GB2293690B - Manufacturing method for a semiconductor device - Google Patents
Manufacturing method for a semiconductor deviceInfo
- Publication number
- GB2293690B GB2293690B GB9521179A GB9521179A GB2293690B GB 2293690 B GB2293690 B GB 2293690B GB 9521179 A GB9521179 A GB 9521179A GB 9521179 A GB9521179 A GB 9521179A GB 2293690 B GB2293690 B GB 2293690B
- Authority
- GB
- United Kingdom
- Prior art keywords
- manufacturing
- semiconductor device
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/31—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor
- H10B12/318—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor the storage electrode having multiple segments
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/03—Making the capacitor or connections thereto
- H10B12/033—Making the capacitor or connections thereto the capacitor extending over the transistor
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019910015250A KR940009611B1 (en) | 1991-08-31 | 1991-08-31 | Manufacturing method of highly integrated semiconductor device capacitor |
KR910021974 | 1991-11-30 | ||
KR920003339 | 1992-02-29 | ||
GB9218177A GB2259187B (en) | 1991-08-31 | 1992-08-26 | Semiconductor device |
Publications (3)
Publication Number | Publication Date |
---|---|
GB9521179D0 GB9521179D0 (en) | 1995-12-20 |
GB2293690A GB2293690A (en) | 1996-04-03 |
GB2293690B true GB2293690B (en) | 1996-06-19 |
Family
ID=27450924
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB9521179A Expired - Fee Related GB2293690B (en) | 1991-08-31 | 1992-08-26 | Manufacturing method for a semiconductor device |
GB9601877A Expired - Fee Related GB2297648B (en) | 1991-08-31 | 1992-08-26 | Semiconductor device |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB9601877A Expired - Fee Related GB2297648B (en) | 1991-08-31 | 1992-08-26 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
GB (2) | GB2293690B (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5739060A (en) * | 1996-08-16 | 1998-04-14 | United Microelecrtronics Corporation | Method of fabricating a capacitor structure for a semiconductor memory device |
DE19637389C1 (en) * | 1996-09-13 | 1997-10-16 | Siemens Ag | High packing density DRAM cell array production |
EP0858105A3 (en) * | 1997-01-06 | 2001-10-04 | Texas Instruments Inc. | Method of forming a stacked capacitor electrode for a DRAM |
NL1006113C2 (en) * | 1997-05-22 | 1998-11-25 | United Microelectronics Corp | Forming DRAM cell containing data storage capacitor, used for computer memory chips |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5023203A (en) * | 1988-07-28 | 1991-06-11 | Korea Electronics & Telecommunications Research Institute Et Al. | Method of patterning fine line width semiconductor topology using a spacer |
US5084405A (en) * | 1991-06-07 | 1992-01-28 | Micron Technology, Inc. | Process to fabricate a double ring stacked cell structure |
EP0415530B1 (en) * | 1989-07-05 | 1994-11-30 | Fujitsu Limited | Semiconductor memory device having stacked capacitor and method of producing the same |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DD299990A5 (en) * | 1990-02-23 | 1992-05-14 | Dresden Forschzentr Mikroelek | One-transistor memory cell arrangement and method for its production |
KR930009583B1 (en) * | 1990-11-29 | 1993-10-07 | 삼성전자 주식회사 | Method for manufacturing a semiconductor device with villus-type capacitor |
KR930009593B1 (en) * | 1991-01-30 | 1993-10-07 | 삼성전자 주식회사 | Lsi semiconductor memory device and manufacturing method thereof |
-
1992
- 1992-08-26 GB GB9521179A patent/GB2293690B/en not_active Expired - Fee Related
- 1992-08-26 GB GB9601877A patent/GB2297648B/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5023203A (en) * | 1988-07-28 | 1991-06-11 | Korea Electronics & Telecommunications Research Institute Et Al. | Method of patterning fine line width semiconductor topology using a spacer |
EP0415530B1 (en) * | 1989-07-05 | 1994-11-30 | Fujitsu Limited | Semiconductor memory device having stacked capacitor and method of producing the same |
US5084405A (en) * | 1991-06-07 | 1992-01-28 | Micron Technology, Inc. | Process to fabricate a double ring stacked cell structure |
Also Published As
Publication number | Publication date |
---|---|
GB2297648B (en) | 1996-10-23 |
GB2293690A (en) | 1996-04-03 |
GB9521179D0 (en) | 1995-12-20 |
GB9601877D0 (en) | 1996-04-03 |
GB2297648A (en) | 1996-08-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 20100826 |