GB995399A - Improvements in or relating to the refining of semiconductor materials - Google Patents

Improvements in or relating to the refining of semiconductor materials

Info

Publication number
GB995399A
GB995399A GB47918/63A GB4791863A GB995399A GB 995399 A GB995399 A GB 995399A GB 47918/63 A GB47918/63 A GB 47918/63A GB 4791863 A GB4791863 A GB 4791863A GB 995399 A GB995399 A GB 995399A
Authority
GB
United Kingdom
Prior art keywords
zone
rod
melting
coil
produced
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB47918/63A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dow Silicones Corp
Original Assignee
Dow Corning Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dow Corning Corp filed Critical Dow Corning Corp
Publication of GB995399A publication Critical patent/GB995399A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating
    • H05B6/22—Furnaces without an endless core
    • H05B6/30—Arrangements for remelting or zone melting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Manufacture And Refinement Of Metals (AREA)

Abstract

995,399. Zone-melting. DOW CORNING CORPORATION. Dec. 4, 1963 [Jan. 8, 1963], No. 47918/63. Heading B1S. A monocrystalline rod of silicon having a diameter of at least 1# inches is produced by floating zone-melting using a planar induction coil 52, Figs. 2 and 3, having an electrically conductive split ring 54 brazed or hard soldered at 56 to the inside of the turn of the coil having the smallest diameter. The coil may be an internally cooled hollow silver tube and the split ring may be of silver or platinum. A thick rod 32 may be produced from a thin rod, Fig. 4. The two ends of the rod being zone-melted may be rotated in opposite, directions. The zone-melting may be effected in an externally cooled evacuated chamber.
GB47918/63A 1963-01-08 1963-12-04 Improvements in or relating to the refining of semiconductor materials Expired GB995399A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US250148A US3249406A (en) 1963-01-08 1963-01-08 Necked float zone processing of silicon rod

Publications (1)

Publication Number Publication Date
GB995399A true GB995399A (en) 1965-06-16

Family

ID=22946486

Family Applications (2)

Application Number Title Priority Date Filing Date
GB279/65A Expired GB1022790A (en) 1961-08-02 1961-08-02 Improvements in or relating to the refining of semiconductor materials
GB47918/63A Expired GB995399A (en) 1963-01-08 1963-12-04 Improvements in or relating to the refining of semiconductor materials

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB279/65A Expired GB1022790A (en) 1961-08-02 1961-08-02 Improvements in or relating to the refining of semiconductor materials

Country Status (6)

Country Link
US (1) US3249406A (en)
BE (1) BE642180A (en)
CH (1) CH421911A (en)
DE (1) DE1195420B (en)
GB (2) GB1022790A (en)
NL (2) NL302045A (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3424886A (en) * 1966-10-27 1969-01-28 Ajax Magnethermic Corp Induction heating
US3489875A (en) * 1966-10-27 1970-01-13 Ajax Magnethermic Corp Apparatus for induction heating of slabs
DE1802524B1 (en) * 1968-10-11 1970-06-04 Siemens Ag Device for crucible-free zone melting of a crystalline rod, in particular a semiconductor rod
US3612806A (en) * 1970-02-26 1971-10-12 Park Ohio Industries Inc Inductor for internal heating
US3989468A (en) * 1973-11-22 1976-11-02 Siemens Aktiengesellschaft Apparatus for crucible-free zone melting of semiconductor crystal rods
USRE29824E (en) * 1973-11-22 1978-11-07 Siemens Aktiengesellschaft Apparatus for crucible-free zone melting of semiconductor crystal rods
US4045181A (en) * 1976-12-27 1977-08-30 Monsanto Company Apparatus for zone refining
JP2759604B2 (en) * 1993-10-21 1998-05-28 信越半導体株式会社 Induction heating coil
JP2022024897A (en) * 2020-07-28 2022-02-09 株式会社ノベルクリスタルテクノロジー Apparatus and method for manufacturing single crystal

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL69280C (en) * 1944-10-18
US2481008A (en) * 1945-06-27 1949-09-06 Induction Heating Corp Multiturn split inductor
US2481071A (en) * 1945-07-25 1949-09-06 Chrysler Corp High-frequency induction heating device
DE1031893B (en) * 1952-08-01 1958-06-12 Standard Elektrik Ag Process for the outer shaping of semiconductor arrangements, in particular for rectifier and amplifier purposes with semiconductors made of germanium or silicon
US2972525A (en) * 1953-02-26 1961-02-21 Siemens Ag Crucible-free zone melting method and apparatus for producing and processing a rod-shaped body of crystalline substance, particularly semiconductor substance
US2825120A (en) * 1954-05-11 1958-03-04 Eastman Kodak Co Synthetic filament
GB831305A (en) * 1955-01-11 1960-03-30 Ass Elect Ind Improvements relating to the refining of heavy metals by zone melting
US3002821A (en) * 1956-10-22 1961-10-03 Texas Instruments Inc Means for continuous fabrication of graded junction transistors
US3046100A (en) * 1958-01-20 1962-07-24 Du Pont Zone melting of semiconductive material
US3065062A (en) * 1958-06-03 1962-11-20 Wacker Chemie Gmbh Process for purifying and recrystallizing metals, non-metals, their compounds or alloys
US3023091A (en) * 1959-03-02 1962-02-27 Raytheon Co Methods of heating and levitating molten material
NL249428A (en) * 1959-03-16
NL108958C (en) * 1959-05-29
US2990259A (en) * 1959-09-03 1961-06-27 Paul L Moody Syringe-type single-crystal furnace
US3100250A (en) * 1961-04-07 1963-08-06 Herczog Andrew Zone melting apparatus

Also Published As

Publication number Publication date
NL126241C (en)
BE642180A (en) 1964-07-17
GB1022790A (en) 1966-03-16
CH421911A (en) 1966-10-15
DE1195420B (en) 1965-06-24
NL302045A (en)
US3249406A (en) 1966-05-03

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