GB779462A - Improvements in or relating to electron lenses - Google Patents

Improvements in or relating to electron lenses

Info

Publication number
GB779462A
GB779462A GB6789/55A GB678955A GB779462A GB 779462 A GB779462 A GB 779462A GB 6789/55 A GB6789/55 A GB 6789/55A GB 678955 A GB678955 A GB 678955A GB 779462 A GB779462 A GB 779462A
Authority
GB
United Kingdom
Prior art keywords
electrostatic
magnetic
lens
inserts
tubular inserts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB6789/55A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electrical Industries Ltd
Original Assignee
Philips Electrical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electrical Industries Ltd filed Critical Philips Electrical Industries Ltd
Publication of GB779462A publication Critical patent/GB779462A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/56—Arrangements for controlling cross-section of ray or beam; Arrangements for correcting aberration of beam, e.g. due to lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)

Abstract

779,462. Electron lenses. PHILIPS ELECTRICAL INDUSTRIES, Ltd. March 8, 1955 [March 11, 1954], No. 6789/55. Class 39(1). Astigmatism due to mechanical errors in symmetry of an electrostatic or magnetic electron lens are corrected by the electric and/or magnetic field produced by two or more tubular inserts surrounding the axis of the lens, the inserts having an axial length which varies around the circumference in such a way that the insert has two mutually perpendicular planes of symmetry. In a magnetic form, the main lens is constituted by pole-pieces 1, 2, Fig. 1, and this is followed by tubular inserts 13, 12 each provided with a waved, serrated or notched top edge the bottom one 12 being rotated 90 degrees relative to the other. By passing suitable currents through windings 14, 15 a correcting astigmatism at any desired angle may be introduced. In an electrostatic form, the main lens comprises earthed outer diaphragms 22, 23, Fig. 2, and high-potential inner diaphragm 26. Correction is by wavy-edged cylinders 29, 30, 31, the two outer ones being connected. The pairs 29, 30 and 30, 31 produce astigmatisms at right angles and these are combined in any desired ratio by adjusting the voltages. By combining electrostatic and magnetic fields, two tubular inserts 38, 39, Fig. 3, may be made to produce two astigmatisms with a single gap, since that due to the electrostatic potential difference is in fact at right angles to that produced by the magnetic field from coils 40 with the same shape of gap edges.
GB6789/55A 1954-03-11 1955-03-08 Improvements in or relating to electron lenses Expired GB779462A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL328885X 1954-03-11

Publications (1)

Publication Number Publication Date
GB779462A true GB779462A (en) 1957-07-24

Family

ID=19784274

Family Applications (1)

Application Number Title Priority Date Filing Date
GB6789/55A Expired GB779462A (en) 1954-03-11 1955-03-08 Improvements in or relating to electron lenses

Country Status (7)

Country Link
US (1) US2862129A (en)
BE (1) BE536427A (en)
CH (1) CH328885A (en)
DE (1) DE1040716B (en)
FR (1) FR1120444A (en)
GB (1) GB779462A (en)
NL (2) NL95815C (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2192092A (en) * 1986-06-25 1987-12-31 Philips Electronic Associated Magnetic lens system

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL285301A (en) * 1961-11-15
US3374349A (en) * 1966-11-14 1968-03-19 Victor G. Macres Electron probe having a specific shortfocal length magnetic lens and light microscope
JPS63241842A (en) * 1987-03-30 1988-10-07 Toshiba Corp Color cathode-ray tube

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE440927A (en) * 1940-05-08
NL82605C (en) * 1942-04-08
GB609480A (en) * 1944-09-30 1948-10-01 Otto Ernst Heinrich Klemperer Improvements in or relating to a electron discharge apparatus in which a flattened or ribbon-shaped electron beam is employed
US2455676A (en) * 1946-05-21 1948-12-07 Rca Corp Electron lens correction device
GB665094A (en) * 1947-04-12 1952-01-16 Ass Elect Ind Improvements relating to the reduction of primary spherical aberration in magnetic electron lenses
US2520813A (en) * 1947-12-10 1950-08-29 Rudenberg Reinhold Electron optical system
US2707246A (en) * 1952-09-04 1955-04-26 Gen Electric Combination focusing-ion trap structures for cathode-ray tubes
DE927525C (en) * 1953-05-06 1955-05-12 Siemens Ag Arrangement for the compensation of the axial astigmatism of electric or magnetic electron lenses

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2192092A (en) * 1986-06-25 1987-12-31 Philips Electronic Associated Magnetic lens system

Also Published As

Publication number Publication date
FR1120444A (en) 1956-07-05
NL185815B (en)
BE536427A (en)
CH328885A (en) 1958-03-31
US2862129A (en) 1958-11-25
DE1040716B (en) 1958-10-09
NL95815C (en)

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