QA SG10201706765QA SG 10201706765Q A SG10201706765Q A SG 10201706765QA SG 10201706765Q A SG10201706765Q A SG 10201706765QA SG 10201706765Q A SG10201706765Q A SG 10201706765QA SG 10201706765Q A SG10201706765Q A SG 10201706765QA
Authority
SG
Singapore
Prior art keywords
substrate
substrate holding
polishing apparatus
holding apparatus
substrate polishing
Prior art date
Application number
SG10201706765QA
Inventor
Gunji Yoshihiro
Yasuda Hozumi
Namiki Keisuke
Yoshida Hiroshi
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2000280216A external-priority patent/JP3856634B2/en
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of SG10201706765QA publication Critical patent/SG10201706765QA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/30—Work carriers for single side lapping of plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/30—Work carriers for single side lapping of plane surfaces
    • B24B37/32—Retaining rings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
SG10201706765QA 2000-07-31 2014-07-31 Substrate holding apparatus and substrate polishing apparatus SG10201706765QA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000231892 2000-07-31
JP2000280216A JP3856634B2 (en) 2000-09-14 2000-09-14 Substrate holding device and polishing apparatus provided with the substrate holding device

Publications (1)

Publication Number Publication Date
SG10201706765QA true SG10201706765QA (en) 2017-09-28

Family

ID=26597077

Family Applications (4)

Application Number Title Priority Date Filing Date
SG200104611-9A SG129989A1 (en) 2000-07-31 2001-07-31 Substrate holding apparatus and substrate polishing apparatus
SG200501205A SG125152A1 (en) 2000-07-31 2001-07-31 Substrate holding apparatus and substrate polishing apparatus
SG200804145-1A SG157258A1 (en) 2000-07-31 2001-07-31 Substrate holding apparatus and substrate polishing apparatus
SG10201706765QA SG10201706765QA (en) 2000-07-31 2014-07-31 Substrate holding apparatus and substrate polishing apparatus

Family Applications Before (3)

Application Number Title Priority Date Filing Date
SG200104611-9A SG129989A1 (en) 2000-07-31 2001-07-31 Substrate holding apparatus and substrate polishing apparatus
SG200501205A SG125152A1 (en) 2000-07-31 2001-07-31 Substrate holding apparatus and substrate polishing apparatus
SG200804145-1A SG157258A1 (en) 2000-07-31 2001-07-31 Substrate holding apparatus and substrate polishing apparatus

Country Status (6)

Country Link
US (5) US6890402B2 (en)
EP (2) EP2085181A1 (en)
KR (1) KR100876381B1 (en)
DE (1) DE60138343D1 (en)
SG (4) SG129989A1 (en)
TW (1) TW516991B (en)

