GB2307759B - Illumination apparatus for irradiating dicing tape and method of illumniation thereof - Google Patents
Illumination apparatus for irradiating dicing tape and method of illumniation thereofInfo
- Publication number
- GB2307759B GB2307759B GB9623114A GB9623114A GB2307759B GB 2307759 B GB2307759 B GB 2307759B GB 9623114 A GB9623114 A GB 9623114A GB 9623114 A GB9623114 A GB 9623114A GB 2307759 B GB2307759 B GB 2307759B
- Authority
- GB
- United Kingdom
- Prior art keywords
- illumniation
- irradiating
- dicing tape
- illumination apparatus
- illumination
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005286 illumination Methods 0.000 title 1
- 230000001678 irradiating effect Effects 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Toxicology (AREA)
- High Energy & Nuclear Physics (AREA)
- Health & Medical Sciences (AREA)
- Dicing (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP33831195A JP3518786B2 (en) | 1995-12-02 | 1995-12-02 | Light irradiation device and light irradiation method for dicing tape |
Publications (3)
Publication Number | Publication Date |
---|---|
GB9623114D0 GB9623114D0 (en) | 1997-01-08 |
GB2307759A GB2307759A (en) | 1997-06-04 |
GB2307759B true GB2307759B (en) | 2000-02-09 |
Family
ID=18316946
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB9623114A Expired - Fee Related GB2307759B (en) | 1995-12-02 | 1996-11-06 | Illumination apparatus for irradiating dicing tape and method of illumniation thereof |
Country Status (6)
Country | Link |
---|---|
JP (1) | JP3518786B2 (en) |
KR (1) | KR100479893B1 (en) |
DE (1) | DE19648062B4 (en) |
GB (1) | GB2307759B (en) |
MY (1) | MY116683A (en) |
SG (1) | SG60026A1 (en) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3928372B2 (en) * | 2001-05-22 | 2007-06-13 | ウシオ電機株式会社 | Light irradiation device |
JP2004072040A (en) * | 2002-08-09 | 2004-03-04 | Lintec Corp | Dicing tape with attribute indication and method for manufacturing same |
JP4488686B2 (en) * | 2003-03-12 | 2010-06-23 | 日東電工株式会社 | Ultraviolet irradiation method and apparatus using the same |
EP1498935B1 (en) * | 2003-07-15 | 2006-04-26 | Tokyo Seimitsu Co.,Ltd. | Device for calculating the quantity of light and method thereof |
JP4578165B2 (en) * | 2003-07-15 | 2010-11-10 | 株式会社東京精密 | Light quantity calculation device and light quantity calculation method |
JP4638172B2 (en) * | 2004-03-31 | 2011-02-23 | 積水化学工業株式会社 | IC chip manufacturing method and IC chip manufacturing apparatus |
JP2006324373A (en) * | 2005-05-18 | 2006-11-30 | Matsushita Electric Ind Co Ltd | Method and device of pickup of chip |
JP5117709B2 (en) | 2006-12-04 | 2013-01-16 | リンテック株式会社 | Ultraviolet irradiation apparatus and ultraviolet irradiation method |
JP5356842B2 (en) * | 2009-01-28 | 2013-12-04 | リンテック株式会社 | Light irradiation apparatus and light irradiation method |
JP2011040476A (en) | 2009-08-07 | 2011-02-24 | Lintec Corp | Device and method for applying energy |
KR101372394B1 (en) * | 2012-11-23 | 2014-03-12 | 주식회사 대성엔지니어링 | Led ultraviolet irradiation apparatus |
KR102633533B1 (en) | 2018-11-09 | 2024-02-06 | 주식회사 엘지화학 | Method for plasma etching process using faraday box |
KR102426261B1 (en) | 2019-09-26 | 2022-07-29 | 주식회사 엘지화학 | Adhesive composition for dicing tape and dicing tape comprising the same |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2004090A (en) * | 1977-09-09 | 1979-03-21 | Coberly & Ass | Power apparatus for driving a lamp at constant intensity |
US4718967A (en) * | 1985-12-12 | 1988-01-12 | Efuesukei Kabushiki Kaisha | Control apparatus for reducing adhesive force of adhesive agent adhering between semiconductor wafer and substrate |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5098501A (en) * | 1989-12-08 | 1992-03-24 | Sumitomo Electric Industries, Ltd. | Pickup method and the pickup apparatus for chip-type part |
JP3232575B2 (en) * | 1990-10-16 | 2001-11-26 | ソニー株式会社 | Semiconductor processing equipment |
JPH0636984A (en) * | 1992-07-13 | 1994-02-10 | Canon Inc | Aligner |
JPH06196555A (en) * | 1992-12-24 | 1994-07-15 | Nitto Denko Corp | Ultraviolet ray irradiation system |
JPH06196554A (en) * | 1992-12-24 | 1994-07-15 | Nitto Denko Corp | Ultraviolet ray irradiation system |
CA2115947A1 (en) * | 1993-03-03 | 1994-09-04 | Gregory C. Smith | Wafer-like processing after sawing dmds |
KR950001831A (en) * | 1993-06-23 | 1995-01-04 | 박경팔 | Light amount automatic control exposure device |
KR200177254Y1 (en) * | 1994-11-05 | 2000-04-15 | 김영환 | Die pickup apparatus of die bond device |
-
1995
- 1995-12-02 JP JP33831195A patent/JP3518786B2/en not_active Expired - Lifetime
-
1996
- 1996-10-29 MY MYPI96004484A patent/MY116683A/en unknown
- 1996-11-06 GB GB9623114A patent/GB2307759B/en not_active Expired - Fee Related
- 1996-11-20 DE DE19648062A patent/DE19648062B4/en not_active Expired - Fee Related
- 1996-11-29 SG SG1996011464A patent/SG60026A1/en unknown
- 1996-11-30 KR KR1019960060273A patent/KR100479893B1/en not_active IP Right Cessation
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2004090A (en) * | 1977-09-09 | 1979-03-21 | Coberly & Ass | Power apparatus for driving a lamp at constant intensity |
US4718967A (en) * | 1985-12-12 | 1988-01-12 | Efuesukei Kabushiki Kaisha | Control apparatus for reducing adhesive force of adhesive agent adhering between semiconductor wafer and substrate |
Non-Patent Citations (1)
Title |
---|
JP6196555 A,Nitto Denko Corpn,Japanese abstract & Derwent abstract * |
Also Published As
Publication number | Publication date |
---|---|
KR970052125A (en) | 1997-07-29 |
SG60026A1 (en) | 1999-02-22 |
KR100479893B1 (en) | 2005-06-27 |
MY116683A (en) | 2004-03-31 |
GB2307759A (en) | 1997-06-04 |
DE19648062A1 (en) | 1997-06-05 |
DE19648062B4 (en) | 2009-01-29 |
JP3518786B2 (en) | 2004-04-12 |
JPH09162141A (en) | 1997-06-20 |
GB9623114D0 (en) | 1997-01-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 20111106 |