GR3003964T3 - - Google Patents

Info

Publication number
GR3003964T3
GR3003964T3 GR910401675T GR910401675T GR3003964T3 GR 3003964 T3 GR3003964 T3 GR 3003964T3 GR 910401675 T GR910401675 T GR 910401675T GR 910401675 T GR910401675 T GR 910401675T GR 3003964 T3 GR3003964 T3 GR 3003964T3
Authority
GR
Greece
Prior art keywords
solutions
stabilized
strippers
etchants
developers
Prior art date
Application number
GR910401675T
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GR3003964T3 publication Critical patent/GR3003964T3/el

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
    • G03C5/00—Photographic processes or agents therefor; Regeneration of such processing agents
    • G03C5/18—Diazo-type processes, e.g. thermal development, or agents therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
    • H01L21/02052—Wet cleaning only
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/32—Organic compounds containing nitrogen
    • C11D7/3209—Amines or imines with one to four nitrogen atoms; Quaternized amines
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/32—Organic compounds containing nitrogen
    • C11D7/3218—Alkanolamines or alkanolimines
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/32—Alkaline compositions
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/32—Liquid compositions therefor, e.g. developers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor
    • G03F7/422—Stripping or agents therefor using liquids only
    • G03F7/425—Stripping or agents therefor using liquids only containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
    • H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
    • H01L21/32134—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by liquid etching only

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • General Chemical & Material Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Detergent Compositions (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Acyclic And Carbocyclic Compounds In Medicinal Compositions (AREA)
GR910401675T 1986-07-18 1992-03-05 GR3003964T3 (el)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/887,674 US4686002A (en) 1986-07-18 1986-07-18 Stabilized choline base solutions

Publications (1)

Publication Number Publication Date
GR3003964T3 true GR3003964T3 (el) 1993-03-16

Family

ID=25391630

Family Applications (1)

Application Number Title Priority Date Filing Date
GR910401675T GR3003964T3 (el) 1986-07-18 1992-03-05

Country Status (9)

Country Link
US (1) US4686002A (el)
EP (1) EP0253675B1 (el)
JP (1) JP2572069B2 (el)
KR (1) KR950007339B1 (el)
AT (1) ATE73126T1 (el)
CA (1) CA1306660C (el)
DE (1) DE3776995D1 (el)
ES (1) ES2030430T3 (el)
GR (1) GR3003964T3 (el)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3638629A1 (de) * 1986-11-11 1988-05-26 Schering Ag Mittel und verfahren zur entfernung von fotoresisten
DE3740369A1 (de) * 1987-11-25 1989-06-08 Schering Ag Verfahren zur vorbehandlung von kunststoffen
US4931103A (en) * 1988-08-11 1990-06-05 E. I. Du Pont De Nemours And Company Tricholine phosphate surface treating agent
US4964919A (en) * 1988-12-27 1990-10-23 Nalco Chemical Company Cleaning of silicon wafers with an aqueous solution of KOH and a nitrogen-containing compound
JP2653511B2 (ja) * 1989-03-30 1997-09-17 株式会社東芝 半導体装置の洗浄方法及びその洗浄装置
US5110367A (en) * 1990-04-12 1992-05-05 Mallinckrodt Specialty Chemicals Company Method for precision cleaning of medical devices
AU7659391A (en) * 1990-04-12 1991-11-11 Mallinckrodt Specialty Chemicals Company Method for precision cleaning of medical devices
JP2906590B2 (ja) * 1990-06-14 1999-06-21 三菱瓦斯化学株式会社 アルミニウム配線半導体基板の表面処理剤
US5139607A (en) * 1991-04-23 1992-08-18 Act, Inc. Alkaline stripping compositions
CA2081220A1 (en) * 1991-10-29 1993-04-30 Llandro Castillo Santos Single-phase developers for lithographic printing elements
US5554320A (en) * 1993-11-22 1996-09-10 Yianakopoulos; Georges Liquid cleaning compositions
US5683192A (en) * 1996-04-15 1997-11-04 Kilfoil; Dennis C. Toothbrush system with an internal water delivery system operable from a shower
JPH10289891A (ja) * 1997-04-11 1998-10-27 Mitsubishi Gas Chem Co Inc 半導体回路用洗浄剤及びそれを用いた半導体回路の製造方法
US6348239B1 (en) 2000-04-28 2002-02-19 Simon Fraser University Method for depositing metal and metal oxide films and patterned films
US6417112B1 (en) 1998-07-06 2002-07-09 Ekc Technology, Inc. Post etch cleaning composition and process for dual damascene system
AU2003256748B2 (en) * 2001-08-22 2007-12-06 Instrumentation Laboratory Company Compositions and method for reducing the rate of oxygen loss from aqueous solutions
US20030073242A1 (en) * 2001-10-11 2003-04-17 Kitchens Keith G. Apparatus for controlling stripping solutions methods thereof
US20040074519A1 (en) * 2002-10-17 2004-04-22 Moore John C. Metal safe stabilized stripper for removing cured polymeric layers and negative tone acrylic photoresists
EP1781594A1 (en) * 2004-07-09 2007-05-09 Akzo Nobel N.V. Composition comprising choline hydroxide and process for preparing the same
CA2855935A1 (en) * 2011-11-22 2013-05-30 Taminco N.V. Stabilized choline solutions and methods for preparing the same
RU2678972C2 (ru) 2013-04-11 2019-02-05 Таминко Усовершенствованный способ получения холингидроксида
US9297081B2 (en) * 2014-02-21 2016-03-29 Ecolab Usa Inc. Use of neutralizing agent in olefin or styrene production
JP6296974B2 (ja) * 2014-12-25 2018-03-20 四日市合成株式会社 安定化四級アンモニウム水酸化物水溶液及びその製造方法
US11492277B2 (en) 2015-07-29 2022-11-08 Ecolab Usa Inc. Heavy amine neutralizing agents for olefin or styrene production

