GB485965A - Process and apparatus for thermal deposition of metals or other materials - Google Patents
Process and apparatus for thermal deposition of metals or other materialsInfo
- Publication number
- GB485965A GB485965A GB19772/37A GB1977237A GB485965A GB 485965 A GB485965 A GB 485965A GB 19772/37 A GB19772/37 A GB 19772/37A GB 1977237 A GB1977237 A GB 1977237A GB 485965 A GB485965 A GB 485965A
- Authority
- GB
- United Kingdom
- Prior art keywords
- heater
- fed
- wire
- strip
- evaporated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 title abstract 8
- 229910052751 metal Inorganic materials 0.000 title abstract 3
- 239000002184 metal Substances 0.000 title abstract 3
- 150000002739 metals Chemical group 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 238000002207 thermal evaporation Methods 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
- 238000000576 coating method Methods 0.000 abstract 4
- 239000011248 coating agent Substances 0.000 abstract 3
- 239000007789 gas Substances 0.000 abstract 2
- 239000011261 inert gas Substances 0.000 abstract 2
- 239000010453 quartz Substances 0.000 abstract 2
- 239000004411 aluminium Substances 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 239000001257 hydrogen Substances 0.000 abstract 1
- 229910052739 hydrogen Inorganic materials 0.000 abstract 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DED0073135 | 1936-07-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB485965A true GB485965A (en) | 1938-05-27 |
Family
ID=32236316
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB19772/37A Expired GB485965A (en) | 1936-07-17 | 1937-07-16 | Process and apparatus for thermal deposition of metals or other materials |
Country Status (5)
Country | Link |
---|---|
US (1) | US2153786A (enrdf_load_stackoverflow) |
BE (1) | BE422666A (enrdf_load_stackoverflow) |
FR (1) | FR824423A (enrdf_load_stackoverflow) |
GB (1) | GB485965A (enrdf_load_stackoverflow) |
NL (1) | NL51379C (enrdf_load_stackoverflow) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2440135A (en) * | 1944-08-04 | 1948-04-20 | Alexander Paul | Method of and apparatus for depositing substances by thermal evaporation in vacuum chambers |
US2703772A (en) * | 1952-09-12 | 1955-03-08 | Minnesota Mining & Mfg | Transfer method for manufacturing infrared reflecting fabric |
US2820722A (en) * | 1953-09-04 | 1958-01-21 | Richard J Fletcher | Method of preparing titanium, zirconium and tantalum |
US3488214A (en) * | 1967-03-15 | 1970-01-06 | Sperry Rand Corp | Evaporant material control for vapor deposition apparatus |
GB2217349A (en) * | 1988-03-29 | 1989-10-25 | Univ Hull | Vapour deposited self-sealing ceramic coatings |
Families Citing this family (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2899528A (en) * | 1959-08-11 | Method and apparatus for supplying | ||
NL59597C (enrdf_load_stackoverflow) * | 1939-02-22 | |||
US2435273A (en) * | 1941-07-31 | 1948-02-03 | Hatfield Henry Stafford | Method of coating with tungsten carbide |
US2508500A (en) * | 1942-05-23 | 1950-05-23 | Hartford Nat Bank & Trust Co | Apparatus for applying metal coatings on insulators |
US2621625A (en) * | 1948-03-25 | 1952-12-16 | Nat Res Corp | Vapor coating device |
US2665320A (en) * | 1949-09-22 | 1954-01-05 | Nat Res Corp | Metal vaporizing crucible |
US2635579A (en) * | 1949-12-01 | 1953-04-21 | Nat Res Corp | Coating by evaporating metal under vacuum |
US2665223A (en) * | 1949-12-31 | 1954-01-05 | Nat Res Corp | Process for depositing an aluminum film on a substrate by thermal vaporization |
US2665224A (en) * | 1950-03-07 | 1954-01-05 | Nat Res Corp | Process for vapor coating |
US2664852A (en) * | 1950-04-27 | 1954-01-05 | Nat Res Corp | Vapor coating apparatus |
US2665225A (en) * | 1950-04-27 | 1954-01-05 | Nat Res Corp | Apparatus and process for coating by vapor deposition |
US2665227A (en) * | 1950-06-30 | 1954-01-05 | Nat Res Corp | Apparatus and method of coating by vapor deposition |
US2665228A (en) * | 1950-07-19 | 1954-01-05 | Nat Res Corp | Apparatus and process for vapor coating |
