GB717710A - Improvements in photomechanical resist compositions - Google Patents
Improvements in photomechanical resist compositionsInfo
- Publication number
- GB717710A GB717710A GB1698/52A GB169852A GB717710A GB 717710 A GB717710 A GB 717710A GB 1698/52 A GB1698/52 A GB 1698/52A GB 169852 A GB169852 A GB 169852A GB 717710 A GB717710 A GB 717710A
- Authority
- GB
- United Kingdom
- Prior art keywords
- cinnamic
- hydrogen atom
- solution
- photomechanical
- resist compositions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/031—Organic compounds not covered by group G03F7/029
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0388—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Abstract
A compound of formula <FORM:0717710/IV (a)/1> where R and R1 each represents an aryl group of the benzene series and either X and Y each represents a hydrogen atom or X represents a hydrogen atom while Y represents a hydroxyl group or X and Y together represent O, NOH, NH or S is added to an organic solvent solution of a cinnamic, o-chloro cinnamic or m-nitro cinnamic acid ester of cellulose or polyvinyl alcohol for the purpose of increasing the light sensitivity of photomechanical layers prepared from the solution. An example describes the addition of 4 : 41-tetra-methyldiaminodiphenyl ketone to a methyl glycol acetate solution of polyvinyl cinnamate. Specifications 695,262, 713,947, 717,708 and 717,709 are referred to.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US717710XA | 1951-01-20 | 1951-01-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB717710A true GB717710A (en) | 1954-11-03 |
Family
ID=22103471
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1698/52A Expired GB717710A (en) | 1951-01-20 | 1952-01-21 | Improvements in photomechanical resist compositions |
Country Status (2)
Country | Link |
---|---|
FR (1) | FR1089924A (en) |
GB (1) | GB717710A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3647470A (en) * | 1965-06-09 | 1972-03-07 | Agency Ind Science Techn | Photosensitive compositions containing furylacrylyl-containing polymer |
-
1952
- 1952-01-19 FR FR1089924D patent/FR1089924A/en not_active Expired
- 1952-01-21 GB GB1698/52A patent/GB717710A/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3647470A (en) * | 1965-06-09 | 1972-03-07 | Agency Ind Science Techn | Photosensitive compositions containing furylacrylyl-containing polymer |
Also Published As
Publication number | Publication date |
---|---|
FR1089924A (en) | 1955-03-24 |
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