GB9815286D0 - Method of manufacturing semiconductor device - Google Patents
Method of manufacturing semiconductor deviceInfo
- Publication number
- GB9815286D0 GB9815286D0 GBGB9815286.1A GB9815286A GB9815286D0 GB 9815286 D0 GB9815286 D0 GB 9815286D0 GB 9815286 A GB9815286 A GB 9815286A GB 9815286 D0 GB9815286 D0 GB 9815286D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- semiconductor device
- manufacturing semiconductor
- manufacturing
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
- H01L28/82—Electrodes with an enlarged surface, e.g. formed by texturisation
- H01L28/84—Electrodes with an enlarged surface, e.g. formed by texturisation being a rough surface, e.g. using hemispherical grains
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Memories (AREA)
- Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9190044A JPH1140763A (en) | 1997-07-15 | 1997-07-15 | Manufacture of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
GB9815286D0 true GB9815286D0 (en) | 1998-09-09 |
GB2327299A GB2327299A (en) | 1999-01-20 |
Family
ID=16251428
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB9815286A Withdrawn GB2327299A (en) | 1997-07-15 | 1998-07-14 | Method of manufacturing silicon hemispherical grains |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPH1140763A (en) |
KR (1) | KR19990013845A (en) |
CN (1) | CN1210362A (en) |
GB (1) | GB2327299A (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6764916B1 (en) | 1999-03-23 | 2004-07-20 | Hitachi Kokusai Electric Inc. | Manufacturing method for semiconductor device |
JP2001024165A (en) * | 1999-07-06 | 2001-01-26 | Hitachi Ltd | Semiconductor device and its manufacture and semiconductor production device |
US6159874A (en) * | 1999-10-27 | 2000-12-12 | Infineon Technologies North America Corp. | Method of forming a hemispherical grained capacitor |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2833545B2 (en) * | 1995-03-06 | 1998-12-09 | 日本電気株式会社 | Method for manufacturing semiconductor device |
-
1997
- 1997-07-15 JP JP9190044A patent/JPH1140763A/en active Pending
-
1998
- 1998-07-14 KR KR1019980028367A patent/KR19990013845A/en not_active Application Discontinuation
- 1998-07-14 GB GB9815286A patent/GB2327299A/en not_active Withdrawn
- 1998-07-15 CN CN98103380A patent/CN1210362A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
JPH1140763A (en) | 1999-02-12 |
CN1210362A (en) | 1999-03-10 |
KR19990013845A (en) | 1999-02-25 |
GB2327299A (en) | 1999-01-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |