GB766119A - Improved means for coating of surfaces by vapour deposition - Google Patents

Improved means for coating of surfaces by vapour deposition

Info

Publication number
GB766119A
GB766119A GB222453A GB222453A GB766119A GB 766119 A GB766119 A GB 766119A GB 222453 A GB222453 A GB 222453A GB 222453 A GB222453 A GB 222453A GB 766119 A GB766119 A GB 766119A
Authority
GB
United Kingdom
Prior art keywords
baffle
vapour
outlet passage
passage
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB222453A
Other languages
English (en)
Inventor
Tzu En Shen
John Philip Huggett
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BRITISH DIELECTRIC RES Ltd
Original Assignee
BRITISH DIELECTRIC RES Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to NLAANVRAGE8102730,B priority Critical patent/NL184420B/xx
Priority to NL85130D priority patent/NL85130C/xx
Application filed by BRITISH DIELECTRIC RES Ltd filed Critical BRITISH DIELECTRIC RES Ltd
Priority to GB222453A priority patent/GB766119A/en
Priority to FR1091369D priority patent/FR1091369A/fr
Priority to ES0213308A priority patent/ES213308A1/es
Publication of GB766119A publication Critical patent/GB766119A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
GB222453A 1953-01-26 1953-01-26 Improved means for coating of surfaces by vapour deposition Expired GB766119A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
NLAANVRAGE8102730,B NL184420B (nl) 1953-01-26 N-trifluoracetyladriamycinederivaten en werkwijze voor het bereiden van een farmaceutisch preparaat die ze bevatten.
NL85130D NL85130C (enrdf_load_stackoverflow) 1953-01-26
GB222453A GB766119A (en) 1953-01-26 1953-01-26 Improved means for coating of surfaces by vapour deposition
FR1091369D FR1091369A (fr) 1953-01-26 1954-01-13 Dispositif perfectionné pour le dépôt de matières par évapocation dans le vide
ES0213308A ES213308A1 (es) 1953-01-26 1954-01-25 UN APARATO PARA DEPOSITAR MATERIAL POR EVAPORACIoN EN VACIO

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB222453A GB766119A (en) 1953-01-26 1953-01-26 Improved means for coating of surfaces by vapour deposition

Publications (1)

Publication Number Publication Date
GB766119A true GB766119A (en) 1957-01-16

Family

ID=9735777

Family Applications (1)

Application Number Title Priority Date Filing Date
GB222453A Expired GB766119A (en) 1953-01-26 1953-01-26 Improved means for coating of surfaces by vapour deposition

Country Status (4)

Country Link
ES (1) ES213308A1 (enrdf_load_stackoverflow)
FR (1) FR1091369A (enrdf_load_stackoverflow)
GB (1) GB766119A (enrdf_load_stackoverflow)
NL (2) NL184420B (enrdf_load_stackoverflow)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3001892A (en) * 1958-03-26 1961-09-26 Gen Electric Evaporation method and apparatus
US3244857A (en) * 1963-12-23 1966-04-05 Ibm Vapor deposition source
US3245674A (en) * 1960-04-25 1966-04-12 Nat Res Corp Crucible coated with reaction product of aluminum and boron nitride coating
US3277865A (en) * 1963-04-01 1966-10-11 United States Steel Corp Metal-vapor source with heated reflecting shield
US3603285A (en) * 1968-11-05 1971-09-07 Massachusetts Inst Technology Vapor deposition apparatus
US3690638A (en) * 1970-05-15 1972-09-12 Republic Steel Corp Apparatus and method for vaporizing molten metal
US4094269A (en) 1974-06-14 1978-06-13 Zlafop Pri Ban Vapor deposition apparatus for coating continuously moving substrates with layers of volatizable solid substances
EP0510259A1 (en) * 1991-04-03 1992-10-28 Mitsubishi Jukogyo Kabushiki Kaisha Apparatus for vacuum deposition of a sublimable substance
EP1130129A1 (en) 2000-03-03 2001-09-05 Eastman Kodak Company Source for thermal physical vapor deposition of organic electroluminescent layers
CN107254663A (zh) * 2017-07-13 2017-10-17 安徽省宁国市海伟电子有限公司 一种抗氧化型真空镀膜装置
CN109321878A (zh) * 2017-07-31 2019-02-12 三星显示有限公司 用于制造显示装置的设备
GB2574401A (en) * 2018-06-04 2019-12-11 Dyson Technology Ltd A device
GB2574400A (en) * 2018-06-04 2019-12-11 Dyson Technology Ltd A device

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR920003591B1 (ko) * 1988-04-11 1992-05-04 미쯔비시주우고오교오 가부시기가이샤 연속진공증착장치
WO1996035822A1 (fr) * 1995-05-10 1996-11-14 Centre De Recherches Metallurgiques - Centrum Voor Research In De Metallurgie Dispositif et installation pour revetir une bande d'acier

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3001892A (en) * 1958-03-26 1961-09-26 Gen Electric Evaporation method and apparatus
US3245674A (en) * 1960-04-25 1966-04-12 Nat Res Corp Crucible coated with reaction product of aluminum and boron nitride coating
US3277865A (en) * 1963-04-01 1966-10-11 United States Steel Corp Metal-vapor source with heated reflecting shield
US3244857A (en) * 1963-12-23 1966-04-05 Ibm Vapor deposition source
US3603285A (en) * 1968-11-05 1971-09-07 Massachusetts Inst Technology Vapor deposition apparatus
US3690638A (en) * 1970-05-15 1972-09-12 Republic Steel Corp Apparatus and method for vaporizing molten metal
US4094269A (en) 1974-06-14 1978-06-13 Zlafop Pri Ban Vapor deposition apparatus for coating continuously moving substrates with layers of volatizable solid substances
US5272298A (en) * 1991-04-03 1993-12-21 Mitsubishi Jukogyo Kabushiki Kaisha Apparatus for vacuum deposition of sublimative substance
EP0510259A1 (en) * 1991-04-03 1992-10-28 Mitsubishi Jukogyo Kabushiki Kaisha Apparatus for vacuum deposition of a sublimable substance
EP1130129A1 (en) 2000-03-03 2001-09-05 Eastman Kodak Company Source for thermal physical vapor deposition of organic electroluminescent layers
JP2001291589A (ja) * 2000-03-03 2001-10-19 Eastman Kodak Co 熱物理蒸着源
CN107254663A (zh) * 2017-07-13 2017-10-17 安徽省宁国市海伟电子有限公司 一种抗氧化型真空镀膜装置
CN109321878A (zh) * 2017-07-31 2019-02-12 三星显示有限公司 用于制造显示装置的设备
CN109321878B (zh) * 2017-07-31 2022-11-15 三星显示有限公司 用于制造显示装置的设备
GB2574401A (en) * 2018-06-04 2019-12-11 Dyson Technology Ltd A device
GB2574400A (en) * 2018-06-04 2019-12-11 Dyson Technology Ltd A device
GB2574400B (en) * 2018-06-04 2022-11-23 Dyson Technology Ltd A Device
GB2574401B (en) * 2018-06-04 2022-11-23 Dyson Technology Ltd A Device
US11613804B2 (en) 2018-06-04 2023-03-28 Dyson Technology Limited Vapour deposition evaporator device

Also Published As

Publication number Publication date
FR1091369A (fr) 1955-04-12
NL85130C (enrdf_load_stackoverflow)
NL184420B (nl)
ES213308A1 (es) 1954-03-16

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