GB923153A - Semiconductor strain gauge - Google Patents

Semiconductor strain gauge

Info

Publication number
GB923153A
GB923153A GB23175/61A GB2317561A GB923153A GB 923153 A GB923153 A GB 923153A GB 23175/61 A GB23175/61 A GB 23175/61A GB 2317561 A GB2317561 A GB 2317561A GB 923153 A GB923153 A GB 923153A
Authority
GB
United Kingdom
Prior art keywords
wafer
strip
sensor strips
strips
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB23175/61A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fairchild Semiconductor Corp
Original Assignee
Fairchild Semiconductor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fairchild Semiconductor Corp filed Critical Fairchild Semiconductor Corp
Publication of GB923153A publication Critical patent/GB923153A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Pressure Sensors (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
GB23175/61A 1960-08-18 1961-06-27 Semiconductor strain gauge Expired GB923153A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US5051060A 1960-08-18 1960-08-18

Publications (1)

Publication Number Publication Date
GB923153A true GB923153A (en) 1963-04-10

Family

ID=21965650

Family Applications (1)

Application Number Title Priority Date Filing Date
GB23175/61A Expired GB923153A (en) 1960-08-18 1961-06-27 Semiconductor strain gauge

Country Status (2)

Country Link
CH (1) CH391326A (de)
GB (1) GB923153A (de)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3303452A (en) * 1964-05-12 1967-02-07 Textron Electronics Inc Piezoresistive device
US3329023A (en) * 1964-08-03 1967-07-04 Schaevitz Bytrex Inc Semiconductor strain gage transducers
US3337780A (en) * 1964-05-21 1967-08-22 Bell & Howell Co Resistance oriented semiconductor strain gage with barrier isolated element
DE1514082A1 (de) * 1964-02-13 1969-09-18 Hitachi Ltd Halbleitervorrichtung und Verfahren zu ihrer Herstellung
US3629667A (en) * 1969-03-14 1971-12-21 Ibm Semiconductor resistor with uniforms current distribution at its contact surface
US3994009A (en) * 1973-02-12 1976-11-23 Honeywell Inc. Stress sensor diaphragms over recessed substrates
US4151502A (en) * 1976-04-19 1979-04-24 Hitachi, Ltd. Semiconductor transducer

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1514082A1 (de) * 1964-02-13 1969-09-18 Hitachi Ltd Halbleitervorrichtung und Verfahren zu ihrer Herstellung
US3643137A (en) * 1964-02-13 1972-02-15 Hitachi Ltd Semiconductor devices
US3303452A (en) * 1964-05-12 1967-02-07 Textron Electronics Inc Piezoresistive device
US3337780A (en) * 1964-05-21 1967-08-22 Bell & Howell Co Resistance oriented semiconductor strain gage with barrier isolated element
US3329023A (en) * 1964-08-03 1967-07-04 Schaevitz Bytrex Inc Semiconductor strain gage transducers
US3629667A (en) * 1969-03-14 1971-12-21 Ibm Semiconductor resistor with uniforms current distribution at its contact surface
US3994009A (en) * 1973-02-12 1976-11-23 Honeywell Inc. Stress sensor diaphragms over recessed substrates
US4151502A (en) * 1976-04-19 1979-04-24 Hitachi, Ltd. Semiconductor transducer

Also Published As

Publication number Publication date
CH391326A (de) 1965-04-30

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