Families Citing this family (54)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
PT1098972E (en) * 1998-07-22 2010-12-14 Smithkline Beecham Ltd Protein similar to neuroendocrine-specific protein, and encoding cdna
CN101524826A (en) * 2001-05-29 2009-09-09 株式会社荏原制作所 Substrate carrier system, and method of polishing substrate
JP2005515904A (en) 2002-01-22 2005-06-02 マルチ プレイナー テクノロジーズ インコーポレイテッド Chemical mechanical polishing apparatus and method having a retaining ring with a shaped surface for slurry distribution
AU2003300375A1 (en) * 2002-10-11 2004-05-04 Semplastics, L.L.C. Retaining ring for use on a carrier of a polishing apparatus
US20040102140A1 (en) * 2002-11-21 2004-05-27 Wood Jeffrey H. Contour following end effectors for lapping/polishing
KR101063432B1 (en) * 2003-02-10 2011-09-07 가부시키가이샤 에바라 세이사꾸쇼 Substrate Holding Device and Polishing Device
WO2005005101A1 (en) * 2003-07-09 2005-01-20 Peter Wolters Surface Technologies Gmbh & Co. Kg Holder for flat workpieces, in particular semiconductor wafers for mechanochemical polishing
JP2005034959A (en) * 2003-07-16 2005-02-10 Ebara Corp Polishing device and retainer ring
US20050126708A1 (en) * 2003-12-10 2005-06-16 Applied Materials, Inc. Retaining ring with slurry transport grooves
US7118452B2 (en) * 2004-02-12 2006-10-10 The Boeing Company Pneumatically actuated flexible coupling end effectors for lapping/polishing
US7429410B2 (en) * 2004-09-20 2008-09-30 Applied Materials, Inc. Diffuser gravity support
EP3043377A1 (en) 2004-11-01 2016-07-13 Ebara Corporation Polishing apparatus
DE102005016411B4 (en) * 2005-04-08 2007-03-29 IGAM Ingenieurgesellschaft für angewandte Mechanik mbH Device for high-precision surface processing of a workpiece
US7326105B2 (en) * 2005-08-31 2008-02-05 Micron Technology, Inc. Retaining rings, and associated planarizing apparatuses, and related methods for planarizing micro-device workpieces
KR100898793B1 (en) * 2005-12-29 2009-05-20 엘지디스플레이 주식회사 Substrates bonding device for manufacturing of liquid crystal display
WO2007143566A2 (en) * 2006-06-02 2007-12-13 Applied Materials, Inc. Fast substrate loading on polishing head without membrane inflation step
US7575504B2 (en) * 2006-11-22 2009-08-18 Applied Materials, Inc. Retaining ring, flexible membrane for applying load to a retaining ring, and retaining ring assembly
JP2008177248A (en) * 2007-01-16 2008-07-31 Tokyo Seimitsu Co Ltd Retainer ring for polishing head
DE102007026292A1 (en) * 2007-06-06 2008-12-11 Siltronic Ag Process for one-sided polishing of unstructured semiconductor wafers
KR100864943B1 (en) * 2007-08-09 2008-10-23 세메스 주식회사 Apparatus for cleaning substrate
JP5042778B2 (en) * 2007-10-31 2012-10-03 信越半導体株式会社 Work polishing head and polishing apparatus equipped with the polishing head
JP5464843B2 (en) * 2007-12-03 2014-04-09 株式会社半導体エネルギー研究所 Method for manufacturing SOI substrate
US20090311945A1 (en) * 2008-06-17 2009-12-17 Roland Strasser Planarization System
JP5390807B2 (en) * 2008-08-21 2014-01-15 株式会社荏原製作所 Polishing method and apparatus
US8460067B2 (en) * 2009-05-14 2013-06-11 Applied Materials, Inc. Polishing head zone boundary smoothing
CA2693676C (en) 2010-02-18 2011-11-01 Ncs Oilfield Services Canada Inc. Downhole tool assembly with debris relief, and method for using same
JP5648954B2 (en) * 2010-08-31 2015-01-07 不二越機械工業株式会社 Polishing equipment
CA2766026C (en) 2010-10-18 2015-12-29 Ncs Oilfield Services Canada Inc. Tools and methods for use in completion of a wellbore
KR101775464B1 (en) * 2011-05-31 2017-09-07 삼성전자주식회사 Retainer ring in Chemical Mechanical Polishing machine
DE102011082777A1 (en) * 2011-09-15 2012-02-09 Siltronic Ag Method for double-sided polishing of semiconductor wafer e.g. silicon wafer, involves forming channel-shaped recesses in surface of polishing cloth of semiconductor wafer
US20130078812A1 (en) * 2011-09-23 2013-03-28 Strasbaugh Wafer Carrier with Flexible Pressure Plate
US9176173B2 (en) * 2011-11-28 2015-11-03 Texas Instruments Incorporated Method for detecting imperfect mounting of a rod-shaped metallic object in a metallic hollow shaft and a device
KR101902049B1 (en) * 2012-01-25 2018-09-27 어플라이드 머티어리얼스, 인코포레이티드 Retaining ring monitoring and control of pressure
US9050700B2 (en) * 2012-01-27 2015-06-09 Applied Materials, Inc. Methods and apparatus for an improved polishing head retaining ring
CA2798343C (en) 2012-03-23 2017-02-28 Ncs Oilfield Services Canada Inc. Downhole isolation and depressurization tool
CN102672551A (en) * 2012-05-22 2012-09-19 江南大学 Ultrasonic atomization type polishing machine
US10702972B2 (en) 2012-05-31 2020-07-07 Ebara Corporation Polishing apparatus
JP5976522B2 (en) * 2012-05-31 2016-08-23 株式会社荏原製作所 Polishing apparatus and polishing method
US9016675B2 (en) * 2012-07-06 2015-04-28 Asm Technology Singapore Pte Ltd Apparatus and method for supporting a workpiece during processing
KR20150070163A (en) * 2012-10-19 2015-06-24 다우 글로벌 테크놀로지스 엘엘씨 Device, system, and method for lifting and moving formable and/or collapsible parts
US8998676B2 (en) * 2012-10-26 2015-04-07 Applied Materials, Inc. Retaining ring with selected stiffness and thickness
JP5538601B1 (en) * 2013-08-22 2014-07-02 ミクロ技研株式会社 Polishing head and polishing processing apparatus
KR101568177B1 (en) * 2014-01-21 2015-11-11 주식회사 케이씨텍 Retainer ring of carrier head of chemical mechanical apparatus and membrane used therein
JP6336893B2 (en) * 2014-11-11 2018-06-06 株式会社荏原製作所 Polishing equipment
KR102173323B1 (en) 2014-06-23 2020-11-04 삼성전자주식회사 Carrier head, chemical mechanical polishing apparatus and wafer polishing method
DE102014212176A1 (en) * 2014-06-25 2015-12-31 Siemens Aktiengesellschaft Powder bed-based additive manufacturing process and apparatus for carrying out this process
US10510563B2 (en) * 2016-04-15 2019-12-17 Taiwan Semiconductor Manufacturing Company Ltd. Wafer carrier assembly
JP6447575B2 (en) 2016-05-23 2019-01-09 トヨタ自動車株式会社 Metal film forming method and film forming apparatus
USD839224S1 (en) * 2016-12-12 2019-01-29 Ebara Corporation Elastic membrane for semiconductor wafer polishing
CN108818294A (en) * 2018-06-26 2018-11-16 长江存储科技有限责任公司 grinding head, grinding system and grinding method
KR20200070825A (en) * 2018-12-10 2020-06-18 삼성전자주식회사 chemical mechanical polishing apparatus for controlling polishing uniformity
CN110948385B (en) * 2019-01-08 2020-08-14 华海清科股份有限公司 Elastic membrane for chemical mechanical polishing
CN110497545B (en) * 2019-08-13 2021-06-08 安徽晶天新能源科技有限责任公司 Production and processing technology of solar silicon wafer
US11325223B2 (en) * 2019-08-23 2022-05-10 Applied Materials, Inc. Carrier head with segmented substrate chuck

