GB815062A - Improvements relating to electron lens apparatus - Google Patents
Improvements relating to electron lens apparatusInfo
- Publication number
- GB815062A GB815062A GB57655A GB57655A GB815062A GB 815062 A GB815062 A GB 815062A GB 57655 A GB57655 A GB 57655A GB 57655 A GB57655 A GB 57655A GB 815062 A GB815062 A GB 815062A
- Authority
- GB
- United Kingdom
- Prior art keywords
- poles
- section
- electron lens
- jan
- corrected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000004075 alteration Effects 0.000 abstract 2
- 201000009310 astigmatism Diseases 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
Abstract
815,062. Electron lenses. ASSOCIATED ELECTRICAL INDUSTRIES Ltd. Jan. 3, 1956 [Jan. 7, 1955], No. 576/55. Class 39(1). An electron lens system for correcting chromatic aberration, e.g. in a beam of linear cross-section, comprises, Fig. 1, a pair of positive electrostatic poles for outwardly deflecting the beam and a pair of negative poles for inwardly deflecting the beam. A beam of circular cross-section is corrected in mutually perpendicular directions by two sets of correcting poles C 1 , C 2 , Fig. 2, acting successively on the beam S 1 is a 4-pole system for imparting astigmatism to the beam and S 2 is a similar system for restoring the circular cross-section. The poles may be spheres, wedges or laminae. Spherical aberration may also be corrected in the manner described in Specification 794,014.
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB815062A true GB815062A (en) | 1959-06-17 |
Family
ID=1593395
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB57655A Expired GB815062A (en) | 1955-01-07 | Improvements relating to electron lens apparatus |
Country Status (1)
| Country | Link |
|---|---|
| GB (1) | GB815062A (en) |
-
1955
- 1955-01-07 GB GB57655A patent/GB815062A/en not_active Expired
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