GB852725A - Improvements relating to an apparatus for producing a beam of charged particles for working material - Google Patents

Improvements relating to an apparatus for producing a beam of charged particles for working material

Info

Publication number
GB852725A
GB852725A GB20333/59A GB2033359A GB852725A GB 852725 A GB852725 A GB 852725A GB 20333/59 A GB20333/59 A GB 20333/59A GB 2033359 A GB2033359 A GB 2033359A GB 852725 A GB852725 A GB 852725A
Authority
GB
United Kingdom
Prior art keywords
lenses
pole
cylindrical lens
produce
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB20333/59A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss AG
Original Assignee
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss AG filed Critical Carl Zeiss AG
Publication of GB852725A publication Critical patent/GB852725A/en
Expired legal-status Critical Current

Links

Classifications

    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B3/00Apparatus for testing the eyes; Instruments for examining the eyes
    • A61B3/10Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
    • A61B3/13Ophthalmic microscopes
    • A61B3/135Slit-lamp microscopes
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B3/00Apparatus for testing the eyes; Instruments for examining the eyes
    • A61B3/10Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
    • A61B3/16Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions for measuring intraocular pressure, e.g. tonometers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002Details
    • H01J37/3007Electron or ion-optical systems
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S164/00Metal founding
    • Y10S164/05Electron beam

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Medical Informatics (AREA)
  • Animal Behavior & Ethology (AREA)
  • Ophthalmology & Optometry (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Biophysics (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Laser Beam Processing (AREA)

Abstract

852,725. Electron beam apparatus. ZEISSSTIFTUNG, C., [trading as ZEISS, C. [Firm of]]. June 15, 1959 [June 20, 1958], No. 20333/59. Class 39(1). Apparatus for working material with a high intensity beam of charged particles includes at least one electromagnetic cylindrical lens, corrected for spherical aberration, to focus a beam of large focal aperture in an impinging beam with a sharply defined periphery at which the beam intensity decreases sharply. The apparatus includes an elongated cathode 1, Fig. 1, a control grid 2, an anode 3 and an electromagnetic cylindrical lens 4 to produce an elongated spot on the work piece 7. A further electromagnetic cylindrical lens 6 is provided to produce a rotating field in order to rotate the beam and give a working beam of effectively circular cross-section, or a second electromagnetic cylindrical lens 5, with its axis perpendicular to that of the lens 4, may be used to produce a spot of clover leaf outline. Lenses 4 and 5 are 4-pole lenses, Fig. 2, with hyperbolic pole pieces 9, 18, 16 and 17 which are embedded in synthetic resin filling material 19, or lenses 4 and 5 may be combined into a single 8-pole lens. The lenses are corrected for spherical aberration by appropriate shaping of the pole-pieces or by using auxiliary ferromagnetic members.
GB20333/59A 1958-06-20 1959-06-15 Improvements relating to an apparatus for producing a beam of charged particles for working material Expired GB852725A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEZ6718A DE1064168B (en) 1958-06-20 1958-06-20 Device for generating and shaping a charge carrier beam

Publications (1)

Publication Number Publication Date
GB852725A true GB852725A (en) 1960-11-02

Family

ID=40433782

Family Applications (1)

Application Number Title Priority Date Filing Date
GB20333/59A Expired GB852725A (en) 1958-06-20 1959-06-15 Improvements relating to an apparatus for producing a beam of charged particles for working material

Country Status (5)

Country Link
US (1) US3028491A (en)
CH (1) CH372116A (en)
DE (1) DE1064168B (en)
FR (1) FR1227633A (en)
GB (1) GB852725A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2164125A1 (en) * 1971-12-23 1973-06-28 Air Liquide WORKING CANNON FOR WELDING USING ELECTRON BOMB ELEMENT

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3210171A (en) * 1960-09-12 1965-10-05 Sylvania Electric Prod Method of supplying heat of fusion to glass-to-glass seal
US3340377A (en) * 1962-07-12 1967-09-05 Jeol Ltd Method of treating material by a charged beam
US3191028A (en) * 1963-04-22 1965-06-22 Albert V Crewe Scanning electron microscope
US3482136A (en) * 1966-04-13 1969-12-02 High Voltage Engineering Corp Charged particle beam spreader system including three in-line quadrapole magnetic lenses
US3621327A (en) * 1969-12-29 1971-11-16 Ford Motor Co Method of controlling the intensity of an electron beam
JPS5435078B1 (en) * 1970-07-30 1979-10-31
US4736106A (en) * 1986-10-08 1988-04-05 Michigan State University Method and apparatus for uniform charged particle irradiation of a surface
US4767930A (en) * 1987-03-31 1988-08-30 Siemens Medical Laboratories, Inc. Method and apparatus for enlarging a charged particle beam
DE3901980C2 (en) * 1989-01-24 2001-06-28 Ceos Gmbh Multipole element and method for producing a multipole element
EP0660373A3 (en) * 1993-12-21 1996-11-20 Hughes Aircraft Co Xenon arc lamp point light source.

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE712434C (en) * 1938-01-26 1941-10-18 Siemens & Halske Akt Ges Process for the production of pure surface filters and ultrafilters
DE903017C (en) * 1951-01-31 1954-02-01 Sueddeutsche Lab G M B H Manufacture of small balls from high-fusible materials
GB739068A (en) * 1952-08-09 1955-10-26 Emi Ltd Improvements in or relating to cathode ray tube arrangements
US2883569A (en) * 1956-01-24 1959-04-21 Herman F Kaiser Magnetic quadrupole focusing system
US2919381A (en) * 1956-07-25 1959-12-29 Farrand Optical Co Inc Electron lens
US2915662A (en) * 1956-08-24 1959-12-01 Nat Video Corp Centering arrangement and method for beams of cathode ray tubes

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2164125A1 (en) * 1971-12-23 1973-06-28 Air Liquide WORKING CANNON FOR WELDING USING ELECTRON BOMB ELEMENT

Also Published As

Publication number Publication date
CH372116A (en) 1963-09-30
US3028491A (en) 1962-04-03
DE1064168B (en) 1959-08-27
FR1227633A (en) 1960-08-22

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