GB2364392B - Photoresist composition containing photoradical generator with photoacid generator - Google Patents

Photoresist composition containing photoradical generator with photoacid generator

Info

Publication number
GB2364392B
GB2364392B GB0114259A GB0114259A GB2364392B GB 2364392 B GB2364392 B GB 2364392B GB 0114259 A GB0114259 A GB 0114259A GB 0114259 A GB0114259 A GB 0114259A GB 2364392 B GB2364392 B GB 2364392B
Authority
GB
United Kingdom
Prior art keywords
generator
composition containing
photoresist composition
photoradical
photoacid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0114259A
Other languages
English (en)
Other versions
GB2364392A (en
GB0114259D0 (en
Inventor
Jae-Chang Jung
Geun Su Lee
Min Ho Jung
Ki Ho Baik
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SK Hynix Inc
Original Assignee
Hynix Semiconductor Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hynix Semiconductor Inc filed Critical Hynix Semiconductor Inc
Publication of GB0114259D0 publication Critical patent/GB0114259D0/en
Publication of GB2364392A publication Critical patent/GB2364392A/en
Application granted granted Critical
Publication of GB2364392B publication Critical patent/GB2364392B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
    • G03F7/0395—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition the macromolecular compound having a backbone with alicyclic moieties
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/114—Initiator containing
    • Y10S430/115—Cationic or anionic
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/114—Initiator containing
    • Y10S430/117—Free radical
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/114—Initiator containing
    • Y10S430/122—Sulfur compound containing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/114—Initiator containing
    • Y10S430/124—Carbonyl compound containing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/114—Initiator containing
    • Y10S430/126—Halogen compound containing

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials For Photolithography (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
GB0114259A 2000-06-30 2001-06-12 Photoresist composition containing photoradical generator with photoacid generator Expired - Fee Related GB2364392B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020000037228A KR100583095B1 (ko) 2000-06-30 2000-06-30 광산 발생제와 함께 광 라디칼 발생제(ｐｒｇ)를 포함하는포토레지스트 조성물

Publications (3)

Publication Number Publication Date
GB0114259D0 GB0114259D0 (en) 2001-08-01
GB2364392A GB2364392A (en) 2002-01-23
GB2364392B true GB2364392B (en) 2004-08-18

Family

ID=19675463

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0114259A Expired - Fee Related GB2364392B (en) 2000-06-30 2001-06-12 Photoresist composition containing photoradical generator with photoacid generator

Country Status (7)

Country Link
US (1) US6692891B2 (enExample)
JP (1) JP3875519B2 (enExample)
KR (1) KR100583095B1 (enExample)
CN (1) CN1241065C (enExample)
DE (1) DE10131123A1 (enExample)
GB (1) GB2364392B (enExample)
TW (1) TWI225967B (enExample)

