JPH06196554A - Ultraviolet ray irradiation system - Google Patents

Abstract

PURPOSE:To provide an ultraviolet ray irradiation system in which an ultraviolet lamp is unlighted automatically when supply of work is interrupted for a predetermined time. CONSTITUTION:When an ultraviolet lamp 12 is lighted, a main controller 31 delivers a timer start signal (c) to an unlight time setting timer 38 which then begins to measure the time. If a shutter open sensor 36 is not turned ON within a set time of the unlight time setting timer 38, the unlight time setting timer 38 delivers a time-up signal (d). Consequently, a soft timer in the main controller 31 is actuated. If a lighting sustention switch SW3 is depressed within the set time of the soft timer, the ultraviolet lamp 12 is lighted continuously otherwise the ultraviolet lamp 12 is unlighted.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ring-shaped frame (work) for holding a semiconductor wafer via an ultraviolet-sensitive adhesive tape attached to the back surface of the semiconductor wafer.
On the other hand, the present invention relates to an ultraviolet irradiation device that irradiates ultraviolet rays.

[0002]

As is well known, during the semiconductor manufacturing process,
There is a dicing process for cutting a semiconductor wafer into chips. In this dicing process, as a method of supporting the semiconductor wafer, an adhesive tape larger than the semiconductor wafer is attached to the back surface of the semiconductor wafer, and the peripheral portion of the adhesive tape is attached to a ring-shaped frame, so that the semiconductor wafer There is something to support. Such a wafer support structure (hereinafter, also referred to as a work) is fixed, and a semiconductor wafer is cut by a cutter while leaving the adhesive tape. This method has the advantage that chips can be prevented from chipping or scattering, but the adhesive strength of the adhesive tape must be large in order to withstand the impact force during cutting.
However, on the other hand, in the die bonding process after the dicing process, the cut chips must be easily peeled from the adhesive tape, but there is a problem that the large adhesive force of the adhesive tape hinders chip peeling. .

Therefore, recently, an ultraviolet-sensitive adhesive tape having a property that its adhesive strength is reduced by irradiating with ultraviolet rays is used, and a semiconductor wafer is adhered and supported by such an adhesive tape to form a chip shape. If the work is irradiated with ultraviolet rays after the cutting, the above-mentioned problems can be solved.

The ultraviolet irradiating device for such an application covers a work with a cover, supplies an inert gas to the inside thereof, and opens and closes a shutter interposed between the ultraviolet lamp and the work, whereby a predetermined amount of the ultraviolet light is emitted. Is illuminating the work.

[0005]

By the way, the above-mentioned ultraviolet irradiating device is provided with an operation switch for turning on / off the ultraviolet lamp, and when the operator stops the supply of the work, The operation lamp is operated to turn off the ultraviolet lamp. However, there is a problem in that the operator forgets to turn off the ultraviolet lamp, so that the ultraviolet lamp continuously lights unnecessarily, resulting in waste of power and exhaustion of the ultraviolet lamp.

On the contrary, depending on the supply state of the work,
If the ultraviolet lamp is turned on and off frequently, the life of the lamp may be shortened. Furthermore, once the UV lamp is turned off, it usually takes 6 seconds before it is turned on again.
Since it takes about a minute, if the work is supplied during that time, it may not be possible to irradiate the ultraviolet rays, and there is a possibility that an unnecessary waiting time may occur.

The present invention has been made in view of the above circumstances, and when the supply of the work is stopped for a certain period of time, the ultraviolet lamp is automatically turned off to waste power.
An object of the present invention is to provide an ultraviolet irradiation device capable of avoiding consumption of the ultraviolet lamp. Another object of the present invention is to avoid turning off the ultraviolet lamp automatically and turn on / off the ultraviolet lamp when the work is scheduled to be supplied even when the supply of the work is interrupted for a certain period of time. An object of the present invention is to provide an ultraviolet irradiation device that does not cause unnecessary waiting time for a work.

