GB2349740A - Vertical cavity surface emitting laser with monitoring diode - Google Patents

Vertical cavity surface emitting laser with monitoring diode Download PDF

Info

Publication number
GB2349740A
GB2349740A GB9910202A GB9910202A GB2349740A GB 2349740 A GB2349740 A GB 2349740A GB 9910202 A GB9910202 A GB 9910202A GB 9910202 A GB9910202 A GB 9910202A GB 2349740 A GB2349740 A GB 2349740A
Authority
GB
United Kingdom
Prior art keywords
vcsel
chip
assembly
monitor
emitting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB9910202A
Other languages
English (en)
Other versions
GB9910202D0 (en
Inventor
Mikael Wickstroem
Jan Joensson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Microsemi Semiconductor AB
Original Assignee
Mitel Semiconductor AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitel Semiconductor AB filed Critical Mitel Semiconductor AB
Priority to GB9910202A priority Critical patent/GB2349740A/en
Publication of GB9910202D0 publication Critical patent/GB9910202D0/en
Priority to DE19947817A priority patent/DE19947817A1/de
Priority to CA002287134A priority patent/CA2287134A1/en
Priority to SE9903888A priority patent/SE9903888L/xx
Priority to JP11318214A priority patent/JP2000323791A/ja
Priority to US09/506,895 priority patent/US6368890B1/en
Priority to GB0010361A priority patent/GB2351180A/en
Priority to CA002307779A priority patent/CA2307779A1/en
Priority to DE10021564A priority patent/DE10021564A1/de
Priority to SE0001646A priority patent/SE0001646L/xx
Priority to FR0005776A priority patent/FR2793960A1/fr
Priority to JP2000134616A priority patent/JP2000340877A/ja
Publication of GB2349740A publication Critical patent/GB2349740A/en
Priority to US10/071,043 priority patent/US6678292B2/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/0225—Out-coupling of light
    • H01S5/02257—Out-coupling of light using windows, e.g. specially adapted for back-reflecting light to a detector inside the housing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/191—Disposition
    • H01L2924/19101—Disposition of discrete passive components
    • H01L2924/19107—Disposition of discrete passive components off-chip wires
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/0201—Separation of the wafer into individual elements, e.g. by dicing, cleaving, etching or directly during growth
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/023—Mount members, e.g. sub-mount members
    • H01S5/02325—Mechanically integrated components on mount members or optical micro-benches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/0233—Mounting configuration of laser chips
    • H01S5/02345—Wire-bonding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/0235—Method for mounting laser chips
    • H01S5/02355—Fixing laser chips on mounts
    • H01S5/0237—Fixing laser chips on mounts by soldering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
    • H01S5/042—Electrical excitation ; Circuits therefor
    • H01S5/0421—Electrical excitation ; Circuits therefor characterised by the semiconducting contacting layers
    • H01S5/0422—Electrical excitation ; Circuits therefor characterised by the semiconducting contacting layers with n- and p-contacts on the same side of the active layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/062—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes
    • H01S5/06226—Modulation at ultra-high frequencies
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/068—Stabilisation of laser output parameters
    • H01S5/0683—Stabilisation of laser output parameters by monitoring the optical output parameters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)
GB9910202A 1999-05-05 1999-05-05 Vertical cavity surface emitting laser with monitoring diode Withdrawn GB2349740A (en)

Priority Applications (13)

Application Number Priority Date Filing Date Title
GB9910202A GB2349740A (en) 1999-05-05 1999-05-05 Vertical cavity surface emitting laser with monitoring diode
DE19947817A DE19947817A1 (de) 1999-05-05 1999-10-05 Oben-Kontakt-VCSEL mit Monitor
CA002287134A CA2287134A1 (en) 1999-05-05 1999-10-19 Top contact vcsel with monitor
SE9903888A SE9903888L (sv) 1999-05-05 1999-10-28 Sammansättning av ytemitterande laser med vertikal kavitet och en övervakningsenhet för fotodetektering
JP11318214A JP2000323791A (ja) 1999-05-05 1999-11-09 垂直共振器型面発光レーザと光検出用モニターとのアセンブリー及びそのアセンブリング方法
US09/506,895 US6368890B1 (en) 1999-05-05 2000-02-18 Top contact VCSEL with monitor
CA002307779A CA2307779A1 (en) 1999-05-05 2000-05-02 Top contact vcsel with monitor
GB0010361A GB2351180A (en) 1999-05-05 2000-05-02 Assembly with vertical cavity surface emitting laser having n- and p-type contacts on the same face and photodetector
DE10021564A DE10021564A1 (de) 1999-05-05 2000-05-03 Oben-Kontakt-VCSEL mit Monitor
SE0001646A SE0001646L (sv) 1999-05-05 2000-05-04 Topp-kontakt vcsel med övervakning
FR0005776A FR2793960A1 (fr) 1999-05-05 2000-05-05 Laser a emission en surface a cavite verticale et dispositif de surveillance de sortie en combinaison et son procede de fabrication
JP2000134616A JP2000340877A (ja) 1999-05-05 2000-05-08 垂直共振器型面発光レーザと光検出用モニターとのアセンブリー及びそのアセンブリング方法
US10/071,043 US6678292B2 (en) 1999-05-05 2002-02-08 Top contact VCSEL with monitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9910202A GB2349740A (en) 1999-05-05 1999-05-05 Vertical cavity surface emitting laser with monitoring diode

Publications (2)

Publication Number Publication Date
GB9910202D0 GB9910202D0 (en) 1999-06-30
GB2349740A true GB2349740A (en) 2000-11-08

Family

ID=10852713

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9910202A Withdrawn GB2349740A (en) 1999-05-05 1999-05-05 Vertical cavity surface emitting laser with monitoring diode

Country Status (5)

Country Link
JP (1) JP2000323791A (ja)
CA (1) CA2287134A1 (ja)
DE (1) DE19947817A1 (ja)
GB (1) GB2349740A (ja)
SE (1) SE9903888L (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10012869C2 (de) * 2000-03-16 2002-05-29 Infineon Technologies Ag Vertikalresonator-Laserdiode mit koplanaren elektrischen Anschlußkontakten und Verfahren zu ihrer Herstellung
JP4058633B2 (ja) 2003-07-10 2008-03-12 セイコーエプソン株式会社 面発光型発光素子、光モジュール、光伝達装置
JP2005085942A (ja) 2003-09-08 2005-03-31 Seiko Epson Corp 光モジュール、光伝送装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2300301A (en) * 1995-04-28 1996-10-30 Samsung Electronics Co Ltd VCSEL with photodetector
GB2307791A (en) * 1995-11-30 1997-06-04 Hewlett Packard Co Vertical cavity surface emitting lasers
US5812582A (en) * 1995-10-03 1998-09-22 Methode Electronics, Inc. Vertical cavity surface emitting laser feedback system and method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2300301A (en) * 1995-04-28 1996-10-30 Samsung Electronics Co Ltd VCSEL with photodetector
US5812582A (en) * 1995-10-03 1998-09-22 Methode Electronics, Inc. Vertical cavity surface emitting laser feedback system and method
GB2307791A (en) * 1995-11-30 1997-06-04 Hewlett Packard Co Vertical cavity surface emitting lasers

Also Published As

Publication number Publication date
SE9903888L (sv) 2000-11-06
CA2287134A1 (en) 2000-11-05
DE19947817A1 (de) 2000-11-09
JP2000323791A (ja) 2000-11-24
SE9903888D0 (sv) 1999-10-28
GB9910202D0 (en) 1999-06-30

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)