US2665229A (en) * | 1951-11-05 | 1954-01-05 | Nat Res Corp | Method of coating by vapor deposition |
US2753800A (en) * | 1952-03-24 | 1956-07-10 | Ohio Commw Eng Co | Production of printing plates |
US2664853A (en) * | 1952-05-12 | 1954-01-05 | Nat Res Corp | Apparatus for vapor coating |
US2840494A (en) * | 1952-12-31 | 1958-06-24 | Henry W Parker | Manufacture of transistors |
US2894679A (en) * | 1953-11-23 | 1959-07-14 | Wisconsin Alumni Res Found | Pump |
US2850225A (en) * | 1955-11-10 | 1958-09-02 | Wisconsin Alumni Res Found | Pump |
US2960457A (en) * | 1956-02-28 | 1960-11-15 | Servomechanisms Inc | Apparatus for vaporizing coating materials |
US2978364A (en) * | 1956-03-05 | 1961-04-04 | Fairchild Camera Instr Co | Automatic control system for precision resistor manufacture |
US2967223A (en) * | 1958-11-26 | 1961-01-03 | Wisconsin Alumni Res Found | Feeder mechanism |
NL253747A (enrdf_load_stackoverflow) * | 1959-07-13 | |||
US3167451A (en) * | 1959-08-26 | 1965-01-26 | Sprague Electric Co | Method of resistor production |
US3690291A (en) * | 1971-04-28 | 1972-09-12 | Nasa | Deposition apparatus |
BE795116A (fr) * | 1972-02-08 | 1973-05-29 | Cockerill | Procede d'alimentation de bain d'evaporation |
US3750623A (en) * | 1972-02-11 | 1973-08-07 | Mc Donnell Douglas Corp | Glow discharge coating apparatus |
US3826226A (en) * | 1972-12-12 | 1974-07-30 | R Clark | Apparatus for coating particulate material |
US5366764A (en) * | 1992-06-15 | 1994-11-22 | Sunthankar Mandar B | Environmentally safe methods and apparatus for depositing and/or reclaiming a metal or semi-conductor material using sublimation |
DE102006026523A1 (de) * | 2006-06-06 | 2007-12-13 | Berkenhoff Gmbh | Verfahren zum Aufdampfen dünner Schichten im Vakuum und Draht zu seiner Ausführung |
WO2011065999A1 (en) * | 2008-12-18 | 2011-06-03 | Veeco Instruments Inc. | Linear deposition source |
US20100282167A1 (en) * | 2008-12-18 | 2010-11-11 | Veeco Instruments Inc. | Linear Deposition Source |
US20100159132A1 (en) * | 2008-12-18 | 2010-06-24 | Veeco Instruments, Inc. | Linear Deposition Source |
EP2270253B1 (en) * | 2009-07-03 | 2012-09-12 | Applied Materials, Inc. | Bending fixture for homogenous and smooth operation of an evaporation source |
TWI492258B (zh) * | 2013-05-10 | 2015-07-11 | Darfon Electronics Corp | 發光鍵盤及其導光板模組與製造方法 |
CN108103445B (zh) * | 2017-12-14 | 2020-04-17 | 内蒙古科技大学 | 一种特殊结构合金的原位制备方法 |
US20210388486A1 (en) * | 2018-11-20 | 2021-12-16 | Bobst Manchester Limited | Evaporator boat control system, pvd machine and method of operating the pvd machine |
-
1937
- 1937-07-14 US US153548A patent/US2153786A/en not_active Expired - Lifetime
- 1937-07-15 FR FR824423D patent/FR824423A/fr not_active Expired
- 1937-07-15 BE BE422666D patent/BE422666A/xx unknown
- 1937-07-15 NL NL83360A patent/NL51379C/xx active
- 1937-07-16 GB GB19772/37A patent/GB485965A/en not_active Expired
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2440135A (en) * | 1944-08-04 | 1948-04-20 | Alexander Paul | Method of and apparatus for depositing substances by thermal evaporation in vacuum chambers |
US2703772A (en) * | 1952-09-12 | 1955-03-08 | Minnesota Mining & Mfg | Transfer method for manufacturing infrared reflecting fabric |
US2820722A (en) * | 1953-09-04 | 1958-01-21 | Richard J Fletcher | Method of preparing titanium, zirconium and tantalum |
US3488214A (en) * | 1967-03-15 | 1970-01-06 | Sperry Rand Corp | Evaporant material control for vapor deposition apparatus |
GB2217349A (en) * | 1988-03-29 | 1989-10-25 | Univ Hull | Vapour deposited self-sealing ceramic coatings |
GB2217349B (en) * | 1988-03-29 | 1992-06-24 | Univ Hull | Vapour deposited self-sealing ceramic coatings |
Also Published As
Publication number | Publication date |
---|---|
US2153786A (en) | 1939-04-11 |
BE422666A (enrdf_load_stackoverflow) | 1937-08-31 |
FR824423A (fr) | 1938-02-08 |
NL51379C (enrdf_load_stackoverflow) | 1941-11-15 |
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