[0008]

The present invention has the following constitution in order to achieve such an object. That is, according to the first aspect of the invention, ultraviolet rays are applied to a ring-shaped frame (workpiece) holding the semiconductor wafer through an ultraviolet-sensitive adhesive tape attached to the back surface of the semiconductor wafer. In the ultraviolet irradiation device for irradiating, an ultraviolet lamp for irradiating the work with ultraviolet light, an ultraviolet lamp drive control unit for turning on / off the ultraviolet lamp, and a work detecting means for detecting that the work is supplied, The time is set to turn off the ultraviolet lamp when the supply of the work is interrupted for a certain period of time,
A first timer means for starting time measurement based on lighting of an ultraviolet lamp, outputting a time-up signal when the set time has elapsed, and resetting the time measurement when the work detecting means detects a work. The ultraviolet lamp drive controller turns off the ultraviolet lamp based on the time-up signal from the first timer means.

According to a second aspect of the present invention, in addition to the ultraviolet lamp similar to the ultraviolet irradiation device according to the first aspect, the ultraviolet lamp drive control section, the work detecting means, the first timer means, Based on the first timer means outputting the time-up signal, a notification means for issuing an alarm, a lighting continuation operation switch for continuing the lighting of the ultraviolet lamp, and the first timer means outputting the time-up signal. Based on this, the time measurement is started, the time-up signal is output when the set time elapses, and the time measurement is reset when the lighting continuation operation switch is operated.
And the ultraviolet lamp drive controller turns off the ultraviolet lamp based on the time-up signal from the second timer means.

[0010]

The operation of the present invention is as follows. That is,
According to the invention described in claim 1, the first timer means starts the time measurement when the ultraviolet lamp is turned on. When the work is supplied within the set time of the first timer means, the time measurement of the first timer means is reset based on the signal from the work detecting means, so that the ultraviolet lamp keeps lighting. On the other hand, when the work is not supplied within the set time of the first timer means, the first timer means outputs a time-up signal, and the ultraviolet lamp drive control unit turns off the ultraviolet lamp.

According to the second aspect of the present invention, the first timer means outputs the time-up signal, and the notifying means issues an alarm to notify the turning-off of the ultraviolet lamp and the second timer. The means starts timing. If it is known that the work is supplied within a relatively short time, the operator presses the lighting continuation operation switch within the set time of the second timer means. As a result, the second timer means is reset, so that the ultraviolet lamp continues to be turned on without being turned off. If the lighting continuation operation switch is not operated within the set time of the second timer means, the second
The ultraviolet lamp drive controller turns off the ultraviolet lamp based on the time-up of the timer means.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing a schematic configuration of a mechanical part of an embodiment of an ultraviolet irradiation device according to the present invention, and FIG. 2 is an external perspective view of a work to be processed. The work W is one in which an ultraviolet-sensitive adhesive tape 2 larger than the semiconductor wafer 1 is attached to the back surface of the semiconductor wafer 1, and the outer peripheral portion of this adhesive tape 2 is attached to the ring-shaped frame 3.

An ultraviolet irradiating device for irradiating the work W with an ultraviolet ray includes a work receiving part A for carrying in the work W from an unillustrated upper dicing device, an ultraviolet irradiation processing part B, and a processed work W '. It is composed of a work-discharging section C that carries out to a not-shown lower processing device (for example, a stocker device that stores a processed work W ′ in a required cassette, or a die bonding device).

The work receiving section A is provided with a receiving belt 4 along the line and a work placing table 6 on which a work W is placed and which is raised and lowered by an air cylinder 5. The work discharge unit C has a discharge belt 7 along the line.
And a work table 9 that is moved up and down by the air cylinder 8.

