GB883376A - Improvements in and relating to high vacuum plants - Google Patents

Improvements in and relating to high vacuum plants

Info

Publication number
GB883376A
GB883376A GB11186/60A GB1118660A GB883376A GB 883376 A GB883376 A GB 883376A GB 11186/60 A GB11186/60 A GB 11186/60A GB 1118660 A GB1118660 A GB 1118660A GB 883376 A GB883376 A GB 883376A
Authority
GB
United Kingdom
Prior art keywords
bell
space
high vacuum
articles
casing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB11186/60A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OC Oerlikon Balzers AG
Original Assignee
Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers AG filed Critical Balzers AG
Publication of GB883376A publication Critical patent/GB883376A/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
    • B65G47/24—Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F9/00—Diffusion pumps
    • F04F9/04—Diffusion pumps in combination with fore pumps, e.g. use of isolating valves

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • General Engineering & Computer Science (AREA)
  • Agricultural Chemicals And Associated Chemicals (AREA)
  • Drying Of Solid Materials (AREA)
  • Furnace Details (AREA)
GB11186/60A 1959-04-07 1960-03-30 Improvements in and relating to high vacuum plants Expired GB883376A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH7164159A CH367269A (de) 1959-04-07 1959-04-07 Verfahren zum Betrieb von Hochvakuumanlagen, deren Rezipient zwecks Beschickung und Entnahme der im Vakuum zu behandelnden Gegenstände geöffnet werden kann, und Vakuumanlage zur Durchführung dieses Verfahrens

Publications (1)

Publication Number Publication Date
GB883376A true GB883376A (en) 1961-11-29

Family

ID=4531152

Family Applications (1)

Application Number Title Priority Date Filing Date
GB11186/60A Expired GB883376A (en) 1959-04-07 1960-03-30 Improvements in and relating to high vacuum plants

Country Status (4)

Country Link
US (1) US3088219A (enrdf_load_stackoverflow)
CH (1) CH367269A (enrdf_load_stackoverflow)
GB (1) GB883376A (enrdf_load_stackoverflow)
NL (1) NL105775C (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3253351A (en) * 1963-02-05 1966-05-31 Bettanin Giuseppe Vacuum-drying apparatus
US3293773A (en) * 1964-08-24 1966-12-27 Vir Tis Company Inc Freeze drying apparatus
US3932944A (en) * 1974-09-12 1976-01-20 Mitsumasa Chiba Method and apparatus for preventing waterdrops inside a sealed instrument

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1580957A (en) * 1921-10-27 1926-04-13 Gen Motors Corp Coating and baking apparatus for automobile parts and the like
US1799248A (en) * 1924-11-10 1931-04-07 Willard Storage Battery Co Method of drying articles
US1866346A (en) * 1929-03-05 1932-07-05 Gen Electric Drying treatment
US2307802A (en) * 1941-06-24 1943-01-12 Reichel Lab High vacuum, low temperature drying apparatus
US2465963A (en) * 1945-06-02 1949-03-29 Borden Co Removing ultimate moisture from powdered products
US2858795A (en) * 1954-05-24 1958-11-04 British Insulated Callenders Apparatus for drying and impregnating small articles
US2890878A (en) * 1956-12-28 1959-06-16 Nat Res Corp Apparatus for annealing in a high vacuum

Also Published As

Publication number Publication date
NL105775C (enrdf_load_stackoverflow) 1963-03-15
US3088219A (en) 1963-05-07
CH367269A (de) 1963-02-15

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