Family Cites Families (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5146259A (en) * 1988-06-30 1992-09-08 Asahi Kogaku Kogyo Kabushiki Kaisha Electronically controlled camera including automatic shutter speed changing apparatus
JPH0569310A (en) 1991-04-23 1993-03-23 Mitsubishi Materials Corp Device for grinding mirror surface of wafer
US5643053A (en) * 1993-12-27 1997-07-01 Applied Materials, Inc. Chemical mechanical polishing apparatus with improved polishing control
JP3257304B2 (en) 1994-11-24 2002-02-18 三菱マテリアル株式会社 Polishing equipment
JP3158934B2 (en) 1995-02-28 2001-04-23 三菱マテリアル株式会社 Wafer polishing equipment
JP3690837B2 (en) 1995-05-02 2005-08-31 株式会社荏原製作所 Polishing apparatus and method
US5643061A (en) * 1995-07-20 1997-07-01 Integrated Process Equipment Corporation Pneumatic polishing head for CMP apparatus
US5695392A (en) * 1995-08-09 1997-12-09 Speedfam Corporation Polishing device with improved handling of fluid polishing media
JP3724869B2 (en) * 1995-10-09 2005-12-07 株式会社荏原製作所 Polishing apparatus and method
US5762539A (en) 1996-02-27 1998-06-09 Ebara Corporation Apparatus for and method for polishing workpiece
US6595831B1 (en) * 1996-05-16 2003-07-22 Ebara Corporation Method for polishing workpieces using fixed abrasives
US6146259A (en) * 1996-11-08 2000-11-14 Applied Materials, Inc. Carrier head with local pressure control for a chemical mechanical polishing apparatus
US5941758A (en) * 1996-11-13 1999-08-24 Intel Corporation Method and apparatus for chemical-mechanical polishing
JPH10178087A (en) 1996-12-17 1998-06-30 Tokyo Seimitsu Co Ltd Wafer suction table
US5851140A (en) * 1997-02-13 1998-12-22 Integrated Process Equipment Corp. Semiconductor wafer polishing apparatus with a flexible carrier plate
US6056632A (en) * 1997-02-13 2000-05-02 Speedfam-Ipec Corp. Semiconductor wafer polishing apparatus with a variable polishing force wafer carrier head
US6077385A (en) * 1997-04-08 2000-06-20 Ebara Corporation Polishing apparatus
JP3724911B2 (en) * 1997-04-08 2005-12-07 株式会社荏原製作所 Polishing equipment
US5957751A (en) * 1997-05-23 1999-09-28 Applied Materials, Inc. Carrier head with a substrate detection mechanism for a chemical mechanical polishing system
US5891791A (en) * 1997-05-27 1999-04-06 Micron Technology, Inc. Contamination free source for shallow low energy junction implants
US5964653A (en) 1997-07-11 1999-10-12 Applied Materials, Inc. Carrier head with a flexible membrane for a chemical mechanical polishing system
KR19990030719A (en) * 1997-10-04 1999-05-06 로버트 에이치. 씨. 챠오 Retainer Ring for Polishing Head of CMP Equipment
US5967885A (en) * 1997-12-01 1999-10-19 Lucent Technologies Inc. Method of manufacturing an integrated circuit using chemical mechanical polishing
KR100495717B1 (en) * 1997-12-01 2005-09-30 루센트 테크놀러지스 인크 A method of manufacturing an integtated circuit using chemical mechanical polishing and a chemical mechanical polishing system
US5951382A (en) * 1997-12-01 1999-09-14 Lucent Technologies Inc. Chemical mechanical polishing carrier fixture and system
JP3006568B2 (en) * 1997-12-04 2000-02-07 日本電気株式会社 Wafer polishing apparatus and polishing method
US6116992A (en) * 1997-12-30 2000-09-12 Applied Materials, Inc. Substrate retaining ring
JPH11267857A (en) 1998-03-18 1999-10-05 Daido Steel Co Ltd Friction joining method
US6436228B1 (en) * 1998-05-15 2002-08-20 Applied Materials, Inc. Substrate retainer
JPH11333712A (en) * 1998-05-21 1999-12-07 Nikon Corp Polishing head and polishing device using it
US6146260A (en) * 1998-08-03 2000-11-14 Promos Technology, Inc. Polishing machine
JP2000124173A (en) 1998-10-16 2000-04-28 Hitachi Ltd Manufacture for semiconductor device
US6159073A (en) * 1998-11-02 2000-12-12 Applied Materials, Inc. Method and apparatus for measuring substrate layer thickness during chemical mechanical polishing
US6422927B1 (en) * 1998-12-30 2002-07-23 Applied Materials, Inc. Carrier head with controllable pressure and loading area for chemical mechanical polishing
JP2000223447A (en) 1999-02-01 2000-08-11 Nikon Corp Polishing head, polishing device, and polishing method
TW467795B (en) * 1999-03-15 2001-12-11 Mitsubishi Materials Corp Wafer transporting device, wafer polishing device and method for making wafers
US6227955B1 (en) * 1999-04-20 2001-05-08 Micron Technology, Inc. Carrier heads, planarizing machines and methods for mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies
US6450868B1 (en) * 2000-03-27 2002-09-17 Applied Materials, Inc. Carrier head with multi-part flexible membrane
US6722965B2 (en) * 2000-07-11 2004-04-20 Applied Materials Inc. Carrier head with flexible membranes to provide controllable pressure and loading area
US6857945B1 (en) * 2000-07-25 2005-02-22 Applied Materials, Inc. Multi-chamber carrier head with a flexible membrane
US6419567B1 (en) * 2000-08-14 2002-07-16 Semiconductor 300 Gmbh & Co. Kg Retaining ring for chemical-mechanical polishing (CMP) head, polishing apparatus, slurry cycle system, and method
US6527625B1 (en) * 2000-08-31 2003-03-04 Multi-Planar Technologies, Inc. Chemical mechanical polishing apparatus and method having a soft backed polishing head
CN103945881B (en) * 2011-09-27 2016-05-18 Shl集团有限责任公司 There is initial lock state, the centre note medical delivery device to state and drug delivery state