The ultraviolet irradiation processing section B is a ring-shaped work support base 1 for receiving the frame portion of the work W.
0, a cylindrical housing 11 that accommodates the same, an ultraviolet lamp 12 that is disposed below the cylindrical housing 11 and irradiates the lower surface of the work W with ultraviolet rays, an ultraviolet bundle tube 13, a shutter 14, a shutter drive motor 15, and the like. There is.
Then, from the work receiving section A to the ultraviolet irradiation processing section B
From the UV irradiation processing section B to the workpiece dispensing section C
A traverse mechanism 16 that sucks and conveys the work W is provided.

The traverse mechanism 16 includes two sets of work suction mechanisms 19, which are moved up and down by air cylinders 17, 18.
A guide frame 2 in which a movable frame 21 having 20 at both ends is arranged in the line direction by an air cylinder 22.
It is configured to move forward and backward along 3
One suction mechanism 19 supplies the work W of the work receiving section A to the ultraviolet irradiation processing section B, and at the same time, the other suction mechanism 20 sends out the processed work W ′ of the ultraviolet irradiation processing section B to the work discharging section C. Has become.

The ultraviolet irradiation device configured as described above includes a control system for automatically turning off the ultraviolet lamp as shown in FIG. The ultraviolet lamp drive control unit 30
ON / OF of the lighting signal a from the main controller 31
The ultraviolet lamp 12 is turned on / off according to F, and the shutter driving motor 15 is turned on / off according to ON / OFF of the shutter opening / closing signal b from the main controller 31.
Is rotated in the reverse direction to open the shutter 14 for a predetermined time.

The main controller 31 is for controlling the automatic extinction of the ultraviolet lamp 12 of this apparatus.
The main controller 31 also has a function as a second timer unit in the present invention, as will be apparent from the operation description given later. Main controller 31
Is a CPU 32 that executes processing according to an operation program stored in the memory 33, an input interface 34,
And an output interface 35. The input interface 34 includes a shutter open sensor 36 for detecting that the shutter 14 is opened, a shutter close sensor 37 for detecting that the shutter 14 is closed, and a lighting operation switch SW for lighting the ultraviolet lamp 12.
1. An extinguishing operation switch SW2 for extinguishing the ultraviolet lamp 12, a lighting continuation operating switch SW3 for continuing to energize the ultraviolet lamp 12, and an extinction time setting timer 3
8 etc. are connected respectively. The shutter open sensor 36 corresponds to the work detecting means in the present invention.

The turn-off time setting timer 38 is a timer for detecting that the supply of the work W is interrupted for a predetermined time or longer, and the set time is set to, for example, 1 hour. The turn-off time setting timer 38 is used by the main controller 3
ON / OF of timer start signal c given from 1
Depending on F, the start / reset of time measurement is switched. The turn-off time setting timer 38 corresponds to the first timer means in the present invention.

On the output interface 35 of the main controller 31, a buzzer 39 which emits an alarm sound when the extinguishing time setting timer 38 times out, and a state of the device when the alarm sound is generated are displayed as codes.
The segment LED 40 is connected.

Next, with reference to the flow chart shown in FIG. 4, the operation of the apparatus of the embodiment, in particular, the automatic turning-off operation of the ultraviolet lamp 12 will be described.

The CPU 32 of the main controller 31 is
The state of the lighting operation switch SW1 is monitored (step S
1) When the lighting operation switch SW1 is turned on, the lighting signal a is turned on to turn on the ultraviolet lamp 12
Is turned on (step S2). Then, the timer start signal c is turned on to start the time measurement of the light-off time setting timer 38. After the turning-off time setting timer 38 is started, the CPU 32 monitors the state of the turning-off operation switch SW2 (step S4).
When W2 is turned on, the lighting signal a is turned off to turn off the ultraviolet lamp 12 (step S
5) Then, the timer start signal c is turned off, and the extinction time setting timer 38 is reset for time measurement (step S6).