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JP5884961B2 (ja) * 2011-04-27 2016-03-15 日産化学工業株式会社 光ラジカル重合開始剤を含む感光性レジスト下層膜形成組成物
KR101565465B1 (ko) 2011-05-23 2015-11-04 오티스 엘리베이터 컴파니 체인 및 스프로켓 구동 시스템들을 위한 다각형 보상 커플링
CN103987739B (zh) * 2011-12-16 2017-04-05 阿克伦大学 经取代的苯甲酰甲基分子和光响应性聚合物
JP5772642B2 (ja) * 2012-02-09 2015-09-02 Jsr株式会社 硬化性樹脂組成物、表示素子用硬化膜、表示素子用硬化膜の形成方法及び表示素子
US9547238B2 (en) * 2012-10-16 2017-01-17 Eugen Pavel Photoresist with rare-earth sensitizers
EP2956821B8 (en) 2013-02-12 2018-06-27 Carbon, Inc. Method and apparatus for three-dimensional fabrication
CA2898106A1 (en) 2013-02-12 2014-08-21 Carbon3D, Inc. Continuous liquid interphase printing
US10232605B2 (en) 2014-03-21 2019-03-19 Carbon, Inc. Method for three-dimensional fabrication with gas injection through carrier
WO2015164234A1 (en) 2014-04-25 2015-10-29 Carbon3D, Inc. Continuous three dimensional fabrication from immiscible liquids
US10569465B2 (en) 2014-06-20 2020-02-25 Carbon, Inc. Three-dimensional printing using tiled light engines
CA2949378A1 (en) 2014-06-20 2015-12-23 Carbon, Inc. Three-dimensional printing with reciprocal feeding of polymerizable liquid
WO2015195920A1 (en) 2014-06-20 2015-12-23 Carbon3D, Inc. Three-dimensional printing method using increased light intensity and apparatus therefore
JP6802712B2 (ja) 2014-06-23 2020-12-16 カーボン，インコーポレイテッド 三次元物体の製造に使用する多様な硬化機構を有するポリウレタン樹脂
US11390062B2 (en) 2014-08-12 2022-07-19 Carbon, Inc. Three-dimensional printing with supported build plates
US20170355132A1 (en) 2014-12-31 2017-12-14 Carbon, Inc. Three-dimensional printing of objects with breathing orifices
US20160193786A1 (en) 2015-01-06 2016-07-07 Carbon3D, Inc. Three-dimensional printing with build plates having a rough or patterned surface and related methods
WO2016112090A1 (en) 2015-01-07 2016-07-14 Carbon3D, Inc. Microfluidic devices and methods of making the same
US20160200052A1 (en) 2015-01-13 2016-07-14 Carbon3D, Inc. Three-dimensional printing with build plates having surface topologies for increasing permeability and related methods
US20180133959A1 (en) 2015-01-30 2018-05-17 Carbon, Inc. Build plates for continuous liquid interface printing having permeable sheets and related methods, systems and devices
WO2016123499A1 (en) 2015-01-30 2016-08-04 Carbon3D, Inc. Build plates for continuous liquid interface printing having permeable base and adhesive for increasing permeability and related methods, systems and devices
EP3253558B1 (en) 2015-02-05 2020-04-08 Carbon, Inc. Method of additive manufacturing by fabrication through multiple zones
WO2016133759A1 (en) 2015-02-20 2016-08-25 Carbon3D, Inc. Methods and apparatus for continuous liquid interface printing with electrochemically supported dead zone
US20180029292A1 (en) 2015-03-05 2018-02-01 Carbon, Inc. Continuous liquid interface production with sequential patterned exposure
WO2016140886A1 (en) 2015-03-05 2016-09-09 Carbon3D, Inc. Fabrication of three dimensional objects with multiple operating modes
US20180015662A1 (en) 2015-03-05 2018-01-18 Carbon, Inc. Fabrication of three dimensional objects with variable slice thickness
WO2016145050A1 (en) 2015-03-10 2016-09-15 Carbon3D, Inc. Microfluidic devices having flexible features and methods of making the same
WO2016145182A1 (en) 2015-03-12 2016-09-15 Carbon3D, Inc. Additive manufacturing using polymerization initiators or inhibitors having controlled migration
US10843402B2 (en) 2015-03-13 2020-11-24 Carbon, Inc. Three-dimensional printing with reduced pressure build plate unit
US10792856B2 (en) 2015-03-13 2020-10-06 Carbon, Inc. Three-dimensional printing with flexible build plates
WO2016149151A1 (en) 2015-03-13 2016-09-22 Carbon3D, Inc. Three-dimensional printing with concurrent delivery of different polymerizable liquids
US10800094B2 (en) 2015-09-14 2020-10-13 Carbon, Inc. Light-curable article of manufacture with portions of differing solubility
WO2017053783A1 (en) 2015-09-25 2017-03-30 Carbon3D, Inc. Build plate assemblies for continuous liquid interphase printing having lighting panels and related methods, systems and devices
US20180243976A1 (en) 2015-09-30 2018-08-30 Carbon, Inc. Method and Apparatus for Producing Three- Dimensional Objects
US12010287B2 (en) 2015-10-09 2024-06-11 Southern Methodist University System and method for a three-dimensional optical switch display device
US10647873B2 (en) 2015-10-30 2020-05-12 Carbon, Inc. Dual cure article of manufacture with portions of differing solubility
JP6944935B2 (ja) 2015-12-22 2021-10-06 カーボン，インコーポレイテッド 二重硬化樹脂を用いた積層造形による複数の中間体からの複合生産物の製作
WO2017112571A1 (en) 2015-12-22 2017-06-29 Carbon, Inc. Dual cure additive manufacturing of rigid intermediates that generate semi-rigid, flexible, or elastic final products
WO2017112521A1 (en) 2015-12-22 2017-06-29 Carbon, Inc. Production of flexible products by additive manufacturing with dual cure resins
US10647054B2 (en) 2015-12-22 2020-05-12 Carbon, Inc. Accelerants for additive manufacturing with dual cure resins
WO2017112653A1 (en) 2015-12-22 2017-06-29 Carbon, Inc. Dual precursor resin systems for additive manufacturing with dual cure resins
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WO2018006018A1 (en) 2016-07-01 2018-01-04 Carbon, Inc. Three-dimensional printing method and apparatus for reducing bubbles by de-gassing through build plate
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JPH1195435A (ja) * 1997-09-17 1999-04-09 Fuji Photo Film Co Ltd ポジ型感光性着色組成物
JPH11305433A (ja) * 1998-04-21 1999-11-05 Toppan Printing Co Ltd 感光性組成物、感光性着色組成物及びその感光性着色組成物を用いたカラーフィルタ
US6051368A (en) * 1997-03-17 2000-04-18 Jsr Corporation Radiation sensitive composition containing a dispersed phosphor
GB2354596A (en) * 1999-09-21 2001-03-28 Hyundai Electronics Ind Photoresist composition containing photobase generator and photoacid generator

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US6051368A (en) * 1997-03-17 2000-04-18 Jsr Corporation Radiation sensitive composition containing a dispersed phosphor
JPH1195435A (ja) * 1997-09-17 1999-04-09 Fuji Photo Film Co Ltd ポジ型感光性着色組成物
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Also Published As

Publication number Publication date
TWI225967B (en) 2005-01-01
US6692891B2 (en) 2004-02-17
JP2002082440A (ja) 2002-03-22
CN1241065C (zh) 2006-02-08
GB2364392A (en) 2002-01-23
DE10131123A1 (de) 2002-02-14
CN1330288A (zh) 2002-01-09
JP3875519B2 (ja) 2007-01-31
US20020012873A1 (en) 2002-01-31
GB0114259D0 (en) 2001-08-01
KR100583095B1 (ko) 2006-05-24
KR20020002877A (ko) 2002-01-10

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20090612