GB2306163B - Transfer transporting apparatus for semiconductor device manufacturing stocker - Google Patents

Transfer transporting apparatus for semiconductor device manufacturing stocker

Info

Publication number
GB2306163B
GB2306163B GB9601456A GB9601456A GB2306163B GB 2306163 B GB2306163 B GB 2306163B GB 9601456 A GB9601456 A GB 9601456A GB 9601456 A GB9601456 A GB 9601456A GB 2306163 B GB2306163 B GB 2306163B
Authority
GB
United Kingdom
Prior art keywords
stocker
semiconductor device
device manufacturing
transporting apparatus
transfer transporting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9601456A
Other languages
English (en)
Other versions
GB9601456D0 (en
GB2306163A (en
Inventor
Kwon-Su Park
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of GB9601456D0 publication Critical patent/GB9601456D0/en
Publication of GB2306163A publication Critical patent/GB2306163A/en
Application granted granted Critical
Publication of GB2306163B publication Critical patent/GB2306163B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
GB9601456A 1995-10-13 1996-01-25 Transfer transporting apparatus for semiconductor device manufacturing stocker Expired - Fee Related GB2306163B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950035421A KR970023964A (ko) 1995-10-13 1995-10-13 반도체 제조용 스톡커의 트랜스퍼 이송장치

Publications (3)

Publication Number Publication Date
GB9601456D0 GB9601456D0 (en) 1996-03-27
GB2306163A GB2306163A (en) 1997-04-30
GB2306163B true GB2306163B (en) 1997-11-19

Family

ID=19430198

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9601456A Expired - Fee Related GB2306163B (en) 1995-10-13 1996-01-25 Transfer transporting apparatus for semiconductor device manufacturing stocker

Country Status (4)

Country Link
JP (1) JPH09110112A (ko)
KR (1) KR970023964A (ko)
DE (1) DE19639634A1 (ko)
GB (1) GB2306163B (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100577622B1 (ko) * 2001-12-04 2006-05-10 로제 가부시키가이샤 용기의 일시적 반입, 유치, 반출용 장치
US20120000494A1 (en) * 2010-03-31 2012-01-05 Ats Automation Tooling System Inc. Wet bench apparatus and method
KR102445028B1 (ko) * 2020-10-19 2022-09-21 주식회사 해토 초박형 유리 강화 열처리 시스템

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1426023A (en) * 1972-09-05 1976-02-25 Mills Const Sa Lifting apparatus for transferring loads in dynamic storage installations
GB1476085A (en) * 1974-09-27 1977-06-10 Bertello Ist Grafico Apparatus for extracting and inserting filing cabinet drawers from and to two filing cabinet banks or either of two consultation locations at the ends of said banks of filing cabinets respectivel and systems including such apparatus
US4756657A (en) * 1986-04-04 1988-07-12 Interlake, Inc. Stacker bin shuttle
EP0599032A1 (de) * 1992-11-23 1994-06-01 Manitec Consulting AG Behälterlager
GB2276874A (en) * 1993-04-05 1994-10-12 Hitachi Shipbuilding Eng Co System for storage,retrieval and supply of steel plates
GB2279341A (en) * 1993-06-28 1995-01-04 Owl Ag Logistik Systeme Selecting and transporting objects in a warehouse

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4775281A (en) * 1986-12-02 1988-10-04 Teradyne, Inc. Apparatus and method for loading and unloading wafers
JPH0620925B2 (ja) * 1987-10-02 1994-03-23 株式会社ダイフク クレーンの昇降キャレッジ駆動装置
KR0133676B1 (ko) * 1987-12-07 1998-04-23 후세 노보루 웨이퍼 이동 교체 장치 및 방법
JP2559617B2 (ja) * 1988-03-24 1996-12-04 キヤノン株式会社 基板処理装置
JPH03131493A (ja) * 1989-10-13 1991-06-05 Toshiba Corp 走行体の発塵防止装置
DE4425208C2 (de) * 1994-07-16 1996-05-09 Jenoptik Technologie Gmbh Einrichtung zur Kopplung von Be- und Entladegeräten mit Halbleiterbearbeitungsmaschinen

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1426023A (en) * 1972-09-05 1976-02-25 Mills Const Sa Lifting apparatus for transferring loads in dynamic storage installations
GB1476085A (en) * 1974-09-27 1977-06-10 Bertello Ist Grafico Apparatus for extracting and inserting filing cabinet drawers from and to two filing cabinet banks or either of two consultation locations at the ends of said banks of filing cabinets respectivel and systems including such apparatus
US4756657A (en) * 1986-04-04 1988-07-12 Interlake, Inc. Stacker bin shuttle
EP0599032A1 (de) * 1992-11-23 1994-06-01 Manitec Consulting AG Behälterlager
GB2276874A (en) * 1993-04-05 1994-10-12 Hitachi Shipbuilding Eng Co System for storage,retrieval and supply of steel plates
GB2279341A (en) * 1993-06-28 1995-01-04 Owl Ag Logistik Systeme Selecting and transporting objects in a warehouse

Also Published As

Publication number Publication date
JPH09110112A (ja) 1997-04-28
GB9601456D0 (en) 1996-03-27
KR970023964A (ko) 1997-05-30
GB2306163A (en) 1997-04-30
DE19639634A1 (de) 1997-04-17

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20010125