When it is confirmed in step S4 that the light-off operation switch SW2 is in the OFF state, it is determined whether or not the time-up signal d of the light-off time setting timer 38 is in the ON state (step S7). Turn-off time setting timer 3
Within the set time of 8 (that is, the time-up signal d is OF
When the work W is supplied to the ultraviolet irradiating device from the upper hand side device (during the F state), it is detected that the work is carried into the device by an optical sensor or the like not shown. CPU3
2, the shutter opening / closing signal b is turned on based on the detection signal of this sensor, the motor 15 is driven, and the shutter 14 is opened. By opening the shutter 14,
The shutter open sensor 36 is turned on. CPU32
Judges whether or not the work W is supplied into the apparatus by monitoring the state of the shutter open sensor 36 (step S8). When the shutter open sensor 36 is turned on, the timer start signal c is turned off. By setting the state, the light-off time setting timer 38 is reset (step S9). Then, returning to step S3, the extinguishing time setting timer 38 is started again. When the work W is supplied within the set time of the turn-off time setting timer 38, the turn-off time setting timer 38 is reset and the ultraviolet lamp 12 continues to be turned on each time. In this embodiment, the presence or absence of the supply of the work W is determined by the state of the shutter open sensor 36. However, the work W is directly detected by the state of the optical sensor or the like which directly detects the work W.
The presence or absence of the supply of may be determined.

On the other hand, when the work W is not supplied within the set time of the turn-off time setting timer 38, the turn-off time setting timer 38 times out and the time-up signal d is turned on. Although not shown in the flowchart of FIG.
When the time-up signal d is turned on, the process proceeds from step S7 to step S5, and the lighting signal a is turned off.
The ultraviolet lamp 12 may be turned off in the F state. By doing so, the ultraviolet lamp 12 is automatically turned off when the work W is not supplied for a long time (set time of the turn-off time setting timer 38), so that waste of power and consumption of the ultraviolet lamp 12 are avoided. be able to. Such a configuration example corresponds to the invention described in claim 1.

By the way, there are cases where it is better not to turn off the ultraviolet lamp 12 immediately because the turn-off time setting timer 38 times out. That is, when it is known that the work W is supplied within a relatively short time after the turn-off time setting timer 38 is up, it is better not to turn off the ultraviolet lamp 12. Since it takes a considerable time to turn on the ultraviolet lamp 12 and then stabilize the ultraviolet lamp 12 once the ultraviolet lamp 12 is turned off, if the workpiece W is supplied during that time, the waiting time of the workpiece W becomes unduly long. Because. Therefore, in this embodiment (corresponding to the invention described in claim 2), processing is performed as shown in step S10 and subsequent steps in FIG.

That is, when the time-up signal d is turned on, the buzzer 39 is driven to generate an alarm sound, a predetermined code is displayed on the 7-segment LED 40, and the ultraviolet lamp 12 is soon turned off. (Step S10). Then, the timer start signal c is turned off to reset the light-off time setting timer 38 (step S11), and subsequently, the timer (soft timer) realized by the program of the main controller 31 is started (step S1).
2). The set time of this soft timer is, for example, about 3 minutes.

After the soft timer is started, the CPU 32
Monitors the state of the lighting continuation operation switch SW3 (step S13). When the lighting continuation operation switch SW3 is turned on, the soft timer is reset (step S14), the process returns to step S3, and the turn-off time setting timer 38 is restarted. In other words, when the operator presses the lighting continuation operation switch SW3, the ultraviolet lamp 12 continues to light even if the turn-off time setting timer 38 has timed out, which is effective when the work W is scheduled to be supplied. Is. On the other hand, if the lighting continuation operation switch SW3 is not pressed within the set time of the soft timer and the soft timer times out (step S15), it is determined that the work W is not scheduled to be supplied, and the process proceeds to step S5. , Lighting signal a OF
The F lamp is turned on and the ultraviolet lamp 12 is turned off.

Although the second timer means is constituted by the soft timer in the above-mentioned embodiment, it may be a hard timer similar to the turn-off time setting timer 38. vice versa,
Of course, the turn-off time setting timer 38 may be configured by a Sotov timer.