Also Published As

Publication number Publication date
US20080047667A1 (en) 2008-02-28
US20080299880A1 (en) 2008-12-04
SG129989A1 (en) 2007-03-20
US7897007B2 (en) 2011-03-01
SG125152A1 (en) 2006-09-29
TW516991B (en) 2003-01-11
US20050072527A1 (en) 2005-04-07
US20020017365A1 (en) 2002-02-14
US20080066862A1 (en) 2008-03-20
EP2085181A1 (en) 2009-08-05
EP1177859B1 (en) 2009-04-15
EP1177859A2 (en) 2002-02-06
EP1177859A3 (en) 2003-10-15
SG157258A1 (en) 2009-12-29
KR100876381B1 (en) 2008-12-29
DE60138343D1 (en) 2009-05-28
KR20020010881A (en) 2002-02-06
US6890402B2 (en) 2005-05-10

Similar Documents

Publication Publication Date Title
SG10201706765QA (en) Substrate holding apparatus and substrate polishing apparatus
SG97201A1 (en) Substrate holding apparatus
SG96605A1 (en) Substrate holding apparatus and exposure apparatus including substrate holding apparatus
AU2002354440A1 (en) Substrate holding device and polishing device
SG87886A1 (en) Chemical mechanical polishing processes and components
EP1496543A4 (en) Polishing device and substrate processing device
DE60036829D1 (en) Wafer polishing apparatus and method
SG85153A1 (en) Polishing composition and polishing process
GB2368723B (en) Electro-static chucking mechanism and surface processing apparatus
EP1346798A4 (en) Polishing device
AU2000270415A1 (en) Polishing apparatus comprising pad and polishing method using the same
SG94358A1 (en) Polishing composition and method
SG99868A1 (en) Polishing apparatus and dressing method
GB0108751D0 (en) Polishing apparatus and method
EP1155777A4 (en) Work polishing method and work polishing device
PL361227A1 (en) Processing substrate and/or support surface
SG99901A1 (en) Polishing apparatus
GB0226397D0 (en) Grinding apparatus
SG97860A1 (en) Polishing apparatus
GB9911801D0 (en) Polishing device and polishing method
EP1108499A4 (en) Polishing device and polishing method
GB2361447B (en) Wafer polishing apparatus
TW461691U (en) Fixing and holding apparatus
GB0103535D0 (en) Polishing apparatus
GB2361448B (en) Wafer polishing apparatus