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB700115A (en) * 1951-03-16 1953-11-25 Evan Jones Improvements in disinfectants and deodorizers
US2823166A (en) * 1954-11-17 1958-02-11 Walter H Hoffman Choline ascorbate, methods for producing same, and compositions thereof
US3897485A (en) * 1966-10-18 1975-07-29 J Berthier Lab Choline compounds
US3549370A (en) * 1966-11-23 1970-12-22 Hunt Chem Corp Philip A Quaternary ammonium bisulfites,sulfites or pyrosulfites as developer preservatives
NL7007023A (el) * 1969-05-16 1970-11-18
US3947491A (en) * 1972-03-24 1976-03-30 The Purdue Frederick Company Stabilized choline salicylate compounds
US4339340A (en) * 1975-11-26 1982-07-13 Tokyo Shibaura Electric Co., Ltd. Surface-treating agent adapted for intermediate products of a semiconductor device
GB1573206A (en) * 1975-11-26 1980-08-20 Tokyo Shibaura Electric Co Method of trating surfaces of intermediate products obtained in the manufacture of semiconductor devices
JPS5351970A (en) * 1976-10-21 1978-05-11 Toshiba Corp Manufacture for semiconductor substrate
US4294911A (en) * 1979-06-18 1981-10-13 Eastman Kodak Company Development of light-sensitive quinone diazide compositions using sulfite stabilizer
IT1141651B (it) * 1980-06-24 1986-10-08 Giuseppe Riva Procedimento per la stabilizzazione di vitamine
US4425202A (en) * 1982-08-18 1984-01-10 Thiokol Corporation Method of making and color stabilization of choline base
JPS59182444A (ja) * 1983-04-01 1984-10-17 Sumitomo Chem Co Ltd ポジ型フオトレジストの改良現像液
US4464461A (en) * 1983-07-22 1984-08-07 Eastman Kodak Company Development of light-sensitive quinone diazide compositions

Also Published As

Publication number Publication date
DE3776995D1 (de) 1992-04-09
EP0253675B1 (en) 1992-03-04
KR950007339B1 (ko) 1995-07-10
CA1306660C (en) 1992-08-25
US4686002A (en) 1987-08-11
JPS6354344A (ja) 1988-03-08
EP0253675A1 (en) 1988-01-20
ATE73126T1 (de) 1992-03-15
KR880002049A (ko) 1988-04-28
ES2030430T3 (es) 1992-11-01
JP2572069B2 (ja) 1997-01-16

Similar Documents

Publication Publication Date Title
GR3003964T3 (el)
JPS5424643A (en) Method and apparatus for liquid developing
GB2283016A (en) Scavenging of hydrogen sulphide
ATE64887T1 (de) Verfahren zum holzschutz.
JPS5236650A (en) Method for treating polychlorobiphenyl
JPS53106387A (en) Washing method for membrane separation apparatus
JPS5491962A (en) Removal and recovery of cyano compound from waste water
JPS562002A (en) Control circuit
JPS53101975A (en) Treating method of semiconductor substrates
JPS5213776A (en) Photo-resist pealing method
JPS5295085A (en) Terminal block
JPS5239367A (en) Method for surface treatment of semiconductor substrate
JPS5289755A (en) Stopping device for parts having circular cross section
JPS544245A (en) Washing equipment
JPS5339872A (en) Etching method of wafers
JPS5340279A (en) Surface processing method for semiconductor element substrate
JPS53142168A (en) Reproductive use of semiconductor substrate
JPS6453804A (en) Method of impregnating-treating wood
JPS5431608A (en) Water suction mechanism for washer
JPS5422172A (en) Etching method for multiple semiconductor
JPS5426340A (en) Nail-polish remover
JPS57135800A (en) Surface treatment of crystal of gallium and arsenic compound
JPS5433363A (en) Treatment of waste water containing emulsified oil
JPS534351A (en) Process for treatment of reducing substance
JPS51138056A (en) Treating method of oil-containing waste liquor