[0029]

As is apparent from the above description, according to the invention described in claim 1, when the supply of the work to the ultraviolet irradiation device is interrupted for a predetermined time, the ultraviolet lamp is automatically activated. It is possible to avoid waste of electric power and consumption of the ultraviolet lamp because it is turned off.

According to the second aspect of the invention, even if the supply of the work is stopped for a predetermined time, the ultraviolet lamp is turned on by operating the lighting continuation operation switch within the predetermined time. Can be continued. Therefore, the work is not unnecessarily long waited until the ultraviolet lamp is relit and stabilized.

[Brief description of drawings]

FIG. 1 is a diagram showing a schematic configuration of a mechanical section of an apparatus according to an embodiment.

FIG. 2 is an external perspective view of a work.

FIG. 3 is a block diagram of a control system for automatically turning off an ultraviolet lamp.

FIG. 4 is a flowchart of an automatic turning-off operation of an ultraviolet lamp.

[Explanation of symbols]

 W ... Work 1 ... Semiconductor wafer 2 ... UV sensitive adhesive tape 3 ... Ring frame 12 ... UV lamp 12 30 ... UV lamp drive control unit 31 ... Main controller 36 ... Shutter open sensor 38 ... Turn-off time setting timer 39 ... Buzzer 40 … 7 segment LED SW1… Lighting operation switch SW2… Extinguishing operation switch SW3… Lighting continuation operation switch

Front page continuation (72) Inventor Toshiyuki Sekito 1-2-2 Shimohozumi, Ibaraki-shi, Osaka Nitto Denko Co., Ltd. (72) Inventor Matsuo Kanbara 1-21-2 Shihohozumi, Ibaraki-shi, Osaka Nitto Denko Stock In-house (72) Inventor Saburo Miyamoto 1-2 1-2 Shimohozumi, Ibaraki City, Osaka Prefecture Nitto Seiki Co., Ltd.

Claims (2)

[Claims] 1. A ring-shaped frame (hereinafter, referred to as a work) holding the semiconductor wafer is irradiated with ultraviolet rays through an ultraviolet-sensitive adhesive tape attached to the back surface of the semiconductor wafer. In the ultraviolet irradiation device, an ultraviolet lamp that irradiates the work with ultraviolet light, an ultraviolet lamp drive control unit that turns on / off the ultraviolet lamp, a work detection unit that detects that the work is supplied, and the work. The time is set to turn off the ultraviolet lamp when the supply of power is interrupted for a certain period of time, the time measurement is started based on the lighting of the ultraviolet lamp, and a time-up signal is output when the set time elapses, and the work detection is performed. A first timer means for resetting the time measurement when the means detects the work, the ultraviolet lamp drive control section Based on the time-up signal from the first timer means, the ultraviolet irradiation apparatus characterized by turning off the ultraviolet lamp. 2. A ring-shaped frame (hereinafter, referred to as a work) holding the semiconductor wafer is irradiated with ultraviolet rays through an ultraviolet-sensitive adhesive tape attached to the back surface of the semiconductor wafer. In the ultraviolet irradiation device, an ultraviolet lamp that irradiates the work with ultraviolet light, an ultraviolet lamp drive control unit that turns on / off the ultraviolet lamp, a work detection unit that detects that the work is supplied, and the work. The time is set to turn off the ultraviolet lamp when the supply of power is interrupted for a certain period of time, the time measurement is started based on the lighting of the ultraviolet lamp, and a time-up signal is output when the set time elapses, and the work detection is performed. The first timer means for resetting the time measurement when the means detects the work, and the first timer means Based on the output of the signal, an alarm means for issuing an alarm, a lighting continuation operation switch for continuing the lighting of the ultraviolet lamp, and the first timer means outputting a time-up signal to measure the time. A second timer means for starting, outputting a time-up signal when a set time has elapsed, and resetting the time measurement when the lighting continuation operation switch is operated, wherein the ultraviolet lamp drive control section is An ultraviolet irradiation device characterized in that an ultraviolet lamp is turned off based on a time-up signal from a second timer means.